• Title/Summary/Keyword: air bearing spindle

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Development and Evaluation of Ultra-precision Desktop NC Turning Machine (초정밀 데스크탑 마이크로 NC 선반 개발 및 성능평가)

  • Ro, Seung-Kook;Park, Jong-Kweon;Park, Hyun-Duk;Kim, Yang-Keun
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.22 no.4
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    • pp.747-754
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    • 2013
  • This study introduces a recently designed desktop-sized NC turning system and its components. This machine is designed for the ultra-precise turning of parts with a diameter of 0.5-20 mm with minimum space usage for the machine. This study aims to achieve submicron-level accuracy of movements and good rigidity of the machine for precision machining using the desktop-sized machine. The components such as the main machine structure, air bearing servo spindle, and XZ stage with needle roller guides are designed, and the designed machine is built with a PC-based CNC controller. Its static and dynamic stiffness performances and positioning resolutions are tested. Through machining tests with single-crystal diamond tools, a form error less than $0.8{\mu}m$ and surface roughness (Ra) of $0.03{\mu}m$ for workpieces are obtained.

A Study on the Rotating Ring Using Air Bearing in Yarn Manufacturing Process (방적공정에 있어서 공기 베어링을 이용한 회전링에 관한 연구)

  • Jang, Seung-Ho
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.19 no.5
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    • pp.622-630
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    • 2010
  • The increase of the spindle speed to enhance the productivity in ring spinning processes has been limited by yarn tension and heat generation of the traveller/ring. The main causes of yarn tension are 1) the force added directly to the yarn by the rotation of the spindle and 2) the centrifugal force exerted by the yarn balloon generated by traveller rotation. The dominant causes of heat generation are 1) the friction between the ring and traveller and 2) the friction between the traveller and yarn. These factors cause yarn end-breaks and heat damage. In the case of the staple yarn manufacturing process for PET (polyester) and nylon (a heat plasticity material), the rotational speed of the ring spinning system has deteriorated to 10,000rpm. The objective of this study was to develop a rotating ring which has dynamic stability, high productivity and a simple structure to overcome the limitations of the conventional fixed ring/traveller system. The results of this study revealed that the spinning tension could be reduced by 67.8% using the newly developed rotating ring.

An Experimental Study on the Dynamic Coefficients according to the Source Positions in Externally Pressurised Air-lubricated Journal Bearing with Two Row Sources (2열 외부가압 공기 저어널 베어링에서 급기구 위치에 따른 동적계수에 관한 실험적 연구)

  • 이종렬;이준석;이득우;김태형;박보선
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2001.10a
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    • pp.243-249
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    • 2001
  • This paper has been presented the hydrodynamic effect by the journal speed, eccentricity and source positions in order to overcome the defects of air bearing such as low stiffness and damping coefficient. Choosing the two row source position of air bearing is different from existed investigations in the side of pressure distribution of air film because of the high speed of journal and the wedge effects by the eccentricity. These optimal chooses of the two row source positions enable us to improve the performance of the film reaction force and loading force as making the high speed spindle. In this paper, the pressure behavior in theory of air film according to the eccentricity of journal and the source positions analyzed. The theoretical analysis have been identified by experiments. The results of investigated characteristics may be applied to precision devices like ultra-precision grinding machine and ultra high speed milling.

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Development of Wafer Grinding Spindle with Porous Air Bearings (다공질 공기 베어링을 적용한 반도체 웨이퍼 연마용 스핀들 개발)

  • Donghyun Lee;Byungock Kim;Byungchan Jeon;Gyunchul Hur;Kisoo Kim
    • Tribology and Lubricants
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    • v.39 no.1
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    • pp.28-34
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    • 2023
  • Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

Design of Micro-Machining System for Micro/Meso Mechanical Component (Micro/Meso부품 대응형 마이크로 기계가공시스템 기술 연구)

  • Park J.K.;Kyung J.H.;Ro S.K.;Kim B.S.;Park J.H.
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2005.05a
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    • pp.377-382
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    • 2005
  • This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as $\mu-Late$, $\mu-milling/drilling$ machine and $\mu-grinding$ machine are the basic elements constructing $\mu-factory$ which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.

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Development of the intelligent grinding system for wafer grinding (웨이퍼 연마용 지능형 연삭시스템 개발)

  • Kim, Dong-Seok;Choi, Chun-Kyu;Ha, Sang-Baek;Lee, Sang-Jik
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.1082-1086
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    • 2004
  • In silicon wafer manufacturing process, the grinding process has been adopted to improve the flatness of wafer. The grinding of wafer is usually used by the infeed grinding machine. The infeed grinding machine has been depended on imports. Therefore, it is necessary to develop the infeed grinding machine because the demand of the infeed grinding machine is increasing more and more. This paper describes the technologies of infeed grinding machine and intend to introduce the studies in the development of the intelligent grinding system for grinding of wafer. The air bearing spindle for the infeed grinding machine was developed by domestic technologies and the grinding part design of the intelligent grinding system for wafer grinding was completed.

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Heat Generation of Angular Contact Ball Bearings

  • Rhim, Yoon-Chul;Na, Hee-Hyeong
    • Tribology and Lubricants
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    • v.11 no.5
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    • pp.122-127
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    • 1995
  • The heat generations of angular contact ball bearings are studied experimentally with numerical simulations. The temperature variations of inner and outer races and the temperature increase distributions are measured by using thermocouples for the spindle rotational speeds, preloads, viscosity of oils, and lubrication methods. The measured values from experiments are used to estimate the heat generation rates. The heat generation is focused mainly on the dominant sources which are robbings due to spin and gyro-moments of bearing balls, applied load and viscous friction. Oil-jet and oil-air lubrication methods are adopted using oils with different viscosities.

Characteristics of Friction Torques and Lubrication in High Speed Angular Contact Ball Bearings (고속 앵귤러 콘택트 볼베어링의 마찰 토크 및 윤활 특성)

  • 반종억;김경웅
    • Tribology and Lubricants
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    • v.13 no.4
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    • pp.47-52
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    • 1997
  • Friction torques, electrical contact resistances and bearing temperatures were measured on high speed angular contact ball beatings for the spindle of machine tools. The test bearings ran with oil-air lubrication at the thrust loads from 320 N to 1920 N and at the rotational speed of up to 12000 rpm. Electrical contact resistances between balls and races were measured to evaluate the formation of the lubricant film in the contact area. The test results with sufficient lubrication showed that the variations of friction torques were sensitive to the thrust loads and the rotational speeds, and that the friction torques were higher than those with insufficient lubrication. With insufficient lubrication and high thrust loads, the collapse of the lubricant film was detected even at a high rotational speed. It was concluded that these high speed beatings to run in condition of fluid lubrication should require monitoring not only the temperature increase of the bearing but also the lubricant film formation in contact areas resulting from the change in the applied load and the lubricant amount.

Machining characteristics of STS 304 by micro-endmill (소경 엔드밀에 의한 STS 304의 가공특성)

  • Kim S.J.;Hahm S.D.;Kim H.C.;Kim K.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1261-1264
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    • 2005
  • Recently, as researches and developments for milli-structure and micro machine are actively progressing, manufacturing technologies and skills for tiny small machine parts are getting more important. So, we have been trying to cut using high revolution air bearing spindle and micro-endmill, and studying for magnitude of cutting force, cutting force wave form and surface roughness. We figured out that in 60,000rpm is so slow that cutting is not perfact. Chatter occured to $2\mu{m}/rev\;at\;80,000rpm\;and\;4.4\mu{m}/rev$ at 100,000rpm. We confirmed that spindle run out increased surface roughness at high revolution.

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