• Title/Summary/Keyword: a-Si/c-Si

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Fabrications and Characterization of High Temperature, High Voltage Ni/6H-SiC and Ni/4H-SiC Schottky Barrier Diodes (고온, 고전압 Ni/4H-SiC 및 Ni/6H-SiC Schottky 다이오드의 제작 및 전기적 특성 연구)

  • Lee, Ho-Seung;Lee, Sang-Wuk;Shin, Dong-Hyuk;Park, Hyun-Chang;Jung, Woong
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.11
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    • pp.70-77
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    • 1998
  • Ni/SiC Schottky diodes have been fabricated using epitaxial 4H-SiC and 6H-SiC wafers. The epitaxial n-type layers were grown on $n^{+}$ substrates, with a doping density of 4.0$\times$10$^{16}$ c $m^{-3}$ and a thickness of 10${\mu}{\textrm}{m}$. Oxide-termination has been adopted in order to obtain high breakdown voltage and low leakage current. The fabricated Ni/4H-SiC and Ni/6H-SiC Schottky barrier diodes show excellent rectifying characteristics up to the measured temperature range of 55$0^{\circ}C$. In case of oxide-terminated Schottky barrier diodes, breakdown voltage of 973V(Ni/4H-SiC) and 920V(Ni/6H-SiC), and a very low leakage current of less than 1nA at -800V has been observed at room temperature. On non-terminated Schottky barrier diodes, breakdown voltages were 430V(Ni/4H-SiC) and 160v(Ni/6H-SiC). At room temperature, SBH(Schottky Barrier Height), ideality factor and specific on-resistance were 1.55eV, 1.3, 3.6$\times$10$^{-2}$ $\Omega$.$\textrm{cm}^2$ for Ni/4H-SiC Schottky barrier diodes, and 1.24eV, 1.2, 2.6$\times$10$^{-2}$$\Omega$.$\textrm{cm}^2$/ for Ni/SH-SiC Schottky barrier diodes, respectively. These results show that both Ni/4H-SiC and Ni/6H-SiC Schottky barrier diodes are very promising for high-temperature and high power applications.s..

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Microstructure and Mechanical Properties of Cr-Mo-Si-C-N Coatings Deposited by a Hybrid Coating System (하이브리드 코팅시스템에 의해 제조된 Cr-Mo-Si-C-N 박막의 미세구조 및 기계적 특성연구)

  • Yun, Ji-Hwan;Ahn, Sung-Kyu;Kim, Kwang-Ho
    • Journal of the Korean institute of surface engineering
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    • v.40 no.6
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    • pp.279-282
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    • 2007
  • Cr-Mo-Si-C-N coatings were deposited on steel and Si wafer by a hybrid system of AIP and sputtering techniques using Cr, Mo and Si target in $Ar/N_2/CH_4$ gaseous mixture. Instrumental analyses of XRD and XPS revealed that the Cr-Mo-Si-C-N coatings must be a composite consisting of fine(Cr, Mo and Si)(C and N) crystallites and amorphous $Si_3N_4$ and SiC. The hardness value of Cr-Mo-Si-C-N coatings significantly increased from 41 GPa of Cr-Mo-C-N coatings to about 53 GPa with Si content of 9.3 at.% due to the refinement of (Cr, Mo and Si)(C and N) crystallites and the composite microstructure characteristics. A systematic investigation of the microstructures and mechanical properties of Cr-Mo-Si-C-N coatings prepared with various Si contents is reported in this paper.

Crystal growth of polyctystalline 3C-SiC thin films on AlN buffer layer (AlN 완충층을 이용한 다결정 3C-SiC 박막의 결정성장)

  • Kim, Kang-San;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.333-334
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    • 2007
  • This paper describes the characteristics of poly (polycrystalline) 3C-SiC grown on SiOz and AlN substrates, respectively. The crystalline quality of poly 3C-SiC was improved from resulting in decrease of FWHM (full width half maximum) of XRD by increasing the growth temperature. The minimum growth temperature of poly 3C-SiC was $1100^{\circ}C$. The surface chemical composition and the electron mobility of poly 3C-SiC grown on each substrate were investigated by XPS and Hall Effect, respectively. The chemical compositions of surface of poly 3C-SiC films grown on $SiO_2$ and AlN were not different. However, their electron mobilities were $7.65\;cm^2/V.s$ and $14.8\;cm^2/V.s$, respectively. Therefore, since the electron mobility of poly 3C-SiC films grown on AlN buffer layer was two times higher than that of 3C-SiC/$SiO_2$, a AlN film is a suitable material, as buffer layer, for the growth of poly 3C-SiC thin films with excellent properties for M/NEMS applications.

