• 제목/요약/키워드: Zirconate

검색결과 178건 처리시간 0.026초

X-ray and Plasma Process Induced Damages to PLZT Capacitor Characteristics for DRAM Applications

  • Kim, Jiyoung
    • The Korean Journal of Ceramics
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    • 제3권3호
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    • pp.213-217
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    • 1997
  • In this paper, the imparct of X-ray and plasma process-induced-damages to La doped Lead Zirconate Titanate (PLZT, (Pb1-xLa)(Zr0.5Ti0.5)O3) capacitor characteristics have been investigated from the viewpoint of gigabit scale dynamic random access memory (DRAM) applications. Plamsa damage causes asymmetric degradation on hysteresis characteristics of PLZT films. On the other hand, X-ray damage results in a symmetrical reduction of charge storage densities (Qc's) for both polarities. As La concentration increases in the films, the radiation hardness of PLZT films on X-ray and plasma exposures is improved. It is observed that the damaged devices are fully recovered by thermal annealing under oxygen ambient.

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보구조물의 모드변형에너지기반 손상 검색: 3가지 타입 센서의 비교 (Modal Strain Energy-based Damage Detection in Beam Structures using Three Different Sensor Types)

  • ;홍동수;김정태
    • 한국전산구조공학회:학술대회논문집
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    • 한국전산구조공학회 2011년도 정기 학술대회
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    • pp.680-683
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    • 2011
  • This study deals with damage detection in beam structure by using modal strain energy-based technique with three different sensor types: accelerometer, lead zirconate titanate (PZT) piezoelectric sensor and electrical strain gage. First, the use of direct piezoelectric effect of PZT sensor for dynamic strain response are presented. Next, a modal strain energy-based damage detection method is outlined. For validation, forced vibration tests are carried out on lab-scale aluminum cantilever beam. The dynamic responses are measured for several damage scenarios. Based on damage localization results, the performance of three different sensor types is evaluated.

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Co-firing of PZT/metal foil laminates for MIM structured device fabrication

  • 김백현;배현정;권도균
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.82.2-82.2
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    • 2012
  • 캐패시터, 액추에이터와 같이 MIM (Metal-Insulator-Metal) 구조를 갖는 디바이스는 높은 소결온도를 갖는 세라믹 유전체/압전체와 고온 내산화성이 낮은 금속 전극의 적층 형태로 인하여 동시 열처리 공정에 있어서 많은 제약이 따른다. 본 연구에서는 소결온도를 대폭 낮춘 저온 소결용 PZT 압전체 테이프를 니켈 금속 포일에 적층하여 동시 열처리를 통하여 소결을 시도하였다. 동시 열처리된 MIM 디바이스의 세라믹과 금속 전극 계면의 미세구조 및 성분 분석을 통하여 계면 반응 기구를 확인하였고, 계면 반응층이 디바이스의 특성에 미치는 영향에 대한 정량적 분석을 수행하였다. 또한 열처리 시간에 따른 계면 반응층의 변화를 관찰하고 반응층의 변화가 특성에 미치는 영향을 분석하였다. 니켈 이외에 니켈 합금인 INCONEL 718과 PZT 세라믹과의 동시 소성을 시도하여 니켈, INCONEL 두 금속 기판과 PZT 사이에 생성되는 계면 반응층의 미세구조와 특성의 차이점을 비교하였고 디바이스로서 사용하기 위한 적합성 여부를 확인하였다.

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다층 도포된 $\textrm{PbZr}_{0.53}\textrm{Ti}_{0.47}\textrm{O}_{3}$ sol-gel 박막내의 응력 거동 (Stress Development in Sol-gel Derived Multideposited Coatings of Lead Zirconate Titanate)

  • 박상면
    • 한국재료학회지
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    • 제9권11호
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    • pp.1069-1074
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    • 1999
  • 본 연구에서는 PbZr(sub)0.53Ti(sub)0.47O$_3$(PZT) 박막을 복수 도포함에 따른 박막내의 응력을 온도의 함수로 실시간(in situ) 측정하였으며, 응력발생의 원인에 박막의 건조, 열분해(pyrolysis), 치밀화 및 결정화 현상과 연관시켜 설명하였다. 도포직후 단층박막에 생성된 55MPa의 인장응력은 가열됨에 따라$ 300^{\circ}C$-$350^{\circ}C$에서 최대 145MPa로 증가하였으며, 박막내의 응력은 모든 온도구간에서 항상 인장응력을 나타내었더. 다층도포시 $650^{\circ}C$까지 열처리 주기를 완료한 층이 두꺼워질수록 새로 도포한 층의 영향은 점차 감소하였으며, 9층박막에 이르러서는 가열과 냉각에 따라 응력이 동일하게 변화하였다. 응력측정 결과 다층박막의 치밀화는 $350^{\circ}C$에서 시작되어 $520^{\circ}C$-$550^{\circ}C$ 부근에서 완료되는 것으로 나타났으며 치밀화가 시작하는 온도는 미세경도 측정결과와 일치하였다. $PbTiO_3$(PT)와 달리 PZT 다층박막은 Si 기판 위에서 perovskite로의 결정화가 일어나지 않았다.

