• Title/Summary/Keyword: Working pressure

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Development of the Home-Based Pulmonary Rehabilitation Program for Patients with Chronic Lung Disease (만성 폐질환 환자에서 재택 호흡재활치료방법 개발 연구)

  • Yoon, Seong-Ho;Na, Joo-Ok;JeGal, Yang-Jin;Kim, Myung-Wha;Kim, Eung-Suk;Shim, Tae-Sun;Lim, Chae-Man;Lee, Sang-Do;Koh, Youn-Suck;Kim, Woo-Sung;Kim, Won-Dong;Kim, Dong-Soon
    • Tuberculosis and Respiratory Diseases
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    • v.52 no.6
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    • pp.597-607
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    • 2002
  • Background : Even though it is well known that pulmonary rehabilitation (PR) improves exercise capacity, and the quality of life, in patients with chronic lung diseases, not many patients can attend hospital based intensive PR in Korea. The purpose of this study was to develop a method for a home-based PR program, and study its effectiveness. Materials and Methods : Twenty patients with chronic lung diseases were randomly divided into two groups : a home PR group comprising of 10 male patients, with a mean age of 70 years, and a control group comprising of 10 male patients, with a mean age of 65 years. We developed exercise programs, depending on the exercise capacity of each patient, which were easy to do at home. The PR program consisted of a 12 week period of enforced aerobic (mostly walking) and muscle strengthening exercises, as prescribed by the exercise specialist, in accordance with the functional capacity of the patient. In addition to the education, nutritional and psychiatric consultation was undertaken, and respiratory muscle training arranged. Patients visited hospital every 2 weeks for evaluation and exercise prescription. Results : All patients finished the 12 week course of therapy. Following the home PR, the endurance times and work capacity of the upper and lower extremities were significantly increased in the treatment group in comparison to the controls. The six minute working (Eds note:should) 'working' read "walking"?) distance was increased from $465{\pm}60m$ to $508{\pm}37m$ and the maximal inspiratory pressure from $72.8{\pm}27.2cmH_2O$ to $91.4{\pm}30.9cmH_2O$. The quality of life, as assessed by St Georges Respiratory Questionnaire (SGRQ), was also improved following PR. (Eds note:do you have figures for before and after, and a reference for the SGRQ?i.e. for the main paper.) Conclusion : The home PR program we developed seemed to be applicable, and effective, to most of the patients with chronic lung diseases in this study.

A LONGITUDINAL STUDY OF THE ACHIEVEMENT AND EFFECTS OF THE SCIENTIFICALLY GIFTED STUDENTS WHO HAVE TAKEN A ULTRA HIGH SPEED ACCELERATED EDUCATION FOR THE EARLY ENTRANCE OF KAIST (KAIST 조기진학을 위해 초고속 속진학습을 받은 과학영재들의 성취정도와 효과에 대한 종단연구)

  • Yuk, Keun-Cheol;Moon, Jeong-Hwa
    • Journal of Gifted/Talented Education
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    • v.14 no.2
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    • pp.1-18
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    • 2004
  • This study attempted to survey the present status of the eight students who, 17 years from now, had participated in a special program for 170 days preparing for early entrance to the KAIST. With six students who responded to the questionnaire previously sent, the study focused on each participant's achievement at present, his evaluation on Accelerated Education, his personal opinions on early entrance to university and Gifted Science Education. From the survey, we could find out that three participants had received a doctorate and they are currently working as researchers at research center or professors at university. The other three participants are working as researchers at research center after receiving the M. S. Academic achievements vary according to each participant, but three of them, who ranked high in research achievement, had their articles published in international journals of the SCI level even when they were between 25 and 28 of age. Two of them in particular showed outstanding engineering and developing the commercial modem for IMT 2000 for the first time in Korea. One participant entered Harvard University to major in physics and afterwards studied the law in UCLA. He is now a professor in the law department. Concerning the evaluations on Accelerated Education and early entrance system, four participants answered positively while two participants expressed negative attitudes. When asked their opinions on the Gifted Education in Korea, such problems were pointed out as too much pressure of entering the first-class universities, the tendency to avoid choosing science-related major at universities, the lack of education system that encourages creative thinking, etc. It is necessary that the accelerated education play an important role to maximize their hidden potentials. It remains to be seen in what places these six participants will find themselves and of what ideas they will come up within the next 17 years. It will be worthwhile to wait until then for another survey.

