• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 춘계학술대회논문집
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• pp.618-622
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• 2004

The vibration test system of SITC(Satellite Integration and Test Center) at KARI(Korea Aerospace Research Institute) has been used successfully for the environmental tests of a majority of korean space programs, such as KOMPSAT, Koreasat KITSAT, STSAT and KSR program since 1996. To meet the recent needs of large size test facility available for the vibrational tests of the huge launch vehicles and tole-communication satellites which will be developed in the near future, KARI undertook to construct the large size multi-electromagnetic shaking system with 3 $\times$ 3m head expander system. The new system will consist of three electromagnetic shakers which has 160 kN thrust force individually, and be able te sustain up to 8 tons test load and 300 kNm overturing moment. And to avoid the tremendous cost and effort to furnish the seismic block with large size and weight, it will adopt a Lin-E-Air type configuration with which the seismic block is less severe than a Solid-Truninon type. In addition, to fulfill the strong requirement of high overturning moment the additional guidance system including a central bearing system on a central support and several pad bearings around the head expander body is now considered. This paper describes the configuration and the design parameters of the multi-shaking system which is under development by KARI's engineers.

• 한국정밀공학회지
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• 제22권12호
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• pp.51-60
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• 2005

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.