• 센서학회지
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• 제13권2호
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• pp.101-109
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• 2004

This paper presents a novel z-axis accelerometer with perfectly aligned vertical combs fabricated using the extended sacrificial bulk micromachining (extended SBM) process. The z-axis accelerometer is fabricated using only one (111) SOI wafer and two photo masks without wafer bonding or CMP processes as used by other research efforts that involve vertical combs. In our process, there is no misalignment in lateral gap between the upper and lower comb electrodes, because all critical dimensions including lateral gaps are defined using only one mask. The fabricated accelerometer has the structure thickness of $30{\mu}m$, the vertical offset of $12{\mu}m$, and lateral gap between electrodes of $4{\mu}m$. Torsional springs and asymmetric proof mass produce a vertical displacement when an external z-axis acceleration is applied, and capacitance change due to the vertical displacement of the comb is detected by charge-to-voltage converter. The signal-to-noise ratio of the modulated and demodulated output signal is 80 dB and 76.5 dB, respectively. The noise equivalent input acceleration resolution of the modulated and demodulated output signal is calculated to be $500{\mu}g$ and $748{\mu}g$. The scale factor and linearity of the accelerometer are measured to be 1.1 mV/g and 1.18% FSO, respectively.

• 제어로봇시스템학회논문지
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• 제20권2호
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• pp.149-156
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• 2014

A magnetic compass module must be calibrated accurately before use. Moreover, the calibration process must be performed taking into account any magnetic dip if the magnetic compass module has tilt angles. For this, a calibration method for a magnetic compass module is explained. Tilt error of the magnetic compass module is compensated using a biaxial accelerometer generally. The accelerometer error causes a tilt angle calculation error that gives rise to an azimuth calculation error. For error property analysis, error equations are derived and simulations are performed. In the simulation results, the accuracy of derived error equations is verified. If a biaxial magnetic compass module is used instead of a triaxial one, the magnetic dip and z-axis magnetic compass data must be estimated for tilt compensation. Lastly, estimation equations for the magnetic dip and z-axis magnetic compass data are derived, and the performance of the equations is verified based on a simulation.

• 전자공학회논문지D
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• 제35D권2호
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• pp.33-39
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• 1998

A six-beam accelerometer with self-compensated off-axis sensitivity was fabricated onthe selectively diffused (111)-oriented n/n$^{+}$/n silicon substrates by a unique porous silicon micromachining technique, which has self-stip characteristics and highly seletive formation of porous silicon layer during anodic reaction. Also, the characteristics of the fabricated accelerometer were investigated. The sensitivity of the acceleormeter added up outputs of three bridges through a summing circuit was 0.68 mV/g and the nonlinearity was less than 2% of the full scale output. The measured first resonant frequency was 4.236 kHz. When the outputs of three bridges were compared to summing output of bridges obtained through summing circuit, the normal output for Z-axis acceleration exhibited the same value s summing outputs of three bridges without reduction of sensitivity and thus the sensitivity decrease due to additional beam was compensated. Although a maximum off-axis sensitivity in one bridge of the accelerometer showed 17% of normal sensitivity, the off axis sensitivity obtained from summing output of three bridges decreased to 1.0%. Therefore, the self-elimination of off-axis sensitivity can be simply realized by obtaining the output of the sensor through summing circuit.t.

• 대한임상전기생리학회지
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• 제8권1호
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• pp.43-50
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• 2010

