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Copper Interconnection and Flip Chip Packaging Laboratory Activity for Microelectronics Manufacturing Engineers

  • Moon, Dae-Ho;Ha, Tae-Min;Kim, Boom-Soo;Han, Seung-Soo;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.431-432
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    • 2012
  • In the era of 20 nm scaled semiconductor volume manufacturing, Microelectronics Manufacturing Engineering Education is presented in this paper. The purpose of microelectronic engineering education is to educate engineers to work in the semiconductor industry; it is therefore should be considered even before than technology development. Three Microelectronics Manufacturing Engineering related courses are introduced, and how undergraduate students acquired hands-on experience on Microelectronics fabrication and manufacturing. Conventionally employed wire bonding was recognized as not only an additional parasitic source in high-frequency mobile applications due to the increased inductance caused from the wiring loop, but also a huddle for minimizing IC packaging footprint. To alleviate the concerns, chip bumping technologies such as flip chip bumping and pillar bumping have been suggested as promising chip assembly methods to provide high-density interconnects and lower signal propagation delay [1,2]. Aluminum as metal interconnecting material over the decades in integrated circuits (ICs) manufacturing has been rapidly replaced with copper in majority IC products. A single copper metal layer with various test patterns of lines and vias and $400{\mu}m$ by $400{\mu}m$ interconnected pads are formed. Mask M1 allows metal interconnection patterns on 4" wafers with AZ1512 positive tone photoresist, and Cu/TiN/Ti layers are wet etched in two steps. We employed WPR, a thick patternable negative photoresist, manufactured by JSR Corp., which is specifically developed as dielectric material for multi- chip packaging (MCP) and package-on-package (PoP). Spin-coating at 1,000 rpm, i-line UV exposure, and 1 hour curing at $110^{\circ}C$ allows about $25{\mu}m$ thick passivation layer before performing wafer level soldering. Conventional Si3N4 passivation between Cu and WPR layer using plasma CVD can be an optional. To practice the board level flip chip assembly, individual students draw their own fan-outs of 40 rectangle pads using Eagle CAD, a free PCB artwork EDA. Individuals then transfer the test circuitry on a blank CCFL board followed by Cu etching and solder mask processes. Negative dry film resist (DFR), Accimage$^{(R)}$, manufactured by Kolon Industries, Inc., was used for solder resist for ball grid array (BGA). We demonstrated how Microelectronics Manufacturing Engineering education has been performed by presenting brief intermediate by-product from undergraduate and graduate students. Microelectronics Manufacturing Engineering, once again, is to educating engineers to actively work in the area of semiconductor manufacturing. Through one semester senior level hands-on laboratory course, participating students will have clearer understanding on microelectronics manufacturing and realized the importance of manufacturing yield in practice.

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A report on 57 unrecorded bacterial species in Korea in the classes Betaproteobacteria and Gammaproteobacteria

  • Kim, Hyun Sik;Cha, Chang-Jun;Cho, Jang-Cheon;Im, Wan-Taek;Jahng, Kwang Yeop;Jeon, Che Ok;Joh, Kiseong;Kim, Seung Bum;Seong, Chi Nam;Kim, Wonyong;Yi, Hana;Lee, Soon Dong;Yoon, Jung-Hoon;Bae, Jin-Woo
    • Journal of Species Research
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    • v.6 no.2
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    • pp.101-118
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    • 2017
  • In an investigation of indigenous prokaryotic species in Korea, a total of 57 bacterial strains assigned to the classes Betaproteobacteria and Gammaproteobacteria were isolated from diverse environments. Samples were collected from fresh water, natural caves, soil, paddy fields, lakes, sea water, jeotgal (fermented seafood), salt flats, soil from abandoned mines, plant roots, digestive organs of both Japanese crested ibis (Nipponia nippon) and Burmese python (Python molurus bivittatus) and tidal flats. From the high 16S rRNA gene sequence similarity (>98.7%) and formation of robust phylogenetic clades with closely related species, it was determined that each strain belonged to an independent and predefined bacterial species within either the Betaproteobacteria or Gammaproteobacteria. There is no official report or publication that describes these 57 proteobacterial species in Korea. Overall, in the class Betaproteobacteria there were 16 species in 12 genera of 4 families in the order Burkholderiales and two species in two genera of one family in the order Neisseriales. Within the class Gammaproteobacteia, there were five species in four genera of four families in the order Alteromonadales, 12 species in 11 genera of one family in the order Enterobacteriales, four species in four genera of three families in the order Oceanospirillales, 11 species in four genera of two families in the order Pseudomonadales, two species in the order Vibrionales and five species in five genera of one family in the order Xanthomonadales. Gram reaction, colony and cell morphology, basic biochemical characteristics, isolation source and strain IDs are described in the species description section.

