• 제목/요약/키워드: annular chamber

검색결과 28건 처리시간 0.023초

환상형상 전극구조를 갖는 저압 RF plasma를 이용한 CF4 제거 (Abatement of CF4 Using RF Plasma with Annular Shape Electrodes Operating at Low Pressure)

  • 이재옥;허민;김관태;이대훈;송영훈;이상윤;노명근
    • 한국대기환경학회지
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    • 제26권6호
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    • pp.690-696
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    • 2010
  • Abatement of perfluorocompounds (PFCs) used in semiconductor and display industries has received an attention due to the increasingly stricter regulation on their emission. In order to meet this circumstance, we have developed a radio frequency (RF) driven plasma reactor with multiple annular shaped electrodes, characterized by an easy installment between a processing chamber and a vacuum pump. Abatement experiment has been performed with respect to $CF_4$, a representative PFCs widely used in the plasma etching process, by varying the power, $CF_4$ and $O_2$ flow rates, $CF_4$ concentration, and pressure. The influence of these variables on the $CF_4$ abatement was analyzed and discussed in terms of the destruction & removal efficiency (DRE), measured with a Fourier transform infrared (FTIR) spectrometer. The results revealed that DRE was enhanced with the increase in the discharge power and pressure, but dropped with the $CF_4$ flow rate and concentration. The addition of small quantity of $O_2$ lead to the improvement of DRE, which, however, leveled off and then decreased with $O_2$ flow rate.

캐비테이션 방지를 위한 MR 댐퍼형 착륙장치의 내부 형상 배치에 대한 연구 (Internal Components Arrangement of MR Damper Landing Gear for Cavitation Prevention)

  • 조방현;장대성;황재혁
    • 항공우주시스템공학회지
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    • 제14권5호
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    • pp.33-41
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    • 2020
  • 항공기의 착륙장치는 지상에서 동체로 전달되는 충격에너지를 흡수 및 소산시키는 장치이다. 착륙장치 중 반능동형 MR 댐퍼 착륙장치는 다양한 착륙조건에서 높은 충격흡수효율을 보여주며 제어 불능 시 안정성을 확보할 수 있는 장점이 있다. 오리피스가 아닌 환형 관유로를 이용하는 MR 댐퍼 착륙장치의 경우, 유로 압력강하로 인해 발생하는 감쇠력이 MR 댐퍼 내부 형상 구조에 따라 저압 챔버에서 캐비테이션을 유발할 수 있어 기존의 2 자유도계 모델링 기법보다 다중물리시스템 해석 프로그램인 Amesim이 더 유용하다. Amesim을 이용한 해석결과를 바탕으로 착륙장치 내부 유로 형상 배치를 수정하여 캐비테이션을 방지할 수 있는 유로 구조를 제안하였고 낙하 시험 시뮬레이션 결과를 통해 이를 검증하였다. 본 논문에서는 환형 관로 형태 유로 구조를 갖는 MR 댐퍼형 착륙장치의 캐비테이션 발생시 주요 특성을 파악하였고, 아울러 내부형상 배치 수정을 통해 이를 방지하는 방안을 제시하였다.