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The Seeding Effects on the Phase Transformation of Sol-Gel Derived PZT Powder

  • Lee, Hyun-Tae;Lee, Wan-In;Kim, Yoo-Hang;Whang, Chin-Myung
    • Bulletin of the Korean Chemical Society
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    • 제23권8호
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    • pp.1078-1084
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    • 2002
  • The formation temperature for the perovskite lead zirconate titanate [Pb(Zr,Ti)O3, PZT] derived from sol-gel route was lowered by more than $100^{\circ}C$ with the addition of crystallographically suitable seed particles, such as barium titanat e (BT) or PZT. We investigated the effect of seeding on the crystallization of perovskite phase and in the microstructure of the sol-gel derived PZT powder by varying the concentration, size and chemical species of seed particles. The phase transition as a function of temperature was monitored by DTA, XRD, and Raman spectroscopy, and the interface between the seed particle and grown PZT layer was analyzed by SEM and high resolution TEM techniques. It was found that both the heterogeneous and homogeneous nucleation contributes competitively in the formation of perovskite PZT grains.

Guided-Waves-Based Mortar-Filled Steel Pipe Inspection Using EMAT End Wavelet Transform

  • 나원배
    • 한국해양공학회지
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    • 제20권2호
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    • pp.8-15
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    • 2006
  • Guided-waves-based mortar-filled steel pipe inspection is carried out through using EMAT (Electro magnetic acoustic transducer) and wavelet transform. Possibly existing anomalies such as separation (or void) and inclusion are made in the fabricated mortar-fled steel pipes: these anomalies are infected. Since guided waves have the long range inspection capability, EMAT has its own advantages over the conventional PZT (Piezoelectric zirconate titanate), and wavelet transform gives the multi-resolution on time-frequency domain results, the suggested technique gives an alternative way for inspecting mortar-filled steel pipes, which are popularly used for supporting marine structures such as piers, wharfs, moles, and dolphins. Through this study, it is show that the suggested technique is promising for detecting the amounts of separations and inclusions.

열차폐 코팅을 위한 지르코니아계 세라믹 소재의 기계적 특성 (Mechanical Properties of Zirconia-Based Ceramic Materials for Thermal Barrier Coating)

  • 정규익;김태우;백문규;이기성
    • 한국세라믹학회지
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    • 제43권8호
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    • pp.498-503
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    • 2006
  • A gas turbine blade with thermal barrier ceramic coating is operated at high temperature to increase engine efficiency. Recently, thermal barrier characteristics have been improved by advanced coating technology through microstructure control and increase of adhesion force of the coating layer. More advanced coating materials, rare earth zircon ate ceramics have been studied for replacing YSZ coatings as thermal barrier coatings. In this study, $La_2O_3,\;HfO_2,\;CeO_2,\;Gd_2O_3$ and pure or yttria stabilized zirconia were prepared. Microstructure analysis and the evaluation of mechanical properties such as Hertzian indentation and hardness test were performed.

졸-겔법에 의한 PZT 합성과 박막제조 (Sol-Gel Processing and Properties of PZT Powders and Thin Films)

  • 오영제;정형진
    • 한국세라믹학회지
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    • 제28권12호
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    • pp.943-952
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    • 1991
  • Lead zirconate titanate(PZT) powders and thin films were prepared from an alkoxide-based solution by sol-gel method. Gelation of synthesized complex solutions, pyrolysis and crystallization behaviors of the dried powder were studied in accordance with a water content and a catalyst. PZT thin films were formed by spin-casting method on silicon and platinum substrates, and characterized. Ester produced from the reactions was completely removed when drying of the gel was finished. Pyrolysis property of the dried PZT gels were changed in order water content, class of catalyst, and quantity of catalyst. Crystalline Pb phase was transiently formed near 250$^{\circ}C$. Basic catalyst is good additive for a formation of perovskite phase in the films, and acidic catalyst for a densified film structure. By the analysis of RBS, Pb element in the PZT films were diffused into silicon substrate, and the pores, may be produced due to local densification around some grains in the films, make an origin of fault in microstructure when holding time goes to be longer at 700$^{\circ}C$.

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Construction and Application of Experimental Formula for Nonlinear Behavior of Ferroelectric Ceramics Switched by Electric Field at Room Temperature during Temperature Rise

  • Ji, Dae Won;Kim, Sang-Joo
    • 한국세라믹학회지
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    • 제55권1호
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    • pp.67-73
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    • 2018
  • A poled lead zirconate titanate (PZT) cube specimen that is switched by an electric field at room temperature is subject to temperature increase. Changes in polarization and thermal expansion coefficients are measured during temperature rise. The measured data are analyzed to obtain changes in pyroelectric coefficient and strain during temperature change. Empirical formulae are developed using linear or quadratic curve fitting to the data. The nonlinear behavior of the materials during temperature increase is predicted using the developed formulae. It is shown that the calculation results can be compared successfully with the measured values, which proves the accuracy and reliability of the developed formulae for the nonlinear behavior of the materials during temperature changes.

Sol-Gel법에 의한 강유전체 PZT 박막의 제작 (Preparation of Ferroelectric PZT thin films by Sol-Gel processing)

  • 이병수;유도현;신태현;조기선;육재호;김용혁;김형권;지승한;이덕출
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.1685-1686
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    • 2000
  • Crack-free and homogeneous com ceramic and epitaxial lead zirconate titanat ferroelectric thin films with perovskite structure been prepared by sol-gel processing. Ti-isoprop and lead acetate trihydrate and zirconium-pro are used raw materials. EAcAc is used as a cat 2-Methoky ethanol is used as a solvent annealing temperatures of the thin films are 0$^{\circ}C$.

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