• 제목/요약/키워드: ZnO substrates

검색결과 477건 처리시간 0.034초

Morphological evolution of ZnO nanowires using varioussubstrates

  • Kar, J.P.;DAS, S.N.;Choi, J.H.;Myoung, J.M.
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 추계학술발표대회
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    • pp.27.1-27.1
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    • 2009
  • In recent years, ZnO nanostructures have drawn considerable attentions for the development of futuristic electronic devices due to their superior structural and optical properties. As the growth of ZnO nanowires by MOCVD is a bottom-up technique, the nature of substrates has a vital role for the dimension and alignment of the nanowires. However, in the pursuit of next generation ZnO based nanodevices, it would be highly preferred if well-ordered ZnO nanowires could be obtained on various substrates like sapphire, silicon, glass etc. Vertically aligned nanowires were grown on A and C-plane sapphire substrates, where as nanopencils were obtained on R-plane sapphire substrates. In addition, C-axis oriented vertical nanowires were also found using an interfacial layer(aluminum nitride film) on silicon substrates. On the other hand, long nanowires were found on Ga-doped ZnO film on glass substrates. Structural and optical properties of the ZnO nanowires on various substrates were also investigated.

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기판 변화에 따른 ZHO 박막의 광학특성 연구 (Comparison of the optical properties of ZnO thin films grown on various substrates by pulsed laser deposition)

  • 배상혁;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.828-830
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    • 2000
  • Various substrates were compared for the investigation of the optical properties of ZnO thin films. ZnO thin films have been deposited on (100) p-type silicon substrates and (001) sapphire substrates by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355 nm. Oxygen and nitrogen gases were used as ambient gases. Substrate temperatures were varied in the range of 200$^{\circ}C$ to 600$^{\circ}C$ at a fixed ambient gas pressure of 350 mTorr. ZnO films have been deposited on various substrates, such as Si and sapphire wafers. We have investigated substrate effect on the optical and structural properties of ZnO thin films using X-ray diffraction (XRD) and photoluminescence (PL).

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수열합성법에 의한 정렬된 ZnO 나노로드 구조의 합성 (Synthesis of Aligned ZnO Nanorod Arrays via Hydrothermal Route)

  • 구진희;이병우
    • 한국표면공학회지
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    • 제49권5호
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    • pp.472-476
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    • 2016
  • The nano-array of the vertically aligned rod-like particles grown on ZnO coated glass-substrates was obtained via hydrothermal process. ZnO thin film coatings were prepared on the glass substrates using a MOD (metallorganic deposition) dip-coating method with zinc chloride dihydrate as starting material and 2-ethylhexanol as solvent. ZnO nanorods were synthesized on the seeded substrates by hydrothermal method at $80^{\circ}C$ using zinc-nitrate hexahydrate as a Zn source and sodium hydroxide as a mineralizer. Under the hydrothermal condition, the rod-like nanocrystals were easily attaching on the already ZnO seeded (coated) glass surface. It has been shown that the hydrothermal synthesis parameters are key factors in the nucleation and growth of ZnO crystallites. By controlling of hydrothermal parameters, the ZnO particulate morphology could be easily tailored. Rod-shaped ZnO arrays on the glass substrates consisted of elongated crystals having 6-fold symmetry were predominantly developed at high Zn precursor concentration in the pH range 7~11.

Structural and Optical Characteristics of High Quality ZnO Thin Films Grown on Glass Substrates Using an Ultrathin Graphite Layer

  • Park, Suk In;Heo, Jaehyuk;Baek, Hyeonjun;Jo, Janghyun;Chung, Kunook;Yi, Gyu-Chul
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.302.1-302.1
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    • 2014
  • We report the growth of high quality zinc oxide (ZnO) thin films on amorphous glass substrates and their structural and optical characteristics. For the growth of ZnO films, mechanically exfoliated ultrathin graphite or graphene layers were used as an intermediate layer because ZnO does not have any heteroepitaxial relationship with the amorphous substrates, which significantly improved the crystallinity of the ZnO films. Structural and optical characteristics of the films were investigated using scanning and transmission electron microscopy, x-ray diffraction, and variable temperature photoluminescence spectroscopy. High crystallinity and excellent optical characteristics such as stimulated emission were exhibited from the high quality ZnO films grown on glass substrates.

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고주파 마그네트론 스펏터링법으로 제조한 ZnO박막의 기판에 따른 효과 (Substrate effects of ZnO films deposited by rf magnetron sputtering)

  • 김영진;권오준;유상대;김기완
    • 센서학회지
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    • 제5권6호
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    • pp.68-73
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    • 1996
  • 고주파 마그네트론 스펏터링법을 이용하여 유리 및 (012)면인 사파이어 기판위에 ZnO박막을 제조하였다. 유리기판위에는 (002)면을 갖는 ZnO 다결정박막이 제조되었으며, (012)면인 사파이어 기판위에는 (110)면인 ZnO에 피택셜 박막이 제조되었다. 유리 및 사파이어 기판위에 제조된 ZnO박막의 표면탄성파 특성을 조사하였다. 유리 및 사파이어 기판에 대한 중심주파수에서의 전파속도는 각각 2680 m/sec 및 5980 m/sec였으며, 기본모드에서 구한 결합계수는 각각 0.98 % 및 1.44 %였다.

