Zone-Melting Recrystallization of Si Films on $SiO_2$ with a Graphite-Strip-Heater
(흑연 막대 발열체를 이용한 SOI구조의 Zone-melting 재결정화 연구)
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- Journal of the Korean Institute of Telematics and Electronics
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- v.27 no.4
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- pp.527-533
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- 1990