• 제목/요약/키워드: asymmetric slits

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Narrow Channel Formation Using Asymmetric Halftone Exposure with Conventional Photolithography

  • Cheon, Ki-Cheol;Woo, Ju-Hyun;Jung, Deuk-Soo;Park, Mun-Gi;Kim, Hwan;Lim, Byoung-Ho;Yu, Sang-Jean
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.258-260
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    • 2008
  • Developed halftone exposure technique was successfully applied to the fabrication of narrow transistor channels below $4\;{\mu}m$ with conventional photolithography method. Asymmetric slits concept of photo mask was applied to make channel lengths (L) shorter for thin film transistor's (TFT) high performance. These short channel TFTs verified better quality transistor characteristics.

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