Preparation of Pt Catalysts for 2-propanol Dehydrogenation using Sol-gel Method (솔-젤법을 이용한 2-propanol 탈수소화 반응 Pt 촉매의 제조)

  • Lee, Yeong-Kweon;Lee, Hwaung;Song, Hyung Keun;Na, Byung-Ki
    • Korean Chemical Engineering Research
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    • v.45 no.4
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    • pp.328-334
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    • 2007
  • Chemical heat pump system of 2-propanol/acetone/hydrogen is most suitable to the recovery of waste heat of power plant. various types of 5 wt% Pt-alumina catalysts were prepared for 2-propanol dehydrogenation using sol-gel method. The characteristics and the dehydrogenation reaction rate of each catalyst were investigated. Pt-alumina xerogel catalyst has excellent reaction rate and good durability in comparison with the existing alumina supported Pt catalysts. Pt-alumina aerogel catalyst had the highest reaction rate in all prepared catalysts, but sufficient aging time was necessary to maintain its reaction rate. A potential advantage of the aerogel catalyst is the fact that the high temperature heat treatment is not required. Without heat treatment or with low temperature heat treatment, the Pt-alumina aerogel catalyst has excellent reaction rate as well as durability and this gives us the economic advantage. Alumina xerogel supported Pt catalyst prepared by incipient wetness method showed good reaction rate, and had good mechanical strength. Blank alumina xerogel prepared by sol-gel method can be used for the support of metal catalysts.

Comprehensive and synthetic inventory of Dokdo Island, Republic of Korea

  • Ui Wook Hwang;Hyun Soo Rho;Bia Park;Eun Hwa Choi;Cho Rong Shin;Sa Heung Kim;Jongrak Lee;Hack Cheul Kim;Mann Kyoon Shin;Taeseo Park;Jumin Jun;Heegab Lee;Jong Eun Lee;Yoon Sik Oh;Jung-Goo Myoung;Chang Geun Choi;Jin Hee Park;Seon-joo Park;Jimin Lee;Jaeho Lee;Hyeok Yeong Kwon;Kyu Tae Park;Chun Woo Lim;Seung Wook Jung;Mi Jin Lee;Yucheol Lee;Yeongheon Shin;Hee-Jung Choi;Young Wook Lee;Hyun Jong Kil;Jin-Han Kim;Myung-Suk Kang;Eun-Young Lee;Sang-Hwa Lee;Young Hyo Kim;Jongwoo Jung;Kuem Hee Jang;Young Jin Lim;Shi Hyun Ryu;Won-Gi Min;Joo Myun Park;Hyojin Lee;Minsu Woo;Yun-Bae Kim;Sehun Myoung
    • Journal of Species Research
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    • v.12 no.spc
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    • pp.1-69
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    • 2023
  • This study aims to establish a comprehensive, synthetic inventory system for the fauna and flora of Dokdo Island, Republic of Korea, which has been conducted by a specialized research group consisting of more than 50 experts. The research was conducted over five years(2015-2019) and supported by the National Institute of Biological Resources, Ministry of Environment, Republic of Korea. All possible publications on the fauna and flora of Dokdo Island over the last 68 years from 1952 to 2020 were reviewed. As a result, 1,302 species were found on Dokdo Island during the study period. An updated list of 1,963 species was created. This is expected to be of great help for the conservation and national publicity of important indigenous biological resources of Dokdo Island.