• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.132-138
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• 2007

최근 반도체 및 디스플레이 산업 등에서 초정밀 가공, 측정 등이 필요함에 따라, 외란과 내부 진동을 차단하는 방진 시스템에 대한 연구가 활성화 되고 있다. 기존에 소개된 여러 방진 시스템 중에서 가장 많이 연구되는 공기스프링은 압축 공기를 이용하여 큰 하중을 지지할 수 있으면서 상대적으로 낮은 강성으로 낮은 고유진동수를 유지할 수 있다. 본 연구는 기존의 레벨링밸브를 이용한 수동 방진 시스템을 분석하여 이를 개선하고 디스플레이장비용 능동 방진 시스템을 설계하였다. 공기의 비선형 특성에 기인하는 복잡한 비선형 시스템 제어에 PID 제어기 보다 유리한 퍼지 제어기를 설계하였고, 실험과 해석을 비교하였다.

• Journal of Power System Engineering
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• v.5 no.2
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• pp.87-92
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• 2001

Automotive suspension system is a mechanism for isolation of the vibration coming from the road inputs. Recently, the electronically controlled suspension systems which may improve ride and handling performance have been developed. Here, the continuously controlled semi-active suspension system is focused. As a mechanism to control damping forces continuously, a solenoid valve is used. The modeling for the solenoid valve is introduced briefly, a vehicle dynamics modeling is constructed, and then combined system model is completed. To design the efficient control algorithm for the semiactive suspension system the knowledge based fuzzy logic is applied and the technique how to apply the sky-hook theory to the fuzzy logic is developed. Finally, to confirm the improvement of performance the computer simulation is carried out.

• Korean Journal of Optics and Photonics
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• v.21 no.3
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• pp.123-128
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• 2010

Sum frequency generation was utilized to obtain a yellow laser with the wavelength of 578.4 nm for a probe laser of an Yb lattice clock. The output of an Nd:YAG laser with wavelength of 1319 nm and that of an Yb-fiber laser with wavelength of 1030 nm were passed through a waveguided periodically-poled lithium niobate (WG-PPLN) for sum frequency generation. It is required that the probe laser has a linewidth of the order of 1 Hz to fully resolve the Yb lattice clock transition. Thus, the linewidth of the probe laser was reduced by stabilizing the frequency to a super-cavity. This was made of ULE with a low thermal expansion coefficient, and was mounted on an active vibration-isolation table at the optimal point for the reduced sensitivity to vibration. Also, this was installed in a vacuum chamber, and the temperature was stabilized to 1 mK level. This system was installed in an acoustic enclosure to block acoustic noise. The finesse of the super-cavity was measured to be 380 000 from the photon life time of the cavity.