• 제목/요약/키워드: anodizing

검색결과 338건 처리시간 0.026초

AAO를 이용한 나노 패턴 마스터 제작에 관한 연구 (Study on Fabrication of Highly Ordered Nano Patterned Master by Using Anodic Aluminum Oxidation)

  • 신홍규;권종태;서영호;김병희
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 춘계학술대회 논문집
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    • pp.368-370
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    • 2007
  • AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. The resulting good filled uniform nano molded structure through hot embossing molding process shows the validity of the fabricated nano pattern masters.

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黃酸溶液에서의 硬質陽極酸化에 關한 硏究 (Studies on the Hard Anodizing in Sulphuric Acid Solution)

  • 김종찬;박용진
    • 한국표면공학회지
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    • 제13권1호
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    • pp.8-15
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    • 1980
  • The critical voltage of hard coat range of Al alloys (K 186, 43S) at various electrolytes and the effects of voltage, temperature of electrolytes and concentration of sulfric acid were investigated, m the hope that to find the adequate voltage. Two kind of A1 alloys were anodized in three typical electrolytes and micro vickers hardness of the films were measured. With respect to the relationship between the hardness of the film and the voltage The result of this experiment are as fallows. 1. The critical voltage of hard coat rangs for the electrolytes $H_2SO_4\;10%,\;H_2SO_4\;10%\;+\;H_2C_2O_4\;2H_2O\;10g/l,\;H_2SO_4\;10%\;+\;NaHSO_4\;5%$ was 20V 22V 24V respectively. 2. $H_2SO_4\;10%\;+\;NaHSO_4$ 5% electrolyte was most adventageous among the three electrolyte in the respect of hardness. 3. The effect of concentration of sulphuric acid was not appeared.

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Enhanced Adhesion of Cu Film on the Aluminum Oxide by Applying an Ion-beam-mixd Al Seed Layar

  • 김형진;박재원
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.229-229
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    • 2012
  • Adhesion of Copper film on the aluminum oxide layer formed by anodizing an aluminum plate was enhanced by applying ion beam mixing method. Forming an conductive metal layer on the insulating oxide surface without using adhesive epoxy bonds provide metal-PCB(Printed Circuit Board) better thermal conductivities, which are crucial for high power electric device working condition. IBM (Ion beam mixing) process consists of 3 steps; a preliminary deposition of an film, ion beam bombardment, and additional deposition of film with a proper thickness for the application. For the deposition of the films, e-beam evaporation method was used and 70 KeV N-ions were applied for the ion beam bombardment in this work. Adhesions of the interfaces measured by the adhesive tape test and the pull-off test showed an enhancement with the aid of IBM and the adhesion of the ion-beam-mixed films were commercially acceptable. The mixing feature of the atoms near the interface was studied by scanning electron microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy.

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플라즈마 전해 산화 표면처리 된 Al6061 소재의 광학적 특성연구 (A Study of Optical properties of Al6061 By plasma electrolytic oxidation surface treatment)

  • 유재인;윤주식;윤재곤;최순돈;유재용;장호경;김기홍
    • 한국레이저가공학회지
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    • 제17권2호
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    • pp.1-4
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    • 2014
  • With the PEO(Plasma electrolytic oxidation) surface treatment, the oxide film of aluminum alloy is growing in a short time. The reflectance measurement to find the oxygen atoms in the oxide could be investigated. In order to form a thicker oxide film, the PEO surface treatment should be uniformly controlled in processing time.

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Fabrication of Wafer-Scale Anodized Aluminum oxide(AAO)-Based capacitive biosensor

  • Kim, Bongjun;Oh, Jeseung;Yoo, Kyunghwa
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.372.2-372.2
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    • 2016
  • Various nanobiosensors have been developed and extensively investigated. For their practical applications, however, the reproducibility and uniformity should be good enough and the mass-production should be possible. To fabricate anodized aluminium oxide (AAO)-based nanobiosesnor on wafer scale, we have designed and constructed a wafer-scale anodizing system. $1{\mu}m$-thick-aluminum is deposited on 4 inch SiO2/Si substrate and then anodized, resulting in uniform nanopores with an average pore diameter of about 65 nm. Furthermore, most AAO sensors constructed on this wafer provide capacitance values of 30 nF ~ 60 nF in PBS, demonstrating their uniformity.

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알루미늄 양극산화 공정에서의 나노다공성 파이프 구조 형성에 대한 표면 전기장 효과 (Electric surface field effect on the formation of nanoporous pipe structure in Al anodization process)

  • 이정택;최재호;김근주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.427-428
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    • 2009
  • The authors investigated anomalous nanoporous structures of aluminum oxides during the Al anodization process. We implemented two-steps anodizing process for the electrolyte of oxalic acid. As increasing DC voltages, lattice constants are proportionally increased. For the curved surface, the surface electric field was distorted so that the nanoporous pipe channel changed to a cone-type shape. We confirmed the periodicity by using the FFT(Fast Fourier Transform) analysis.

