• 한국세라믹학회지
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• 제31권1호
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• pp.79-87
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• 1994

AIN은 불안정하여 물과 접촉하면 12시간 이내에 172cal/g의 열을 내면서 가수분해되어 알루미나 삼수화물이 생성되었다. AIN의 가수분해 과정은 초기에 비정질 알루미나 수화물이 생성되었으며, 가수분해 조건에 따라 비정질알루미나 수화물의 용해-재석출과정으로 알루미나 삼수화물 특히 bayerite가 생성되었고, 응축과정으로 pseudo-boe-hmite가 AIN 입자표면에 생성되었다. 가수분해 온도 4$0^{\circ}C$ 이하에서는 비정질 알루미나 수화물이, 4$0^{\circ}C$와 6$0^{\circ}C$ 사이에서는 bayerite가 각각 생성되었고, 6$0^{\circ}C$ 이상의 경우는 초기에 pseudo-boehmite의 입자표면에 형성되었다. bayerite는 가수분해 시간이 길수록, 그리고 용액내 pH가 높을수록 잘 생성되었으나 pseudo-boehmite는 가수분해 반응이 급격히 일어날 때와 용액내 ethyl alcohol의 존재로 OH 기의 흡착을 방해하여 가수분해 반응이 억제될 때 잘 생성되었다. 그리고 pH=2.0인 용액에서는 AIN의 가수분해가 거의 일어나지 않았다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.136-139
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• 2003

Copper has attractive properties as a multi-level interconnection material due to lower resistivity and higher electromigration resistance as compared with Alumina and its alloy with Copper(0.5%). Among a variety of agents in Copper CMP slurry, $H_2O_2$ has commonly been used as the oxidizer However. $H_2O_2$ is so unstable that it requires stabilization to use as oxidizer Hence, stabilization of $H_2O_2$ is a vital process to get better yield in practical CMP process. In this article the stability of Hydrogen Peroxide as oxidizer of Copper CMP slurry has been investigated. When alumina abrasive was used, $\gamma$-particle Alumina C had a better stability than $\alpha$-particle abrasive. As adding KOH as pH buffering agent, $H_2O_2$ stability in slurry decreased. Urea hydrogen peroxide was used as oxidizer, an enhanced stability was gotten. When $H_3PO_4$ as $H_2O_2$ stabilizer was added, the decrease of $H_2O_2$ concentration in slurry became slower. Even though adding $H_2O_2$ in slurry after bead milling lead to better stability than in advance of bead milling, it had a lower dispersibility.

• 한국공작기계학회논문집
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• 제12권5호
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• pp.59-66
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• 2003

This study suggests the new ultraprecision finishing techniques for micro die and mold parts using magnetic field-assisted polishing. Conventional magnetic abrasives have several disadvantages, which are missing of abrasive particle and inequal mixture between magnetic particle and abrasive particle. Therefore, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Carbonyl iron powder is used as magnetic particle there silicon carbide and alumina are abrasive particles. Developed magnetic abrasives are analyzed using SEM. Feasibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing, surface roughness of workpiece is reduced from 85.4 ㎚ Ra to 9 ㎚ RA.

• Korea-Australia Rheology Journal
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• 제20권2호
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• pp.65-71
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• 2008

Pressure filtration technique was used to obtain defect-free microstructure of green cast ceramic bodies. Stable alumina suspensions of desired rheology (<5 Pa s at $1\;s^{-1}$) containing 60-80 mass. % solid loading were prepared in the alkaline region (at $pH{\approx}9$) with an optimum amount of 0.5 dmb % of Tiron added. Acidic region (at $pH{\approx}4$) enabled the preparation of 60 mass. % suspensions with addition of 1.5 dmb % of Tiron. The best quality slip was processed from an 80 mass.% suspension with 63% of theoretical density. The homogeneity of particle packing and the absence of defects in microstructure were proven by narrow pore size distribution (ranging from 32 to 64 nm, with up to 85% abundance), confirming advantages of the wet consolidation route.

• 한국세라믹학회지
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• 제22권6호
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• pp.58-70
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• 1985

The bond strength of metal to ceramic sealing in Mo-Mn metallizing was investigated by examining the effects of flux composition in alumina ceramics particle size of molybdenum metal powder wet hydrogen atmosphere and temperature in metallizing. The maximum bond strength was obtained when the glass phase filled almost all the microstructural cavities around the interfacial area with few micropores. Such a favorable microstrcutre waas formed and maximum bond strength was observed between 130$0^{\circ}C$. Also the metal to ceramic bond strength was increased using finer molybdenum metal powder than coarse powder. When content of $SiO_2$ in the flux of alumina ceramics was constant metal to ceramic bond strength was improved with increasing the ratio of CaO to MgO in the flux.