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Electrochemical Characteristics of Dopamine coated Silicon/Silicon Carbide Anode Composite for Li-Ion Battery (리튬이온배터리용 도파민이 코팅된 실리콘/실리콘 카바이드 음극복합소재의 전기화학적 특성)

  • Eun Bi Kim;Jong Dae Lee
    • Korean Chemical Engineering Research
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    • v.61 no.1
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    • pp.32-38
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    • 2023
  • In this study, the electrochemical properties of dopamine coated silicon/silicon carbide/carbon(Si/SiC/C) composite materials were investigated to improve cycle stability and rate performance of silicon-based anode active material for lithium-ion batteries. After synthesizing CTAB/SiO2 using the Stöber method, the Si/SiC composites were prepared through the magnesium thermal reduction method with NaCl as heat absorbent. Then, carbon coated Si/SiC anode materials were synthesized through polymerization of dopamine. The physical properties of the prepared Si/SiC/C anode materials were analyzed by SEM, TEM, XRD and BET. Also the electrochemical performance were investigated by cycle stability, rate performance, cyclic voltammetry and EIS test of lithium-ion batteries in 1 M LiPF6 (EC: DEC = 1:1 vol%) electrolyte. The prepared 1-Si/SiC showed a discharge capacity of 633 mAh/g and 1-Si/SiC/C had a discharge capacity of 877 mAh/g at 0.1 C after 100 cycles. Therefore, it was confirmed that cycle stability was improved through dopamine coating. In addition, the anode materials were obtain a high capacity of 576 mAh/g at 5 C and a capacity recovery of 99.9% at 0.1 C/0.1 C.

$MoSi_2$/SiC Ceramic Composites Prepared by Polymer Pyrolysis (고분자 열분해에 의한 $MoSi_2$/SiC 세라믹 복합체)

  • 김범섭;김득중;김동표
    • Journal of the Korean Ceramic Society
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    • v.37 no.8
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    • pp.805-810
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    • 2000
  • The formation, microstructure and properties of MoSi2/SiC ceramic composites by polymer pyrolysis were investigated for the application of heating element material. Polymethylsiloxanes were mixed with Si, SiC, MoSi2 as filler and ceramic composites prepared by pyrolysis in N2 atmosphere at 1320~145$0^{\circ}C$ were studied. Dimensional change, density variation and phases were analyzed and correlated to the resulting material properties. Microstructures of ceramic composite prepared by polymer pyrolysis were composed of MoSi2, SiC and silicon oxycarbide glass matrix. Depending on the pyrolysis conditions, ceramic composites with a density of 86~90 TD%, a fracture strength of 213~284 MPa, a thermal expansion coefficient of 4~7$\times$10-6 were obtained. The electrical resistivity of the specimen decreased with increasing of temperature up to 50$0^{\circ}C$.

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Effects of the SiC Particle Size and Content on the Sintering and Mechanical Behaviors of $Al_2O_3$/SiC Particulate Composites

  • Ryu, Jung-Ho;Lee, Jae-Hyung
    • The Korean Journal of Ceramics
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    • v.3 no.3
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    • pp.199-207
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    • 1997
  • $Al_2O_3$/SiC particulate composites were fabircated by pressureless sintering. The dispersed phase was SiC of which the content was varied from 1.0 to 10 vol%. Three SiC powders having different median diameters from 0.28 $\mu\textrm{m}$ to 1.9 $\mu\textrm{m}$ were used. The microstructure became finer and more uniform as the SiC content increased except the 10 vol% specimens, which were sintered at a higher temperature. Under the same sintering condition, densification as well as grain growth was retarded more severly when the SiC content was higher or the SiC particle size was smaller. The highest flexural strength obtained at 5.0 vol% SiC regardless of the SiC particle size seemed to be owing to the finer and more uniform microstructures of the specimens. Annealing of the specimens at $1300^{\circ}C$ improved the strength in general and this annealing effect was good for the specimens containing as low as 1.0 vol% of SiC. Fracture toughness did not change appreciably with the SiC content but, for the composites containing 10 vol% SiC, a significantly higher toughness was obtained with the specimen containing 1.9$\mu\textrm{m}$ SiC particles.