Synthesis and Lubricating Properties of Succinic Acid Alkyl Ester Derivatives (숙신산 알킬 에스테르 유도체의 합성 및 윤활특성)

  • Baek, Seung-Yeob;Kim, Young-Wun;Chung, Keun-Wo;Yoo, Seung-Hyun;Park, Su-Jin
    • Applied Chemistry for Engineering
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    • v.22 no.2
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    • pp.196-202
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    • 2011
  • In this paper, a series of alkyl succinic acid esters for base oil were synthesized by condensation reaction of succinic anhydride and fatty alcohol. The structures of the synthesized esters were confirmed by $^1H-NMR$, FT-IR spectrum and GC analysis. Basic properties of esters such as kinematic viscosity (KV), refractive index (RI), total acid number (TAN) and pour points were measured and lubricating properties such as SRV wear scar diameter (SRV WSD), fraction coefficient (COF) and 4-ball wear (4-ball WSD) were also evaluated. As the results of basic properties, KV, RI and pour point of synthetic esters increased as the carbon chain of the esters increased. Measurement value of total acid number (TAN) was indicated between 0.2~4 mgKOH/g, and that metal working fluids and pressure working oils are acceptable to use as base oil. Also, lubricating properties of the esters showed as follows: 0.391~0.689 mm of SRV WSD, 0.110~0.138 of SRV COF and 0.49~0.55 mm of 4-ball WSD depended on the structure of the esters. In a comparison on the lubrication capacity of the SRV test based on polyester TMPTO, SRV WSD result showed that a better performance caused by the alkyl group. On the other hand, SRV COF test was not influenced of the alkyl group which the capacity of the lubricant was sightly diminished than the comparison material, regardless of the alkyl group.

An Experimental Study on the Myocardial Protection Effects of the Cardioplegic Solution (Cardioplegic Solution의 심근보호 효과에 관한 실험적 연구)

  • 이종국
    • Journal of Chest Surgery
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    • v.13 no.4
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    • pp.321-337
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    • 1980
  • The increasing use of cardioplegic solution for the reduction of ischemic tissue injury requires that all cardiplegic solution be carefully assessed for any protective or damaging properties. This study describes functional, enzymatic and structural assessment of the efficiency of three cardioplegic solutions (Young & GIK, Bretschneider, and $K^{+}$ Albumin solution) in a Modified Isolated Rat Heart Model of cardiopulmonary bypass and ischemic arrest. Isolated rat heart were subjected to a 2-minute period of coronary infusion with a cold cardioplegic or a noncardioplegic solution immediately before and also at the midpoint of a 60-minute period of hypothermic ($10{\pm}1$. C) ischemic cardiac arrest. The results of this study were as follow: 1. Spontaneous heart beat after ischemic arrest occured 16 seconds later after Langendorff reperfusion in the Young & GIK group (n=6), and 40 second later in the Bretschneider group (n=6) and 6 minute later in the $K^{+}$ Albumin group (n=6), and 16 minute later in the control group (non-cardioplegia). A good recovery state of spontaneous heart beat was shown in the Young & GIK and Bretschneider groups. 2. The percentage of recorveries of heart function at 30 minute after postischemic working heart perfusion were : heart rate $91.6{\pm}3.1$% (P<0.01)m oeaj airtuc oressyre $83{\pm}3$% (P<0.01), coronary flow $70{\pm}8$% (P<0.05) and aortic flow flow rate $39{\pm}9.3$% (P<0.05) in the Young & GIK group. This percentage of recoveries of the Young & GIK group was significantly greater than the control group. In the Bretschneider group, the percentage of recoveries were : heart rate $87.8{\pm}7.5$%(P<0.05), peak aortic pressure $71{\pm}2.3$% (P<0.05) and aortic flow rate $33.2{\pm}6.6$%(P<0.05). hte percentage of recoveries were significantly greater than in the control group. In the $K^{+}$ Albumin group, recoveries of heart function were poor. 3. Total CPK leakage was $131.2{\pm}12.75$IU/30 min/gm. dry weight in the control group, $50.65{\pm}12.75$IU in the Young & GIK gruop, $69.40{\pm}32.21$Iu in Bretschneider group, and $103.65{\pm}15.47$IU in the $K^{+}$ Albumin group during the 30 minute postischemic Langendorff reperfusion. Total CPK leakage was significantly less (P<0.001) in the Young & GIK group, than in the control group. 4. Direct correlatin between percentage recovery of aortic flow rate and total amount of CPK leakage from Myocardium was noticed.(Correlation Coefficient r = 0.76, P<0.001). 5. Mild perivascular edema was the only finding of light microscopic study of myocardium after 60 minute ischemic arrest with cold cardioplegic solutions and hypothermla.

