Growth of ZnO Thin films Depending on the Substrates by RF Sputtering and Analysis of Their Microstructures (기판의 결정구조에 따른 RF 스퍼터링 ZnO 박막의 성장과 미세구조 분석)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.19 no.5
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- pp.461-466
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- 2006