• Journal of the Korean institute of surface engineering
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• v.45 no.6
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• pp.257-263
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• 2012

CrN/AlN multilayer coatings with various bilayer periods in the range of 1.8 to 7.4 nm were synthesized using a closed-field unbalanced magnetron sputtering method. Their crystalline structure, chemical compositions and mechanical properties have been investigated with Auger electron spectroscopy, X-ray diffractometry, atomic force microscopy, nanoindentation, scratch tests. The properties of the multilayer coatings varied strongly depending upon the magnitude of the bilayer period. The multilayer coating with a bilayer period of 1.8 nm showed the maximum hardness and an elastic modulus of approximately 37.6 and 417 GPa, respectively, which was 1.54 times higher than the hardness predicted by the rule of mixture from the CrN and AlN coatings. The hardness of the multilayer coating increased as the bilayer period decreased, i.e. as the rotation speed increased. The Hall-Petch type relationship, hardness being related to (1/periodicity)$^{-1/2}$, suggested by Lehoczky was confirmed for the CrN/AlN multilayer coatings with bilayer period close to the 5-10 nm range. With decreasing bilayer period, the surface morphology of the films became rougher and the critical load of films for adhesion strength gradually decreased.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1982-1984
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• 1996

In this paper, we have evaluated the physical characteristicsof the Pt/Cr bilayer, fabricated the micro hot plate by using the Pt/Cr bilayer and E-beam evaporated oxide as a passivation layer, and simulated the thermal distribution by using the commercial software FIDAP. From the researches the sheet resistance of Pt/Cr bilayer didn't be affected by the Cr layer thickness. This results was considered due to the Cr-oxide resided at the interface between Pt and Cr layer. After manufacturing the hot plate, we measured its temperature by type k thermo-couple and I.R. thermo-vision system. In those experiments, the emission coefficient( ${\varepsilon}$ ) of the E-beam evaporated oxide was 0.5 and the temperature of centural region was reached about $305\;^{\circ}C$ at 1.3 watts. The temperature simulation obtained by FIDAP commercial package stewed that the temperature of centural region was about $311\;^{\circ}C$ after 5 sec.

• Korean Journal of Materials Research
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• v.13 no.1
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• pp.36-42
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• 2003

The oxidation behaviors of Y-Cr bilayer deposited on ferritic steel by magnetron-sputtering for application of the Fe-Cr alloys as interconnectors of planar-type solid oxide fuel cells (SOFCs) were studied. After oxidation at $800^{\circ}C$ for 40 hours, the major phase of $Y_2$$O_3$and the minor phase of $YCrO_3$, $Mn_{1.5}$ $Cr_{1.5}$ $O_4$and Cr$_2$SiO$_4$were formed in the Y/Cr bilayered samples, while the major phase of Cr$_2$O$_3$and the minor phase of $Y_2$$O_3$were formed as the major phase in the Cr/Y bilayered samples. The Log(ASR/T) that expresses electric resistance of the Y/Cr coated specimen with nonconducting $_Y2$$O_3$oxide showed high value of -2.80 Ω$\textrm{cm}^2$$K^{-1}$ / and that of the Cr/Y coated specimen with conducting $Cr_2$$O_3$oxide appeared to be -4.11 Ω$\textrm{cm}^2$$^{K}$ . The electric resistance of the Y/Cr coated specimen was largely increased due to the formation of high resistance oxide scales. However, the Cr/Y coated specimen did not show any increase in the electric resistance and had the long-term stability of oxidation because there was no formation of the secondary phases with low conductivity.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.293-293
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• 2015

최근 다층 코팅의 합성을 통해 코팅의 경도, 내마모성 등의 기계적 물성을 향상시키는 연구가 활발히 진행되고 있다. 본 연구에서는 높은 경도, 낮은 마찰계수, 우수한 고온 특성을 함께 나타내기 위해 CrZrN/CrZrSiN 다층 코팅을 설계하였고, 이중층 주기를 조절하여 CrZrN/CrZrSiN 다층 코팅의 물성변화를 확인하였다.