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습식공정 기반 ITO 기판 위 산화아연 나노로드 모폴로지 제어 (Morphology Control of ZnO Nanorods on ITO Substrates in Solution Processes)

  • 신경식;이삼동;정순욱;이상우;김상우
    • 한국전기전자재료학회논문지
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    • 제22권11호
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    • pp.987-991
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    • 2009
  • We report growth of vertically well-aligned zinc oxide (ZnO) nanorods on indium-tin oxide (ITO)/glass substrates using a simple aqueous solution method at low temperature via control of the ZnO seed layer morphology. ZnO nanoparticles acting as seeds are pre-coated on ITO-coated glass substrates. by spin coating to control distribution and density of the ZnO seed nanoparticles. ZnO nanorods were synthesized on the seed-coated substrates in a dipping process into a main growth solution. It was found that the alignment of ZnO nanorods can be effectively manipulated by the spin-coating speed of the seed layer. A grazing incidence X-ray diffraction pattern shows that the ZnO seed layer prepared using the higher spin-coating speed is of uniform seed distribution and a flat surface, resulting in the vertical growth of ZnO nanorods aligned toward the [0001] direction in the main growth process.

Metalorganic chemical vapor deposition of semiconducting ZnO thin films and nanostructures

  • Kim Sang-Woo
    • 한국결정성장학회지
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    • 제16권1호
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    • pp.12-19
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    • 2006
  • Metalorganic chemical vapor deposition (MOCYD) techniques have been applied to fabricate semiconducting ZnO thin films and nanostructures, which are promising for novel optoelectronic device applications using their unique multifunctional properties. The growth and characterization of ZnO thin films on Si and $SiO_2$ substrates by MOCYD as fundamental study to realize ZnO nanostructures was carried out. The precise control of initial nucleation processes was found to be a key issue for realizing high quality epitaxial layers on the substrates. In addition, fabrication and characterization of ZnO nanodots with low-dimensional characteristics have been investigated to establish nanostructure blocks for ZnO-based nanoscale device application. Systematic realization of self- and artificially-controlled ZnO nanodots on $SiO_2/Si$ substrates was proposed and successfully demonstrated utilizing MOCYD in addition with a focused ion beam technique.

나노인덴테이션기법을 이용한 ZnO/Si 박막의 기계적 특성 (Mechanical Characteristics of ZnO Thin Films on Si Substrates by Nano Indentation Technology)

  • 윤한기;정헌채;손종윤;유윤식
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 춘계학술대회
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    • pp.138-143
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    • 2004
  • Recently there has been a great world-wide interest in developing and characterizing new nano-structured materials. These newly developed materials are often prepared in limited quantities and shapes unsuitable for the extensive mechanical testing. The development of depth sensing indentation methods have introduced the advantage of load and depth measurement during the indentation cycle. In the present work, ZnO thin films are prepared on Si(111), Si(100) substrates at different temperatures by pulsed laser deposition(PLD) method. Because the potential energy in c-axis is low, the films always show c-axis orientation at the optimized conditions in spite of the different substrates. Thin films are investigated by X-ray diffractometer and Nano indentation equipment. From these measurements it is possible to get elastic modulus and hardness of ZnO thin films on Si substrates.

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유기 기판 위에 수열 합성법으로 성장된 ZnO 나노 막대의 특성 연구 (The growth of ZnO nanorods by hydrothermal method on organic substrates)

  • 김아라;이지연;이주영;김홍승;박현국
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.281-281
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    • 2010
  • In this study, ZnO nanorod arrays are grown on organic substrates by hydrothermal method which requires a low temperature, simple process, and no vacuum. The structure properties of ZnO nanorods were examined by field emission scanning electron microscopy and X-ray diffraction. To detect the optical transmission, ultraviolet visible spectrophotometer was also used. From results, the ZnO nanorods were grown the horizontal growth on the organic substrates had the length of over $10\;{\mu}m$. After deposition of ZnO seed layer, the ZnO nanorod arrays had uniformity orientation and length.

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Graphite상의 ZnO Nanorod성장과 그를 이용한 Schottky Diode 제작

  • 남광희;백성호;박일규
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.421.2-421.2
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    • 2014
  • We report on the growth of ZnO nanorods (NRs) grown on graphite and silicon substrates via an all-solution process and characteristics of their heterojunctions. Structural investigations indicated that morphological and crystalline properties were not significantly different for the ZnO NRs on both substrates. However, optical properties from photoluminescence spectra showed that the ZnO NRs on graphite substrate contained more point defects than that on Si substrate. The ZnO NRs on both substrates showed typical rectification properties exhibiting successful diode formation. The heterojunction between the ZnO NRs and the graphite substrate showed a Schottky diode characteristic and photoresponse under ultraviolet illumination at a small reverse bias of -0.1 V. The results showed that the graphite substrate could be a good candidate for a Schottky contact electrode as well as a conducting substrate for electronic and optoelectronic applications of ZnO NRs.

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