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ALLOY STRUCTURE AND ANODIC FILM GROWTH ON RAPIDLY SOLIDIFIED AL-SI-BASED ALLOYS

  • Kim, H.S.;Thompson, G.E.;Wood, G.C.;Wright, I.G.;Maringer, R.E.
    • 한국표면공학회지
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    • 제17권2호
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    • pp.29-40
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    • 1984
  • The structure of rapidly solidified Al-Si-based alloys and its relationship to subsequent anodic film growth in near neutral and acid solutions have been investigated. Solidification of the alloys proceeds via pre-dendritic nuclei, associated with rugosity of the casting surface, from which cellular-type growth, comprised of aluminium-rich material surrounded by silicon-containing material, emanates. Observation of ultramicrotomed sections of the alloys and their anodic films reveals the local oxidation of the silicon-rich phase and its incorporation into the anodic alumina film, formed in near neutral solutions. Such incorporation occurs but resultant isolation of the silicon-rich phase is not possible for anodizing in phosphoric acid, and a three-dimensional network of the oxidized silicon-containing phase, with continuing development of porous anodic alumina, is observed.

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양극산화된 알루미늄의 적외선 복사특성 연구 (A Study on the Infrared Radiation Properties of Anodized Aluminum)

  • 강병철;최정진;김기호
    • 한국표면공학회지
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    • 제35권3호
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    • pp.149-157
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    • 2002
  • Spectral emissivity depends on the surface conditions of the materials. The mechanisms that affect the spectral emissivity in anodic oxide films on aluminum were investigated. The aluminum specimens were anodized in a sulfuric acid solution and the thickness of the resulting oxide film formed changed with the anodizing time. FT-IR spectrum analysis identified the anodic oxide film as boehmite ($Al_2$$O_3$.$H_2$O). Both the infrared emisivity and reflectivity of the anodized aluminum were affected by the structure of the anodic oxide film because Al-OH and Al-O-Al have a pronounced absorption band in the infrared region of the spectrum. The presence of an anodic oxide film on aluminum caused a rapid drop in the infrared reflectivity. An aluminum surface in the clean state had an emissivity of approximately 0.2. However, the infrared emissivity rapidly increased to 0.91 as the thickness of the anodic oxide film increased.

선외기 구동을 위한 BLDC 전기모터 개발 (Develop of BLDC Electric Motor for Outboard Motor Drive)

  • 신철기;김진사
    • 한국전기전자재료학회논문지
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    • 제26권10호
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    • pp.766-770
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    • 2013
  • This paper tried to develop a BLDC electric motor securing the 800 W-level watertight structure for driving the outboard motor. For this purpose, this paper developed a high-efficient controller-integrating BLDC electric motor system for underwater propulsion and designed and developed a triple watertight structure. Besides, this study developed a outboard motor integrating motor, propeller and controller based on the production of a controller for BLDC motor which can the speed control by selecting low-voltage, high-current power element. The characteristics of developed outboard motor were 24 V input voltage, over 800 W motor output, and max. 3,000 rpm motor, and 84.9% motor efficiency, and the developed outboard motor could secure the watertight structure in 5 m in water depth.

다공성 알루미나 박막의 나노 스케일 구조 제어 (Anodic Oxide Membrane Formation of Hexagonal Pore Arrarys on Aluminium)

  • 정경한;신훈규;권영수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.830-833
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    • 2002
  • 최근 나노 구조 (nano structure)를 만들기 위한 시도 중 하나로서 스스로 조직화(self organization)하여 나노 구조를 형성하는 물질을 나노 소자 제작을 위한 형틀 (template)로 이용하려는 시도가 활발히 진행되고 있다. 이러한 물질로서 주목을 받고있는 것 중 하나가 전해질 용액에서 알루미늄을 양극산화(anodization) 시켰을 때 형성되는 다공성 알루미나 박막이다. 본 연구에서는 고 순도 알루미늄을 기계적으로 연마(mechanical polishing)하고 공기 분위기에서 어닐링 (annealing)하여 알루미늄을 재결정화(recrystallization) 시키고 인가 전압이 40 V인 정 전압하에서 0.3 M의 수산(oxalic acid)을 전해질로 사용하면서 양극산화를 수행하여 평균 직경이 65 nm인 고도로 배열된 육방밀집구조의 나노 다공성 박막을 제작하였다. 또한 같은 방향의 육방밀집 배열은 크기가 수 ${\mu}m$인 영역(grain)을 형성하고 있었으며, 평균적인 pore의 밀도는 $1.1{\times}10^{10}/cm^2$였다.

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