• 설비공학논문집
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• 제22권5호
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• pp.282-288
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• 2010

Experiment on the surface characteristics of polymer films treated by atmospheric pressure plasma has been conducted. We chose the process parameters as frequency, gas flow, treatment time, and scrutinized the effects of the process parameters on the surface characteristics of polymer materials by measuring the contact angle and examining SEM. As the result, the surface characteristics highly depends on frequency, reaction gas and treatment time. In the case of PC substrate, the contact angle was changed from $83.5^{\circ}$ (before plasma treatment) to $30^{\circ}$ (after plasma treatment) at 30 kHz, CDA 0.6%, and number of repeat 7. In the case of PET substrate, the contact angle change was found from $59^{\circ}$ to $23.5^{\circ}$ at 20 kHz, CDA 0.6%, and number of repeat 7. In the case of EVA substrate, it shows from $84^{\circ}$ to $44.2^{\circ}$ at 30 kHz, CDA 0.6%, and number of repeat 7.

• 신재생에너지
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• 제9권2호
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• pp.23-29
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• 2013

Furnace and laser is currently the most important doping process. However furnace is typically difficult appling for selective emitters. Laser requires an expensive equipment and induces a structural damage due to high temperature using laser. This study has developed a new atmospheric pressure plasma source and research atmospheric pressure plasma doping. Atmospheric pressure plasma source injected Ar gas is applied a low frequency (a few 10 kHz) and discharged the plasma. We used P type silicon wafers of solar cell. We set the doping parameter that plasma treatment time was 6s and 30s, and the current of making the plasma is 70 mA and 120 mA. As result of experiment, prolonged plasma process time and highly plasma current occur deeper doping depth and improve sheet resistance. We investigated doping profile of phosphorus paste by SIMS (Secondary Ion Mass Spectroscopy) and obtained the sheet resistance using generally formula. Additionally, grasped the wafer surface image with SEM (Scanning Electron Microscopy) to investigate surface damage of doped wafer. Therefore we confirm the possibility making the selective emitter of solar cell applied atmospheric pressure plasma doping with phosphorus paste.

• 한국염색가공학회지
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• 제5권2호
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• pp.134-138
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• 1993

Wool, silk and nylon 6 fabrics were treated with low-temperature plasma under atmospheric pressure of acetone/argon or helium/argon for 30 and 180 sec, and then dyed with leveling type acid dye, C.I. Acid Red 18 and milling type acid dye, C.I. Acid Blue 83. In spite of short time of the plasma treatment for thirty seconds, the color depth of wool fabrics was increased remarkably with both of the plasma gases, aceton/argon or helium/argon and with the kinds of dyes i.e., levelin type or milling type. But the atmosperic low-temperature plasmas did not increase the depth of silk and nylon 6 fabrics dyed with both of the acid dyes regardless of the teated time and plasma gases. It seems that low-temperature plasma by atmospheric-pressure discharge is effective for improvement of dyeing of wools as is the same way with the low-temperature plasma by glow discharge. The kinds of plasma gases and treated time did not influnce the depth of wool fabric pretreted with the atmosperic low-temperature plasmas.

• 한국정밀공학회지
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• 제19권8호
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• pp.34-37
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• 2002

• 조명전기설비학회논문지
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• 제27권2호
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• pp.77-83
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• 2013

In this study, we aimed to determine the optical properties of the plasma used for the dry cleaning method. The optical properties of the atmospheric pressure plasma device were measured through the degree of ionization of hydrogen or nitrogen gas by ionized atmospheric gas. The degree of ionization of hydrogen or nitrogen is closely associated with surface modification. We observed through our experiments that argon gas, an atmospheric gas, caused an increase in the ionization of nitrogen gas, which has similar ionization energy. This type of increase in nitrogen gas ions is believed to affect surface modification. The results of our study show that the pressure of argon gas and the partial pressure of argon and nitrogen gases lead to different results. This important result shows that argon ions can affect the ionization of nitrogen gas.

• 치위생과학회지
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• 제14권1호
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• pp.1-6
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• 2014

본 연구는 저온 상압 플라즈마 장치를 이용하여 구강점막질환을 일으키는 C. albicans 균을 효과적으로 사멸하기 위해 시행하였다. 조직에 적합하게 처리될 수 있도록 저온 상압 플라즈마 장치를 고안하고, 먼저 agar plate에 C. albicans 균을 처리하여 플라즈마를 조사한 결과 agar plate표면에 C. albicans 균을 처리 후 저온 상압 플라즈마 장치를 적용한 결과 60초 처리시 1.2 cm, 180초 처리시 1.4 cm, 300초 처리시 1.7 cm의 박테리아 생장 억제 구간이 나타나는 것을 확인하였다. 또한, 조직에서의 구강병원균 사멸 효과를 확인하기 위해 HRM-2 마우스 조직에 C. albicans 균을 처리하여 저온 상압 플라즈마를 조사 시 마우스 조직 표면에 C. albicans 균을 오염시켜 저온 상압 플라즈마 처리 후 CFU 방법으로 측정한 결과 300초간 1회 처리시 2 log CFU/ml, 300초간 2회 처리시 3 log CFU/ml, 300초간 3 회 처리시 6 log CFU/ml의 균 수 감소 효과가 나타나는 것을 확인하였다(p<0.05). 따라서, 저온의 저온 상압 플라즈마 장치는 효과적으로 구강 병원균을 사멸시킬 수 있으며, 구강점막질환 치료 장비로서 사용될 수 있을 것으로 생각된다.

