• 제목/요약/키워드: XPS.

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XPS와 SIMS에 의한 Co-Ni과 Au-Cu 합금표면 정량분석 연구 (Quantitative Surface Analysis of Co-Ni and Au-Cu alloys by XPS and SIMS)

  • 김경중;문대원;이광우
    • 한국진공학회지
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    • 제1권1호
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    • pp.106-114
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    • 1992
  • 여러 조성의 Co-Ni 합금과 Au-Cu 합금에 대하여 XPS와 SIMS 분석방법을 사용하 여 표면분석의 정량화 연구를 수행하였다. XPS의 경우 Co-Ni 합금에 대하여는 수정 없이 고순도 시료만으로 1~2% 상대오차 범위 내에서 정량분석이 가능하였고, Au-Cu 합금의 경 우에는 고순도 시료만을 표준시료로 사용하여서는 정량 분석이 불가능하였고 실험적인 수정 인자를 사용한 경우 1~2% 상대오차로 정량분석이 가능하였다. Au-Cu 합금의 경우 여러 조성이 표준시료가 없는 경우 이론적인 수정인자를 사용하는 경우 10%의 상대오차로 정량 분석이 가능하였다. Co-Ni 합금을 SIMS 분석하였을 때 Co와 Ni의 이차이온 세기의 비가 넓은 농도 범위에서 각 성분의 농도의 비와 직선관계를 가져 SIMS에 의한 합금의 정량분석 이 가능하였다. 또한 VAMAS-SCA Japan Project의 XPS 공동분석의 예비 결과도 주어져 있다.

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Surface analysis of CuSn thin films obtained by rf co-sputtering method

  • 강유진;박주연;정은강;강용철
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.175.1-175.1
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    • 2015
  • CuSn thin films were deposited by rf magnetron co-sputtering method with pure Cu and Sn metal targets with a variety of rf powers. CuSn thin films were studied with a surface profiler (alpha step), X-ray photoelectron spectroscopy (XPS), X-ray induced Auger electron spectroscopy (XAES), X-ray diffraction (XRD), and contact angle measurement. The thickness of CuSn thin films was fixed at $200{\pm}10nm$ and deposition rate was calculated by the measured with a surface profiler. From the survey XPS spectra, the characteristic peaks of Cu and Sn were observed. Therefore, CuSn thin films were successfully synthesized on the Si (100) substrate. The oxidation state and chemical environment of Cu and Sn were investigated with the binding energy regions of Cu 2p XPS spectra, Sn 3d XPS spectra, and Cu LMM Auger spectra. Change of the crystallinity of the films was observed with XRD spectra. Using contact angle measurement, surface free energy (SFE) and wettability of the CuSn thin films were studied with distilled water (DW) and ethylene glycol (EG).

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XPS 및 Surface voltage decay를 이용한 실리콘 절연재료의 표면분석 (Surface Analysis of Silicone Polymer used as Insulating Material by XPS and Surface Voltage Decay)

  • 연복희;이기택;박충렬;김남렬;서유진;허창수;조한구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.236-239
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    • 2002
  • Surface states of silicone polymer treated by plasma were investigated by the analysis by x-ray photoelectron spectroscopy (XPS) and surface voltage decay. Plasma treatment causes the silica-like oxidative layer, which is confirmed with XPS, and lowers surface resistivity with increasing the plasma treatment time. Using the decay time constant of surface voltage, the calculated surface resistivity was compared with the value directly measured by a voltage-current method. A good agreement between two methods was obtained. In addition, we estimated the thermal activation energy for surface conduction, Based on our results, we could understand the relationship between surface chemical states and surface electrical properties.

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광전자 분광현미경학 (Photoelectron spectro-microscopy/Scanning photoelectron microscopy (SPEM))

  • 신현준
    • 진공이야기
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    • 제3권4호
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    • pp.8-13
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    • 2016
  • The need of space-resolved x-ray photoelectron spectroscopy (XPS) has developed scanning photoelectron microscopy (SPEM). SPEM provides space-resolved XPS data from a spot of a sample as well as images of specific element, chemical state, valency distribution on the surface of a sample. Based on technical advancement of tight x-ray focusing, sample positioning accuracy, and electron analyzer efficiency, SPEM is now capable of providing ~100 nm space resolution for typical XPS functionality, and SPEM has become actively applied for the investigation of chemical state, valency, and electronic structure on the surface of newly discovered materials, such as graphene layers, dichalcogenide 2D-materials, and heterogenous new functional materials.

