• 한국전기전자재료학회논문지
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• 제11권12호
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• pp.1115-1121
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• 1998

MLS capacitor with lipid ultra thin films were deposited by Langmuir-Blodgett (LB) method on the silicon wafer. The current versus voltage and capacitance versus voltage relationships are depend on the applied voltage, electrode area and electrode materials. LB films deposited were made of L-$\alhpa$-DLPC, the 1 layer’s thickness of 35${\AA}$ was measured by ellipsometer. And MLS capacitor with different electrode materials, the work function of these materials was investigated to increase the leakage current. The result indicated the lower leakage current and very high saturation value of capacitance was reached within 700-800 pF when the two electrode was Ag. And $\varepsilon$1, $\varepsilon$2 versus photon energy showed good film formation.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.1085-1088
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• 2003

In this work, we fabricated a gas-sensing device based on porous silicon(PS), and its I-V and C-V properties were investigated for sensing alcohol vapor. The structure of the sensor consists of thin Au/Oxidized porous silicon/porous silicon/Silicon/Al, where the silicon substrate is etched anisotropically to be prepared into a membrane shape. As the result, I-V curves showed typical tunneling property, and C-V curves were shaped like those of a MIS (metal-insulator- semiconductor) capacitor, where the capacitance in accumulation was increased with alcohol vapor concentration.

• 한국전기전자재료학회논문지
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• 제26권10호
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• pp.741-744
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• 2013

In this study, we fabricated anodic aluminum oxide (AAO) membrane by two step anodizing process for pH detection. The structural properties were observed by X-ray diffraction (XRD) and field emission scanning electron microscope (FE-SEM). Electrochemical measurements of the pH sensor have been performed in capacitance-voltage (C-V) and drift rates. The characterization of AAO membrane exhibited high sensitivity (99.1 mV/pH) at second anodizing time of 4 min.

• 센서학회지
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• 제25권1호
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• pp.1-7
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• 2016

Bioelectrical impedance (BI) at popliteal regions was measured using a bioelectrical impedance measurement system (BIMS), which employs the multi-frequency and the two-electrode method. Experiments were performed as follows. First, a constant AC current of $800{\mu}A$ was applied to the popliteal regions (left and right) and the BI was measured at eight different frequencies from 10 to 500 kHz. When the applied frequency greater than 50 kHz was applied to human's popliteal regions, the BI was decreased significantly. Logarithmic plot of impedance vs. frequency indicated two different mechanisms in the impedance phenomena before and after 50 kHz. Second, the relationship between resistance and reactance was obtained with respect to the applied frequency using BI (resistance and reactance) acquired from the popliteal regions. The phase angle (PA) was found to be strongly dependent on frequency. At 50 kHz, the PA at the right popliteal region was $7.8^{\circ}$ slightly larger than $7.6^{\circ}$ at the left popliteal region. Third, BI values of extracellular fluid (ECF) and intracellular fluid (ICF) were calculated using BIMS. At 10 kHz, the BI values of ECF at the left and right popliteal regions were $1664.14{\Omega}$ and $1614.08{\Omega}$, respectively. The BI values of ECF and ICF decreased sharply in the frequency range of 10 to 50 kHz, and gradually decreased up to 500 kHz. Logarithmic plot of BI vs. frequency shows that the BI of ICF decreased noticeably at high frequency above 300 kHz because of a large decrease in the capacitance of the cell membrane.

• 실천공학교육논문지
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• 제6권2호
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• pp.105-110
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• 2014

본 연구에서는 강한 내구성을 지닌 자동차 타이어용 압력센서를 개발하기 위해 박막 물질로서 적용될 티타늄 멤브레인의 기계적 특성이 연구되었다. 제작공정으로 기존의 마이크로 머시닝공정과 적층 공정기술이 동시에 적용되었으며, 티타늄 멤브레인 기반의 압력 센서가 설계, 제조 및 특성화 되었다. 마이크로 머시닝 공정을 통한 티타늄 멤브레인과 기판의 접합 제조과정은 30분 동안의 20 MPa의 압력과 $200^{\circ}C$의 온도과정 후 $24^{\circ}C$에서의 냉각으로 진행된다. 각각의 압력센서 표면은 니켈 도금된 후방전극이 기판 위에 마이크로 소자로 조립되었다. 제작과정에서 발생한 잔류응력을 예측하기 위해 유한요소 해석이 적용되었다. 또한 티타늄 멤브레인의 외부 압력하에서 변형에 의한 처짐이 계산되었다. 제작된 장치의 민감도는 $10.15ppm\;kPa^{-1}$ 였고 이때의 정전용량 변화량은 0.18 pF, 압력 범위는 0-210 kPa 였다.

