• 제목/요약/키워드: advanced indentation technique

검색결과 21건 처리시간 0.022초

나노 공정 개발을 위한 기계적 물성 측정 기법 (Measurement Techniques of Mechanical Properties for Development of Nano Fabrication Process)

  • 이학주;최병익;김완두;오충석;한승우;허신;김재현;고순규;안현균
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.1104-1110
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    • 2003
  • There are many applications of nanostructures, have been suggested by lots of researchers. It is highly required to measure the properties of nano-sized materials for design and fabrication of the nanostructures. In this paper, several techniques for measuring the mechanical properties of nano-structures are presented laying emphasis on the activity of Nano Property Measurement Team in KIMM. Some advanced applications of nano-indenter are described for measuring elastic, visco-elastic, frictional and adhesive properties as well as the standard methods of it. Micro-tensile test technique with accurate in-plane strain measurement method is also presented and its role in the property measurement of nanostructures is discussed.

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