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Environmental Auditing-Analysis of Enterprises (환경감사 - 기업분석)

  • Wotte, Joris
    • Journal of Environmental Impact Assessment
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    • v.4 no.3
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    • pp.9-13
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    • 1995
  • In July 1993 a new prescription of the EC was finished, concerning the voluntary participation of enterprises in a common auditing system. By this in the EC-member countries there must be founded centers of environmental auditing where experienced experts of environmental auditing should be accredited. These accredited experts are controllers for evaluating and certification of carried out environmental-auditings. An environmental-auditing practically represents an environmental assessment for an already existing enterprise with establishing corresponding programmes and strategies for the internal management to improve the environmental relations. Much experiences, which could be collected in the field of EIA during the last years may be transfered to this new task immediately. Only an essential difference there should not be overseen because of national legislation EIA in the defined cases must be carried out. By the EC-prescription carrying out an environmental-auditing for an enterprise is optional, it is recommended only. It was not introduced as a must. In spite of this fact because of the hard competition on the market there will be developed a pressure for the enterprises, to carry out such environmental-auditings. At present already a number of first projects in this direction can be seen, in the first line above all enterprises with the necessary economic power want to use this possibility, to gain better positions on the market. We have already gathered the first experiences in this field. We arranged corresponding contacts to several enterprises within the surroundings of Dresden. Within an opening discussion, where the project is explained and discussed with the management of the enterprise very detailed, the understanding, the readiness and the cooperation for the project are generated necessary prerequesits for the success of the whole work. By means of careful detail-work in collaboration with all departments and on all levels of the enterprise the total mass and energy-balances of the factory established and analysed. There are included also such ranges like material delivery, personal policy, public relations and sale as well as waste management. It is important that all people working in the factory have the feeling to be our partners, and not to have the impression to be checked or controled by an outside organization. This one of the most important factors of environmental auditing, in order to wake up and to develop a common interest on all sides. At the end of the environmental auditing there will be according to the prescription of the EC a catalogue of measures to do immediately, short time, mean time and long time for improvement of the environmental situation of the enterprise. All proposals are made in connection with a corresponding economic evaluation. These measures and programmes are declared as the environmental manual and are the basis for the work of the environmental management of the enterprise for the next three years. According to the EC-prescription, the enterprise with this environmental manual can get a corresponding certificate, which may be used for public relation purposes.

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InGaZnO active layer 두께에 따른 thin-film transistor 전기적인 영향

  • U, Chang-Ho;Kim, Yeong-Lee;An, Cheol-Hyeon;Kim, Dong-Chan;Gong, Bo-Hyeon;Bae, Yeong-Suk;Seo, Dong-Gyu;Jo, Hyeong-Gyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.5-5
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    • 2009
  • Thin-film-transistors (TFTs) that can be prepared at low temperatures have attracted much attention because of the great potential for transparent and flexible electronics. One of the mainstreams in this field is the use of organic semiconductors such as pentacene. But device performance of the organic TFTs is still limited due to low field-effect mobility and rapid degradation after exposing to air. Alternative approach is the use of amorphous oxide semiconductors as a channel. Amorphous oxide semiconductors (AOSs) based TFTs showed the fast technological development, because AOS films can be fabricated at room temperature and exhibit the possibility in application like flexible display, electronic paper, and larges solar cells. Among the various AOSs, a-IGZO has lots of advantages because it has high channel mobility, uniform surface roughness and good transparency. [1] The high mobility is attributed to the overlap of spherical s-orbital of the heavy post-transition metal cations. This study demonstrated the effect of the variation in channel thickness from 30nm to 200nm on the TFT device performance. When the thickness was increased, turn-on voltage and subthreshold swing was decreased. The a-IGZO channels and source/drain metals were deposited with shadow mask. The a-IGZO channel layer was deposited on $SiO_2$/p-Si substrates by RF magnetron sputtering, where RF power is 150W. And working pressure is 3m Torr, at $O_2/Ar$ (2/28 sccm) atmosphere. The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. Finally, Al (150nm) as a gate metal was thermal-evaporated. TFT devices were heat-treated in a furnace at 250 $^{\circ}C$ and nitrogen atmosphere for 1hour. The electrical properties of the TFTs were measured using a probe-station. The TFT with channel thickness of 150nm exhibits a good subthreshold swing (SS) of 0.72 V/decade and on-off ratio of $1{\times}10^8$. The field effect mobility and threshold voltage were evaluated as 7.2 and 8 V, respectively.