• 멤브레인
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• 제29권6호
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• pp.323-328
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• 2019

인류의 에너지 수급은 항상 인간의 삶에 중요한 문제이며, 최근에는 전기 생산 및 공급 문제로 이어지고 있다. 이에 관련하여 본 연구에서는 에너지 저장장치의 일환으로 슈퍼커패시터 용도의 고체 전해질막을 제조하였다. 제조한 전해질막은 poly(vinyl alcohol) (PVA) 주사슬에 poly(oxyethylene methacrylate) (POEM) 곁사슬을 그래프팅하여 사용하였으며, 그래프팅은 자유 라디칼 중합법을 통해 합성하였다. 본 연구에서 사용한 PVA-g-POEM 가지형 공중합체를 슈퍼커패시터 전해질에 적용한 사례는 처음이다. POEM 그래프팅을 통해 PVA가 고유하게 가지고 있던 구조가 변화하였으며, 이를 FT-IR을 통해 분석하였다. 또한, 합성한 공중합체를 이용한 슈퍼커패시터 성능은 cyclic voltammetry (CV), galvanostatic charge/discharge(GCD), ragone plot 등을 통해 분석하였다. 이를 통해 기존에 수계 전해질로 PVA 단일 고분자만 사용하던 분야에 그래프팅 방법이라는 새로운 접근법을 제시하였다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권1호
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• pp.15-21
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• 2013

In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallel-plate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional two-parallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.

• 멤브레인
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• 제33권4호
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• pp.211-221
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• 2023

본 연구는 에너지 저장 응용을 위한 PVI-PGMA/LiTFSI 고분자 막 전해질 및 CxNy-C 유연 전극의 합성 및 특성에 관한 연구이다. 이중 기능을 갖는 PVI-PGMA 공중합체는 우수한 이온 전도성을 나타내었으며, PVI-GMA73/LiTFSI200 막 전해질은 1.0 × 10^-3 S cm^-1의 최고 전도도를 달성하였다. CxNy-C 전극의 전기화학적 성능을 체계적으로 분석하였으며, C3N2-C는 나노와이어와 다면체로 구성된 높은 연결성을 갖는 하이브리드 구조와 이중 Co/Ni 산화물을 포함하여 풍부한 산화환원 활성 부위와 이온 확산을 용이하게 하는 특징으로 인해 958 F g^-1의 최고용량 및 최소한의 전하 전달 저항(R_ct)을 달성하였다. 흑연 탄소 껍질의 존재는 충전-방전 동안 높은 전기화학적 안정성에 기여하였다. 이러한 결과들은 고성능 에너지 저장 장치인 슈퍼커패시터 및 리튬 이온 전지와 같은 첨단 에너지 저장 장비에 PVI-PGMA/LiTFSI 고분자 막 전해질과 CxNy-C 전극을 활용하는 잠재력을 보여주었으며, 지속 가능하고 고성능의 에너지 저장 기술을 더욱 발전시키는 길을 열어가고 있다.

• Journal of Electrical Engineering and Technology
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• 제10권6호
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• pp.2364-2367
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• 2015

In this study, we fabricated an electrolyte-insulator-metal (EIM) device incorporating a high-k Al₂O₃ sensing membrane using a porous anodic aluminum oxide (AAO) through a two-step anodizing process for pH detection. The structural properties were observed by field-emission scanning electron microscopy (FE-SEM) and X-ray diffraction patterns (XRD). Electrochemical measurements taken consisted of capacitance-voltage (C-V), hysteresis voltage and drift rates. The average pore diameter and depth of the AAO membrane with a pore-widening time of 20 min were 123nm and 273.5nm, respectively. At a pore-widening time of 20 min, the EIM device using anodic aluminum oxide exhibited a high sensitivity (56mV/pH), hysteresis voltage (6.2mV) and drift rate (0.25mV/pH).

• 센서학회지
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• 제27권2호
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• pp.69-75
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• 2018

In this study, we propose a multichannel interdigitated capacitor (IDC) sensor for detecting the bitterness of coffee. The operating principle of the device is based on the variation in capacitance of a sensing membrane in contact with a bitter solution. Four solvatochromic dyes, namely, Nile red, Reichardt's dye, auramine-O, and rhodamine-B, were mixed with polyvinylchloride (PVC) and N,N-dimethylacetamide (DMAC), to create four different types of bitter-sensitive solutions. These solutions were then individually inserted into four interdigitated electrodes (IDEs) using a spin coater, to prepare four distinct IDC sensors. The sensors are capable of detecting bitterness-inducing chemical compounds in any solution, at concentrations of approximately $1{\mu}M$ to 1 M. The sensitivity of the IDC bitterness sensor containing the Reichardt's dye sensing-membrane was approximately 1.58 nF/decade. The multichannel sensor has a response time of approximately 6 s, and an approximate recovery time of 5 s. The proposed sensor offers a stable sensing response and linear sensing performance over a wide measurement range, with a correlation coefficient ($R^2$) of approximately 0.972.