• 공업화학
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• 제21권1호
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• pp.98-103
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• 2010

저압 플라즈마와 대기압 플라즈마를 사용하여 폴리카보네이트를 처리한 후 표면 개질 효과를 접촉각 측정을 통하여 비교 분석하였다. 플라즈마 처리 전의 폴리카보네이트의 탈이온수의 접촉각은 $82.31^{\circ}$이었으나 플라즈마 처리 후의 최소 접촉각은 산소 분위기의 저압 플라즈마에서 $9.17^{\circ}$의 최소 접촉각을 얻을 수 있었다. 플라즈마 방전 전력과 반응기체의 유량 증가에 따른 접촉각의 변화는 크지 않았으나 지속적으로 감소하는 특성을 보였다. 플라즈마 처리 후 경과시간에 따라 접촉각의 증가 현상을 보여 플라즈마 처리 후 후속 공정은 가급적 빨리 진행하는 것이 표면에너지 증가에 따른 효과를 이용하는데 효율적이다. 표면 화학결합 분석에서 산소분위기의 플라즈마 처리는 표면에 상대적으로 많은 극성 작용기를 형성하였다. 전반적으로 폴리카보네이트의 표면 개질에서 저압 산소플라즈마를 사용하여 처리하는 것이 대기압 플라즈마보다 효과적으로 친수성 표면을 만들 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.528-528
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• 2012

Recently, atmospheric pressure plasmas attract lots of interests for the useful applications such as surface modification and bio-medical treatment. In this study, a particle-in-cell Monte Carlo collision (PIC-MCC) simulation was adopted to investigate the discharge characteristics of a planar micro dielectric barrier discharge (DBD) with a driving frequency from 13.56 MHz to 162.72 MHz and with a gap distance of 80 micrometers. The variation of frequency, in the change in the electron energy probability function (EEPF). Through the relation between the ion trajectories and the frequency, results in the change of EEPFs is achievable with the turning point of frequency mode. Therefore, it is possible to categorize the efficient operation range of DBDs for its applications by controlling the interactions between plasmas and neutral gas for the generation of preferable radicals.

• Korean Chemical Engineering Research
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• 제49권6호
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• pp.835-839
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• 2011

토치형 상압 플라즈마 반응기를 통한 방전 및 플라즈마 flame에 대한 분석과 발생된 플라즈마 현상을 이용하여 E. coli에 대한 살균효과를 측정하였다. 상압 플라즈마 반응기를 통해 나오는 플라즈마 flame의 길이는 입력전압, 반응기의 유량 그리고 아르곤/산소 혼합기체에서의 산소비율에 영향을 크게 받았다. 플라즈마 flame에 의한 가열효과는 10분 조사 후에도 $43^{\circ}C$ 미만으로 저온처리가 가능했다. E. coli에 대한 살균처리에서 입력전압의 증가, 아르곤/산소 혼합기체에서의 산소비율 증가 그리고 플라즈마 flame에 대한 노출시간의 증가에 따라 전체적인 살균효과를 향상되었다. 플라즈마 처리 시에 오존농도가 높은 공정조건에서 플라즈마 flame의 직접적인 접촉시간을 증가시키면 살균효과를 극대화할 수 있다.

• Fibers and Polymers
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• 제6권2호
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• pp.113-120
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• 2005

Helium-oxygen plasma treatments were conducted to modify poly(trimethylene terephthalate) (PIT) and poly(ethylene terephthalate) (PET) warp knitted fabrics under atmospheric pressure. Lubricant and contamination removals by plasma etching effect were examined by weight loss $(\%)$ measurements and scanning electron microscopy (SEM) analysis. Surface oxidation by plasma treatments was revealed by x-ray photoelectron spectroscopy (XPS) analyses, resulting in formation of hydrophilic groups and moisture regain $(\%)$ enhancement. Low-stress mechanical properties (evaluated by Kawabata evaluation system) and bulk properties (air permeability and bust strength) were enhanced by plasma treatment. Increasing interfiber and interyarn frictions might play important roles in enhancing surface property changes by plasma etching effect, and then changing low-stress mechanical properties and bulk properties for both fabrics.