A Study on Production of Nitrogen Oxides in Plasma Reactors

  • Lim, Gye-Gyu
    • Journal of Korean Society for Atmospheric Environment
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    • 제17권E3호
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    • pp.91-99
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    • 2001
  • Plasma reactor was used to generate a high potential difference between two surfaces of concentric pyrex tubes by electrical current. The annular gap of the reactor was calculated by trial and error from the breakdown voltage equation and set at 0.45 cm. The overall objective of this research was to know the effects of the frequency, humidity, and residence time on the formation of nitrogen oxides in a plasma reactor. The primary voltage varied from 50 to 90 volts and the frequency was varied in increments of 10 Hz from 60 to 650 Hz at the primary voltage of 90. The increase in the secondary voltage was not linear but exponential at high frequencies. At a maximum concentration of about 745 ppm, the frequency and secondary voltage was 600 Hz and 4,200 volts, respectively. All tests for the effects of humidity on NO$_{x}$ production were performed at the optimal setting of 90 colts and 600 Hz frequency. Since the NO$_{x}$ production was not an one dimensional phenomenon, competing reactions were assumed to occur in the discharge chamber. The sharp peak concentration of 1,810 ppm was observed at 38% of relative humidity, The enhanced production was choked off, and the production rate rapidly dropped to 3 ppm at above 40% of relative humidity. It is assumed that the corona attacks the most vulnerable molecules in the reaction chamber before attacking other more lightly bonded molecules, possibly at humidities above 38% and the optimized 90 volt setting. Thus, there was not enough energy left after attacking all water molecules to decompose an appreciable amount of $N_2$. If nitrogen breakdown does not occur, then oxides of nitrogen are not likely to be produced.ced.

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MR 댐퍼의 최적설계 : 이론적 방법 및 유한요소 방법 (Optimal Design of MR Damper : Analytical Method and Finite Element Method)

  • 하성훈;성민상;구오흥;최승복
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2009년도 춘계학술대회 논문집
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    • pp.581-586
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    • 2009
  • This paper presents an optimal design of magnetorheological(MR) damper based on analytical methodology and finite element analysis. The proposed MR damper consists of MR valve and gas chamber. The MR valve is constrained in a specific volume and the optimization problem identifies geometric dimensions of the valve structure that maximize the pressure drop of the MR valve or damping force of the MR damper. In this work, the single-coil annular MR valve structure is considered. After describing the schematic configuration and operating principle of MR valve and damper, a quasi-static model is derived based on Bingham model of MR fluid. The magnetic circuit of the valve and damper is then analyzed by applying the Kirchoff’s law and magnetic flux conservation rule. Based on the quasi-static modeling and the magnetic circuit analysis, the optimization problem of the MR valve and damper is built. The optimal solution of the optimization problem of the MR valve structure constrained in a specific volume is then obtained and compared with the solution obtained from finite element method.

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MR 댐퍼의 최적설계 : 이론적 방법 및 유한요소 방법 (Optimal Design of MR Damper : Analytical Method and Finite Element Method)

  • 하성훈;성민상;구오흥;최승복
    • 한국소음진동공학회논문집
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    • 제19권11호
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    • pp.1110-1118
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    • 2009
  • This paper presents an optimal design of magnetorheological(MR) damper based on analytical methodology and finite element analysis. The proposed MR damper consists of MR valve and gas chamber. The MR valve is constrained in a specific volume and the optimization problem identifies geometric dimensions of the valve structure that maximize the pressure drop of the MR valve or damping force of the MR damper. In this work, the single-coil annular MR valve structure is considered. After describing the schematic configuration and operating principle of MR valve and damper, a quasi-static model is derived based on Bingham model of MR fluid. The magnetic circuit of the valve and damper is then analyzed by applying the Kirchoff' s law and magnetic flux conservation rule. Based on the quasi-static modeling and the magnetic circuit analysis, the optimization problem of the MR valve and damper is built. The optimal solution of the optimization problem of the MR valve structure constrained in a specific volume is then obtained and compared with the solution obtained from finite element method.

접선형 산화제 주입기의 운동량비에 따른 End-Burning 하이브리드 연소기의 연소유동장 해석 (Reactive Fields Analysis of End-Burning Hybrid Combustor Using Tangential Oxidizer Injectors with Various Momentum Ratio)