• Nuclear Engineering and Technology
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• 제38권5호
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• pp.423-426
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• 2006

A developed neutron activation analysis(NAA) and gamma-spectrometry were applied to improve the analytical sensitivity and precision of impurities in electronic-circuit raw materials. It is well known that soft errors in high precision electronic circuits can be induced by alpha particles emitted from naturally occurring radioactive impurities such as U and Th. As electronic circuits have recently become smaller in dimension and higher in density, these alpha-particle emitting radioactive impurities must be strictly controlled. Therefore, new NAA methods have been established using a HTS(Hydraulic Transfer System) irradiation facility and a background reduction method. For eliminating or stabilizing fluctuated background caused by Rn-222 and its progeny nuclides in air, a nitrogen purging system is used. Using the developed NAA and gamma-spectrometry, ultra trace amounts of U(0.1ng/g) and Th(0.01ng/g) in an alumina ball and high purity silica used for an epoxy molding compound (EMC) could be determined.

• 한국세라믹학회지
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• 제36권6호
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• pp.625-631
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• 1999

Ceramic tapes were fabricated by ultrasonically spraying slurries of monodispersed spherical and alumina powders. Effects of slurry compositions on tape forming were investigated. A relatively fast rate of solvent evaporation caused pores and cracks to be formed. A good chemical affinity between solvent and binder gave rise to binder separation resulting in inhomogeneous distribution of binder. Defect-free silica tapes with uniform distribution of particle packing and the binder were obtained from the solvent having a low chemical affinity and a slow evaporation rate and containing appropriate amounts of the binder and the plasticizer. Tape thickness could be controlled by adjusting solids loadings and slurry feed rates. It was possible to fabricate a tape in 15 $\mu\textrm{m}$ thickness from 7 vol% alumina slurry.

• 한국결정성장학회지
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• 제6권3호
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• pp.415-423
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• 1996

황산니켈염 수용액에서 가압수소환원법을 이용하여 알루미나 분말상에 니켈 코팅층을 형성하기 위하여 실험조건(수소분압, 반응온도, $PdCl_{2}$ 첨가량, 알루미나의 종류 및 입도)을 변화시키면서 니켈이온의 환원속도 및 석출상태를 조사하였다. 환원온도 $165^{\circ}C$, 수소분압 300 psi, 코팅촉매제 $PdCl_{2}\;2\;mg/\ell$를 첨가한 조건에서 균질한 니켈코팅층을 얻을 수 있었다.

• 한국세라믹학회지
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• 제30권9호
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• pp.747-753
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• 1993

The investigation was carried out to study the behaviors of the pore size and porosity, the mechanical strength, the resistance to thermal spallings and slag attacks according to particle sizes of starting raw materials in porous high Alumina ceramics. This porous ceramics have been used in processing of the clean steel by the blowing of the inert gas. The required properties in the practice are the suitable pores size, the sharp pores distribution for a uniform blowing of the gas, the strong corrosion resistance to slags and molten metals and the resistance to thermal spalling. The optimized properties in porous high alumina ceramics of the specimen No. 3 was found to be the very low slag intrusion and the superior resistance to thermal spalling because of the suitable pore size of 2.5${\mu}{\textrm}{m}$, the porosity of 30% and the high sinterability.

• Tribology and Lubricants
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• 제10권3호
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• pp.39-46
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• 1994

In order to investigate the effect of the ceramic reinforcements on the wear properties of aluminum bronze composites, Cu-8wt%Al aluminum bronze alloys reinforced with the Saffil alumina short fiber were produced by the powder metallurgical method and tested by a pin-ondisc wear testing machine. The wear surfaces of the pin specimens and discs, wear debris, and the cross sections of the wear specimens were observed by SEM. The wear mechanism according to various wear conditions and the change of microstructure in the composites were also discussed. In the results, the reinforcement of the composites with alumina short fiber was very effective at the higher applied load over 10N. The material transportation to the counter disc was observed in the alloy specimens without reinforcements. However, the composites reinforced with ceramic particles and fibers showed the resistance against the material transportation.