• Korean Journal of Optics and Photonics
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• v.16 no.4
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• pp.304-312
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• 2005

Field performance of several different types of diffractive optical elements(DOEs) has been carried out. Using Zemax model, we have designed five different types of DOEs, such as transmissive flat-DOE, transmissive curved-DOE, reflective flat-DOE, reflective curved-DOE and parabolic mirror, We have applied two different wavelengths, i.e., 13 m(EUV) and 632.8 nm(visible) to above DOEs. Off_axis dominate aberrations and the diffraction limiting (Rayleigh limit) field angles have been investigated and compared at both wavelengths for each DOE. At diffraction limit, field angle of curved-DOEs was much greater than that of flat-DOEs for both transmission and reflective types. We also showed that dominated off_axis aberration of flat-DOEs was coma, but that of curved-DOEs was mixture of astigmatism and curvature of field. The measured field angle and expected OPD aberrations were well coincided with theoretical ones. Increasing the ratio of field angle with wavelength was more effective in curved-DOEs than flat-DOEs.

• Korean Journal of Optics and Photonics
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• v.19 no.5
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• pp.349-359
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• 2008

For an inner-focusing 3-groups zoom lens system, this study suggests a new initial design method which applies the process that changes thin lenses into thick ones effectively and quickly, using the hybrid lens system(thin lens+thick lens). In other words, the hybrid lens system is the semi-automatic design process that makes the thin lens of one group change into a thick one while the other groups are composed of thin lenses. Keeping the total power of the system fixed, the power of each group and the distance between principal planes can be fixed. Of course, the other groups composed of thin lenses could be changed into thick lenses sequentially by this process. This design conception results in the 1/4" 5 M inner-focusing 3-groups 2x zoom lens system satisfying the specifications and performances of zoom lens for phone cameras. Also aspherization on lens elements of glass and plastic material enhanced the resolution and reduced the lens size. As a result, we have an ultra-compact inner-focusing 3-groups 2x zoom lens system for a phone camera, with a slim size with TTL of 9.8 mm.

• Korean Journal of Optics and Photonics
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• v.34 no.2
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• pp.53-60
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• 2023

We designed a catadioptric objective lens with a 0.6 numerical aperture (NA) for semiconductor inspection at 193 nm. The objective lens meets major requirements such as a spatial resolution of 200 nm and a field of view (FOV) of 0.15 mm or more. We selected a wavelength of 266 nm for autofocus based on the availability of the light source. First, we built the objective lenses of three lens groups: a focusing lens group, a field-lens group, and an NA conversion group. In particular, the NA conversion group is a group of catadioptric lenses that convert the numerical aperture of the beam focused by the prior groups to the required value, i.e., 0.6. The last design comprises 11 optical elements with root-mean-squared (RMS) wavefront aberrations less than λ/80 over the entire field of view. We also achieved the athermalization of the objective lens with focus-shift alone satisfying the performance of RMS wavefront aberration below λ/30 at a temperature range of 20 ± 1.2 ℃.