Purpose : The objective of this study is to effect of an aquatic rotation control and obstacle avoidance when conducted underwater on hemiplegia patient's balance ability and vestibular function. Methods : Twelve hemiplegia patients participated and were randomly assigned to a control group(I) with standard physical therapy and an aquatic group(II) with an aquatic rotation control, obstacle avoidance and standard physical therapy as well. The aquatic group trained using a Halliwick rotation control and obstacle avoidance through 3 times per week over 6 weeks. For all subjects, vestibular function, their balance, the change of electrooculogram (EOG), the change of accelerometer axis and torsiometer according to visual sense, vestibular sense with galvanic vestibular stimulation (GVS) or not during leg close stance were measured. Results : The EOG in the vertical and horizontal (p<0.05) were both significantly lowered. The change was significantly lower in the trajectory range of motion of trunk and spine with torsiometer when leg close stand (p<0.01) and leg close stand with GVS (p<0.01). The centre of gravity accelerated, there were reduced significantly difference X and Y axis of accelerometer during the closing of the leg without vision (p<0.05). There were reduced significantly difference X and Z axis of accelerometer during the closing of the leg with GVS (p<0.05). There were reduced significantly difference X and Z axis of accelerometer during the closing of the leg and close eyes with GVS (p<0.05). Conclusion : The balance ability, vestibular system and postural control is improved.

• 정보교육학회논문지
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• 제15권1호
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• pp.147-154
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• 2011

본 연구에서는 가속도 센서의 각 축의 값들을 이용해 숫자나 특정 입력 값을 기기에 전달할 수 있는 제스처 인식을 위한 센서 값들의 효율적인 사전 보정 알고리즘과 분류 알고리즘에 대해서 제안한다. 실험결과 보정 전과 보정 후의 X축과 Z축의 에러율을 통하여 전처리 된 데이터가 생성됨을 알 수 있었다. 또한 전처리 된 데이터에 적용할 정규화와 분류 알고리즘으로 구현한 인식기가 높은 인식률을 보여주었다.

• 센서학회지
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• 제9권3호
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• pp.196-202
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• 2000

본 논문에서는 3축의 가속도를 검출하기 위한 새로운 방식인 브리지조합 검출원리를 제안하고, SOI 구조의 웨이퍼를 이용하여 $200^{\circ}C$ 이상 고온에서 동작이 가능한 압저항형 실리콘 가속도센서를 제작하였다. 제작된 센서의 감도는 x 및 y축이 8mV/V G, z 축이 40mV/V G 이였다. 그리고 출력전압의 비선형성은 1.6%FS, 타축감도는 약 4.6% 이하였다. 이것은 외부 연산회로를 이용하여 3축의 가속도성분을 검출하는 방법에 비해 검출방식은 간단하면서도, 특성은 거의 동일하였다. 또한 SOI 구조를 이용하여 고온에서도 안정한 동작을 하였다. 제작된 가속도센서의 오프셋전압 온도계수와 감도 온도계수는 $27^{\circ}C$에서 각각 $1033ppm^{\circ}C^{-1}$와 $1145ppm^{\circ}C^{-1}$이였다.

• The Journal of Korean Physical Therapy
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• 제22권6호
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• pp.59-63
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• 2010

Purpose: Driving a car is an essential component of daily life. For safe driving, each driver must perceive sensory information and respond rapidly and accurately. Brake response time (BRT) is a particularly important factor in the total stopping distance of a vehicle, and therefore is an important factor in traffic accident prevention research. The purpose of the current study was (1) to compare accelerometer. BRTs analyzed by three different methods and (2) to investigate possible correlations between accelerometer-BRTs and foot switch-BRTs, which are measured method using a foot switch. Methods: Eighteen healthy subjects participated in this study. BRT was measured with either a tri-axial accelerometer or a footswitch. BRT with a tri-axial accelerometer was analyzed using three methods: maximum acceleration time, geometrical center, and center of maximum and minimum acceleration values. Results: Both foot switch-BRTs and accelerometer-BRTs were delayed. ANOVA for accelerometer BRTs yielded significant main effects for axis and analysis, while the interaction effect between axis and analysis was not significant. Calculating the Pearson correlation between accelerometer-BRT and foot switch-BRT, we found that maximum acceleration time and center of maximum and minimum acceleration values were significantly correlated with foot switch-BRT (p<0.05). The X axis of the geometrical center was significantly correlated with foot switch-BRTs (p<0.05), but Y and Z axes were not (p>0.05). Conclusion: These findings suggest that the maximum acceleration time and the center of maximum and minimum acceleration value are significantly correlated with foot switch-BRTs.