  • 민문기;김수종;김진곤;문희장
    • 한국추진공학회지
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    • 제11권2호
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    • pp.37-46
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    • 2007
  • 본 연구에서는 접선형 산화제 주입기를 갖는 end-burning 하이브리드 연소기에서 산화제 운동량비에 따른 연소 유동장을 해석하였다. 산화제의 운동량비가 감소할수록 연소효율은 연소기 전 영역에 걸쳐 증대되는 경향이 포착되었으며 이론 혼합분율과 온도장을 통해 연소실 전 영역에서 최적의 연소가 저 운동량비에서 발생됨을 확인하였다. 강한 선회류가 연소실 내부 유동장을 지배하지만 압력장은 비교적 균일한 분포를 보였다. 접선형 산화제 주입기를 가진 연소기는 운동량비에 관계없이 공통적으로 연료와 산화제가 만나는 연소실 상부에서 환형의 고온부가 발생했으며 향후 주요 개선 사항으로 판단되었다.

자외선램프을 이용한 유수처리장치 설계 시뮬레이션 (Simulation Method for the Flowing Water Purification with UV Lamp)

  • 정병호;이강연
    • 조명전기설비학회논문지
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    • 제23권9호
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    • pp.17-23
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    • 2009
  • 자외선 살균기술을 바탕으로 한 수처리 분야에 대한 관심이 최근 증가하고 있다. 수처리분야에서 살균처리방식의 효율은 유체 살균챔버나 살균강도 그리고 미생물의 불활성역학에 따라 수처리 성능이 결정된다. 광산화법에 이용되는 빛은 주로 자외선이 이용되며 매우 깨끗하고 높은 에너지를 가지고 있어 화학살균방법에 비해 잔류물이 없고 높은 안정성으로 최근 관심이 높아지고 있다. 그러나 자외선살균방식은 조사시간과 조사량에 직접적인 영향을 받아 이를 위한 최적의 설계가 이루어져야 한다. 본 연구에서는 유수살균장치의 챔버 내의 자외선 램프와 유수에 대한 3D-CFD discrete ordinates model 모델을 제시하고 이를 시뮬레이션을 통해 설계방식의 최적화 여부를 검증하고 향후 유수형 자외선살균방식의 시뮬레이션방법을 제안하고자 한다.

우심실유출로협착에 대한 심낭 Patch Graft 에 관한 임상적 연구 (A study on Hemodynamic Effect of Pericardial Patch Graft for Stenosis of Right Ventricle Outflow Tract)

  • 박정수;지행옥;김근호
    • Journal of Chest Surgery
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    • 제15권1호
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    • pp.61-66
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    • 1982
  • The present study was performed to evaluate hemodynamic effects on the pericardial patch graft for stenosis of right ventricle outflow tract in 19 patients of tetralogy of Fallot. The stenosis of right ventricle outflow tract was associated with or without pulmonary annular nar-rowing, pulmonary valvular stenosis, and hypoplastic narrowing of pulmonary artery. Total correction of tetralogy of Fallot was performed under cardiopulmonary bypass with moderate hypothermia and cardioplegic cardiac arrest. Ventricular septal defects were closed with Teflon patch graft. The chamber pressures in the heart were measured before and after a total correction of tetralogy of Fallot. The data of pressure measurement and the results of postoperative observation of pericardial patch were as followings: 1. Systolic and diastolic pressure of right ventricle was decreased after operation from $96.0{\pm}14.7/10.0{\pm}14.4mmHg$ to $61.0{\pm}13.1/8.0{\pm}9.3mmHg$. 2. Systolic and diastolic pressure of pulmonary artery was increased after operation from $18.0{\pm}5.6/10.0{\pm}5.5mmHg$ to $31.0{\pm}10.7/14.0{\pm}4.9mmHg$. 3. Preoperative pressure gradient between right ventricle and pulmonary artery was decreased immediately after operation from 78.0mmHg to 30.0mmHg. 4. It was observed that excellent widening effects of right ventricle outflow tract was resulted from pericardial patch graft. 5. No postoperative bleeding from pericardial patch graft was observed. 6. Aneurysm formation of pericardial patch was not be observed during 1 to 6 years postoperative periods.

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