XPS DOCUMENTS AND THEIR APPLICATIONS IN THE CONSTRUCTION INDUSTRY

  • N. O., Nawari
    • 국제학술발표논문집
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    • The 2th International Conference on Construction Engineering and Project Management
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    • pp.417-423
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    • 2007
  • This paper describes how using the XPS Document technologies of Windows Vista support and enhances interactions with the structural design and construction process. It illustrates the document workflows and the document life cycle in a typical construction base knowledge system. It provides engineers and decision makers and implementers with information about this new technology and how they can apply it to their design and construction models. The paper also highlights opportunities for the new format of data exchange in the recent efforts to develop National Management System Standards for Transportation Applications to benefit from these emerging technologies.

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Structural Studies of Thin Film Boron Nitride by X-ray Photoelectron Spectroscopy

  • 김종성
    • 센서학회지
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    • 제5권1호
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    • pp.51-56
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    • 1996
  • Structural properties of rf sputtered boron nitride films were studied as a function of deposition parameters such as nitrogen pressure, substrate temperature and substrate bias using X-ray photoelectron spectroscopy and Auger electron spectroscopy. Composition and information on chemical bonding of resultant films was determined by XPS. XPS core level spectra showed that ratio of boron to nitrogen varied from 3.11 to 1.45 with respect to partial nitrogen pressure. Curve fitting of XPS spectra revealed three kinds of bonding mechanism of boron in the films. XPS peak positions of both B 1s and N 1s shifted to higher energy with higher nitrogen pressure as well as increase in substrate bias voltage. AES was used to see possible contamination of films by carbon or oxygen as well.

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XPS STUDY ON DNA DAMAGE BY LOW-ENERGY ELECTRON IRRADIATION

  • Noh, Hyung-Ah;Cho, Hyuck
    • Journal of Radiation Protection and Research
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    • 제36권4호
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    • pp.190-194
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    • 2011
  • After the first report that electrons with sub-ionization energy of DNA could cause single strand breaks or double strand breaks to DNA, there have been various studies to investigate the mechanisms of DNA damage by low-energy electrons. In this paper, we examined the possibility of using X-ray photoelectron spectroscopy (XPS) to analyze the dissociation patterns of the molecular bonds by electron irradiation on DNA thin films and tried to establish the method as a general tool for studying the radiation damage of biomolecules by low energ yelectrons. For the experiment, pBR322 plasmid DNA solution was formed into the films on tantalum plates by lyophilization and was irradiated by 5-eV electrons. Un-irradiated and irradiated DNA films were compared and analyzed using the XPS technique.

고전압 방전 플라즈마에 의해 합성한 질화탄소 박막의 열처리 효과 (Effect of Annealing on Carbon Nitride Films Prepared by High Voltage Discharge Plasma)

  • 김종일
    • 한국전기전자재료학회논문지
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    • 제15권5호
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    • pp.455-459
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    • 2002
  • I have investigated the effects of annealing on a polymeric $\alpha-C_3N_{4.2}$ at high pressure and temperature in the presence of seeds of crystalline carbon nitride films prepared by a high voltage discharge plasma. The samples were evaluated by x-ray photoelectron spectroscopy (XPS), infrared spectroscopy, Auger electron spectroscopy and x-ray diffraction(XRD). Notably, XPS studies of the film composition before and after annealing demonstrate that the nitrogen composition in $\alpha-C_3N_{4.2}$ material initially containing more than 58% nitrogen decreases during the annealing process and reaches a common, stable composition of ~43%. XPS analysis also shows that the nitrogen composition in the annealed films without polymeric $\alpha-C_3N_{4.2}$ was reduced from 35% to 17%. Furthermore the concentration of the sp$^3$bonded phase increased with the increment of the annealing temperature.

Characterization of Surface Properties of $BaTiO_3$ Powder by XPS

  • Chun, Myoung-Pyo;Cho, Jung-Ho;Kim, Byung-Ik
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.678-679
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    • 2006
  • The effects of particle size on the surface properties of hydro-thermally synthesized barium titanate powders were investigated by means of particle size analysis, specific surface area, SEM, zeta potential and XPS. Particle sizes were measured by laser light scattering and are in the range of 150 to 1100nm. Zeta potential increased with increasing particle size and it was large minus value in the range of particle size from 500 to 900nm, which seems to be related with the dissolution of $Ba^{2+}$ ion in these particle sizes from the analysis of surface properties by XPS.

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