• Proceedings of the Materials Research Society of Korea Conference
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• 1996.05a
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• pp.121-121
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• 1996

• Proceedings of the Korean Magnestics Society Conference
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• 2007.05a
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• pp.159.2-159.2
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• 2007

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2007.04a
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• pp.91-92
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• 2007

비대칭 마그네트론 스퍼터링을 이용하여 CrN / TaN 초격자 박막을 합성하였으며, 각층(bilayer)의 두께(${\lambda}$)를 4.3 nm에서 43 nm까지 제어하였다. X선 회절 패턴 분석 결과, 합성된 박막의 미세구조는 CrN (200) 방향과 TaN (200) 방향으로 성장하였으며, 각층의 두께 (${\lambda}$)에 따라 최대 31.2 GPa의 경도 값을 얻었다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.63-63
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• 2018

본 연구는 플라즈마 전해 산화 (PEO) 및 RF (Radio Frequency) 스퍼터링을 이용한 2 단계 접근법에 의해 처리 된 MgO / Ni-Cr의 고내식성 이중층 코팅을 제조하기 위해 수행되었다. 이를 위해 $100mA/cm^2$ 교류 조건에서 180 s PEO를 한 후 150W 에서 900s RF 스퍼터링을 수행 하였다. 코팅의 형태는 주사전자현미경(SEM)을 사용하여 관찰되었으며 코팅의 상조성은 X-선 회절(XRD) 및 X-선 광전자 분광법(XPS)을 사용하여 분석하였다. SEM 이미지는 스퍼터링 된 Ni-Cr이 크랙의 대부분과 미세한 미세 공극을 덮어 코팅 결함이 감소함을 보여 주었다. 따라서, 코팅 된 샘플의 거칠기 값은 스퍼터링 공정 후에 감소되었다. 단면 이미지로부터, 스퍼터링된 코팅층은 낮은 두께 때문에 거의 검출되지 않았다. EDS, XRD 및 XPS를 사용한 조성 분석은 금속 상태의 형태로 Ni 및 Cr 존재를 나타내었고 XPS에서 NiCr2O4 부동태 피막이 검출되었다. MgO / Ni-Cr 이중층 코팅의 내부식성은 MgO / Ni-Cr 이중층을 가진 샘플의 금속 원소와 비교하여 우수한 부식 특성을 나타내는 전위 역학적 분극 시험 및 전기 화학적 임피던스 분광법으로 평가 하였다.

• Journal of the Korean Vacuum Society
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• v.21 no.5
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• pp.233-241
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• 2012

We have deposited the bilayer consisted of the underlayer and the overlayer by using DC magnetron sputter on Single crystal MgO (001) substrate. This bilayer was fabricated at fixed annealing temperature and time. We have controlled agglomeration effect by changing of the bilayer thickness. Finally, we have made the self-organization and nano-structured film. In this processing, we have made nano-dot which consists of the underlayer and the overlayer, unlike the existing method called the agglomeration effect in the single layer. The underlayer has deposited using Ti, Cr and Co. And the overlayer has deposited with Ag. Through the analysis of Atomic force microscopy (AFM), the microstructure of underlayer is observed by AFM to confirm the formation of nano-dot. As the nano-dot through above processing, we have found that the nano-dot has the different shape. As a result, when we manufactured nano-dot through the agglomeration effect of bi-layer, the best matching material is Ti for underlayer. And also, we have found that MgO/Ti/Ag samples have been grown expitaxially toward the direction of MgO (001) by X-ray Diffraction analysis.

• Journal of the Korean institute of surface engineering
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• v.28 no.6
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• pp.376-385
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• 1995

Copper-chromium multilayers with a nominal bilayer thickness of about 400 $\AA$ (200 $\AA$ each) were prepared by dc magnetron sputtering and the evolution of microstructure during heat treatment was investigated by using x-ray diffractometry(XRD), Auger electron spectroscopy(AES) and transmission electron microscopy(TEM). It was observed that an amorphous phase with a thickness of about 40 $\AA$ was formed at the interfaces of the as-deposited Cu/Cr multilayered film using cross-sectional TEM. At elevated temperatures, the Cu(111) reflection showed increasing intensity and decreasing line-width as a result of copper grain growth. The intermixed amorphous phase disappeared after annealing at $250^{\circ}C$ for 1 h and the multilayer structure was stable up to $400^{\circ}C$ for 1 h annealing. At $600^{\circ}C$ annealing, it was observed that the multilayer structure was completely destroyed and copper and chromium phases were fully intermixed.