• JSTS:Journal of Semiconductor Technology and Science
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• 제5권1호
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• pp.58-66
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• 2005

Inertial-grade vertical-type and lateral-type differential resonant accelerometers (DRXLs) are designed, fabricated using one process and tested for navigational applications. The accelerometers consist of an out-of-plane (for z-axis) accelerometer and in-plane (for x, y-axes) accelerometers. The sensing principle of the accelerometer is based on gap-sensitive electrostatic stiffness changing effect. It says that the natural frequency of the accelerometer can be changed according to an electrostatic force on the proof mass of the accelerometer. The out-of-plane resonant accelerometer shows bias stability of $2.5{\mu}g$, sensitivity of 70 Hz/g and bandwidth of 100 Hz at resonant frequency of 12 kHz. The in-plane resonant accelerometer shows bias stability of $5.2{\mu}g$, sensitivity of 128 Hz/g and bandwidth of 110 Hz at resonant frequency of 23.4 kHz. The measured performances of two accelerometers are suitable for an application of inertial navigation.

• 전자공학회논문지D
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• 제36D권7호
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• pp.26-33
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• 1999

4빔 브릿지형 압저항형 실리콘 가속도 센서에서 빔의 위치가 가속도 센서의 특성에 어떤 영향을 주는지 조사하기 위해서 빔의 위치가 서로 다른 3가지 형태의 가속도 센서를 FEM(finite element method)을 사용하여 해석하고, SDB(silicon direct bonding) 웨이퍼를 사용하여 RIE(reactive ion etching)와 KOH(potassium hydroxide) 애칭 공정으로 제조하였다. 세가지 형태의 가속도 센서에 대한 FEM 해석 경과, 첫 번째 공진 주파수와 Z축 감도는 세구조 모두 같게 나타났으나, 두 번째와 세 번째의 공진 주파수 및 X, Y축의 감도는 다른 것으로 나타났다. 제조된 가속도 센서의 특성을 살펴볼 때, 세 가지 형태의 센서는 비록 첫 번째 공진 주파수와 Z축 감도가 정확하게 일치하지는 않았지만, 첫 번째 공진 주파수는 1.3 ~ 1.7 KHz, Z축 감도는 5 V 인가시 180 ~ 220 lN/G, 타축감도는 1.7 ~ 2 %를 가지는 것으론 나타났다.

• 한국산학기술학회논문지
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• 제18권1호
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• pp.709-714
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• 2017

다리 혹은 건물과 같은 구조물들은 그들의 안전상태를 진단하기 위하여 지속적으로 점검할 필요가 있다. 그러나 사람이 이러한 구조물의 모든 지점을 직접적으로 접근하여 점검해야 하는 치명적인 어려움이 있다. 이러한 어려움을 극복하기 위하여 오늘날에는 WSN(Wireless Sensor Node)를 이용한 SHM(Structural Health Monitoring)에 대한 많은 연구가 활발히 이루어지고 있다. 본 논문에서는 WSN을 이용한 SHM에서 보다 정밀한 점검을 위하여 실시간 처리를 제공하는 Xenomai의 성능을 기존 리눅스 커널과 실험적으로 비교 평가하였다. 이를 위하여 상용 임베디드 보드인 라즈베리 파이(Raspberry Pi) 보드의 기존 리눅스 커널에 Xenomai를 패치 시키고, 캔틸레버 빔(cantilever beam)의 고유 주파수(natural frequency)를 분석하기 위하여 가속도 센서로부터 z-축 진동 데이터를 주기적으로 읽어 들이는 태스크를 구현하였다. 동일한 방법으로 기존 리눅스 커널에서 데이터를 측정한 후, Smart Office Analyzer를 이용하여 캔틸레버 빔의 고유 주파수를 분석하였다. 마지막으로, WSN을 위한 Xenomai의 타당성을 검토하기 위하여 가속도 센서의 z-축 진동 데이터를 유선으로 측정하여 동일한 방법으로 비교 분석하였다.