• Smart Structures and Systems
• /
• v.13 no.6
• /
• pp.959-974
• /
• 2014

Hand-Arm Vibration Syndrome (HAVS) is a group of diseases caused by exposure of the hands to vibration while operating the hand held power tools such as road breaker, drilling machine, demolition hammer in construction works. In this paper, area-changed capacitive micro-accelerometer is designed to measure the vibration exposure on worker's hand when operating a drilling machine on various blocks such as clay block, paver block and solid cement block. The design process includes mathematical modelling of micro-accelerometer and simulations are done using INTELLISUITE 8.6. Experimental results are taken for various blocks surfaces using conventional and micro-accelerometer. Comparisons show that usage of area-changed micro-accelerometer for Hand-arm vibration monitoring provides better sensitivity, which in turn reduces the risk of HAVS in workers.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.247.1-247.1
• /
• 2014

The capacitive coupled plasma is used widely in the semiconductor industries. Especially, the uniformity of the industrial plasma is heavily related with defect ratio of devices. Therefore, the industries need the capacitive coupled plasma source which can generate the uniform plasma and control the plasma's uniformity. To achieving the uniformity of the large area plasma, we designed multi-powered electrodes. We controlled the uniformity by controlling the power of each electrode. After this work, we started to research another concept of the plasma device. We make the plasma chamber that has multi-ground electrodes imaginary (CST microwave studio) and simulate the electric field. The shape of the multi-ground electrodes is ring type, and it is same as the shape of the multi-power electrodes that we researched before. The diameter of the side electrode's edge is 300mm. We assumed that the plasma uniformity is related with the impedance of ground electrodes. Therefore we simulated the imaginary chamber in three cases. First, we connected L (inductor) and C (capacitor) at the center of multi-ground electrodes. Second, we changed electric conductivity of multi-ground electrode. Third, we changed the insulator's thickness between the center ground electrode and the side ground electrode. The driving frequency is 2, 13.56 and 100 MHz. We switched our multi-powered electrode system to multi-ground electrode system. After switching, we measured the plasma uniformity after installing a variable vacuum capacitor at the ground line. We investigate the effect of ground electrodes' impedance to plasma uniformity.