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Growth of hexagonal Si epilayer on 4H-SiC substrate by mixed-source HVPE method (혼합 소스 HVPE 방법에 의한 4H-SiC 기판 위의 육각형 Si 에피층 성장)

  • Kyoung Hwa Kim;Seonwoo Park;Suhyun Mun;Hyung Soo Ahn;Jae Hak Lee;Min Yang;Young Tea Chun;Sam Nyung Yi;Won Jae Lee;Sang-Mo Koo;Suck-Whan Kim
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.33 no.2
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    • pp.45-53
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    • 2023
  • The growth of Si on 4H-SiC substrate has a wide range of applications as a very useful material in power semiconductors, bipolar junction transistors and optoelectronics. However, it is considerably difficult to grow very fine crystalline Si on 4H-SiC owing to the lattice mismatch of approximately 20 % between Si and 4H-SiC. In this paper, we report the growth of a Si epilayer by an Al-related nanostructure cluster grown on a 4H-SiC substrate using a mixed-source hydride vapor phase epitaxy (HVPE) method. In order to grow hexagonal Si on the 4H-SIC substrate, we observed the process in which an Al-related nanostructure cluster was first formed and an epitaxial layer was formed by absorbing Si atoms. From the FE-SEM and Raman spectrum results of the Al-related nanostructure cluster and the hexagonal Si epitaxial layer, it was considered that the hexagonal Si epitaxial layer had different characteristics from the general cubic Si structure.

Roles of Acid-Base Surface Interaction on Thermal and Mechanical Interfacial Behaviors of SiC/PMMA Nanocomposites (산-염기 표면반응이 탄화규소/PMMA 나노복합재료의 열적·기계적 계면특성에 미치는 영향)

  • Park, Soo-Jin;Oh, Jin-Seok
    • Korean Chemical Engineering Research
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    • v.43 no.5
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    • pp.632-636
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    • 2005
  • In this work, the effect of chemical treatments on surface properties of SiC was investigated in thermal and mechanical interfacial behaviors of SiC/PMMA nanocomposites. The acid/base value, contact angles, and FT-IR analysis were performed for the study of surface characteristics of the SiC studied. The thermal stabilities of the SiC/PMMA nanocomposites were investigated by thermogravimetric analysis (TGA). Also the mechanical interfacial properties of the composites were studied in critical stress intensity factor ($K_{IC}$) and critical strain energy release rate ($G_{IC}$) measurements. As a result, the acidically treated SiC (A-SiC) had higher acid value than that of untreated SiC (V-SiC) or basically treated SiC (B-SiC). The acidic solution treatment led to an increase in surface free energy of the SiC, mainly due to the increase of its specific component. Thermal and mechanical interfacial properties of the SiC/PMMA nanocomposites, including initial decomposition temperature (IDT), $K_{IC}$, and $G_{IC}$ had been improved in the acidic treatment on SiC. This was due to the improvement in the interfacial bonding strength, resulting from the acid-base interfacial interactions between the fillers and polymeric matrix.

Research on operation stability of 7kW Inverter for short distance vehicle using SiC Hybrid module (SiC 하이브리드 모듈을 적용한 근거리용 7kW Inverter 동작 안정성에 대한 연구)

  • Jeon, Joon-Hyeok;Kyoung, Sin-Su;Kim, Hee-Jun
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.12 no.5
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    • pp.499-506
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    • 2019
  • This paper is concerned with the operating stability of 7kW inverter using SIC hybrid module and verifies the validity of the simulation results by comparing the result of the loss equation and the simulation result, Simulation results using Si module and SiC hybrid module are compared to compare switch loss and diode loss. Through the loss equation calculation, the conduction loss of SiC Hybrid module is 168W, switching loss is 9.3W, diode loss is 10.5nW, When compared with the simulation results, similar values were shown. As a result of comparing the simulation results of the Si module and the SiC Hybrid module, The total device loss of the Si module was 246.2W, and the total device loss of the SiC Hybrid module was 189.9W. The loss difference was 56.3W, which was about 0.8W. thereby verifying the reverse recovery characteristics of the SiC SBD. In addition, temperature saturation test was conducted to confirm the stability of SiC Hybrid module and Si module under high temperature saturation, In the case of the Si module, the output power was stopped at 4kW, and the SiC Hybrid module was confirmed to operate at 7kW. Based on this, an efficiency graph and a temperature graph are presented, and the Si module is graphed up to 4kW and the SiC Hybrid module is graphed up to 7kW.

A Study on Critical Strain Energy Release Rate Mode II of Chemically Treated SiC-filled Epoxy Composites (표면처리된 탄화규소강화 에폭시 복합재료의 GIIC 특성)

  • Park, Soo-Jin;Oh, Jin-Seok
    • Journal of Adhesion and Interface
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    • v.6 no.4
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    • pp.1-6
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    • 2005
  • In this work, the effect of chemical treatments on surface properties of SiC was investigated in crack resistance properties of SiC/epoxy composites. The surface properties of SiC were determined by acid/base values and FT-IR measurements. Also the crack resistance properties of the composites were studied in critical strain energy release rate mode II ($G_{IIC}$) measurements. As a result, the acidically treated SiC had higher acid value than that of untreated SiC or basically treated SiC. The crack resistance properties of the composites had been improved in the specimens treated by acidic solution. These results were could be attributed to the acide-base intermolecular interaction between SiC and epoxy resin, resulting in increase of the degree of adhesion at interfaces.

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