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투명 면상 발열체 응용을 위한 하이브리드 스퍼터 ITO / Ag / ITO 박막의 물성평가

  • Kim, Jae-Yeon;Park, So-Yun;Song, Pung-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.252-252
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    • 2016
  • 최근 학계나 산업계에서 indium tin oxide (ITO)의 높은 전기 전도도 및 광투과율을 이용하여 줄 발열을 기초로 하는 투명 면상 발열체에 대한 연구가 활발히 진행 되고 있다. 하지만 단일 ITO 박막으로 제작한 투명 면상 발열체는 온도가 상승함에 따라 균일하게 발열 되지 않으며, 글라스의 곡면 부분에서 유연성이 부족하여 크랙이 발생하는 다양한 문제점들을 가지고 있다. 이를 해결하기 위해 ITO의 결정화 온도 $160^{\circ}C$ 이상의 고온공정 또는 증착 후 열처리가 필요 하는 추가적인 공정이 필요하다. 따라서 본 연구에서는 단일 ITO 박막의 단점을 개선하는 ITO/Ag/ITO 하이브리드 구조의 투명 면상 발열체를 제작하여 전기적, 광학적 특성을 비교하고 발열량, 온도 균일성, 발열 유지 안정도를 조사하였다. 본 연구에서는 $50{\times}50mm$ 크기의 non-alkali glass (Corning E-2000) 기판 상에 마그네트론 스퍼터링 공정으로 상온에서 ITO/Ag/ITO 박막을 연속적으로 증착 하여 다층구조의 하이브리드 형 투명 면상 발열체를 제조하였다. 박막 증착 파워는 DC (Ag) power 100 W, RF (ITO) power 200 W로 하였으며 ITO박막두께는 40 nm로 고정 시키고 Ag박막 두께는 10 ~ 20 nm로 변화를 주었다. 증착원은 3인치 ITO 단일 타깃(SnO2, 10 wt.%)과 Ag 금속 타깃 (순도 99.99%)을 사용하였으며, 고순도 Ar을 이용하여 방전하였으며 총 주입량은 20 sccm, working pressure는 1.0 Pa을 유지하였다. 증착전 타깃 표면의 불순물 제거와 방전의 안정성을 유지하기 위해 10분간 pre-sputtering을 진행하고 증착하였다. 증착한 박막의 전기적, 광학적 특성은 각각 Hall-effect measurements system (ECOPIA, HMS3000), UV-Vis spectrophotometer (UV-1800, SHIMADZU)으로 측정하였으며, 하이브리드 표면의 구조 및 형상은 field emission-scanning electron microscopy (FE-SEM, Hitachi S-4800)으로 관찰하였다. 또한 투명 면상 발열체의 성능은 0.5 ~ 3 V/cm의 다양한 전압을 power supply (Keithly 2400, USA)를 통해서 시편 양 끝단에 인가한 후 시간에 따른 투명면상 발열체의 표면 온도변화를 infrared thermal imager (IR camera, Nikon)를 이용하여 관찰하였다. 하이브리드 구조를 가진 ITO박막의 두께는 40 nm로 고정 시키고 Ag박막의 두께는 10, 15, 20 nm로 변화를 주었다. 이들 박막의 면저항 값은 각각 5.3, 3.2, $2.1{\Omega}/{\Box}$였으며, 투과도는 각각 86.9, 81.7, 66.5 %였다. 이에 비해 두께 95 nm의 단일 ITO박막의 면저항 값은 $59.5{\Omega}/{\Box}$였으며, 투과도는 89.1 %였다. 하이브리드 구조의 전기적특성은 금속층의 두께가 증가할수록 캐리어 농도 값이 증가함에 따라 비저항 값이 감소되어 면저항 값도 감소된 것이며, 금속 삽입층의 전도특성이 비저항에 큰 영향을 주고 있음을 보여준다. 하지만 금속 층의 두께가 증가할수록 Ag층이 연속적인 막을 형성하여 반사율이 증가함에 따라 투과도가 감소하였다. 따라서 하이브리드 구조를 가진 투명 면상 발열체에 금속 삽입층의 두께 조절은 매우 중요한 인자임을 확인 할 수 있었다. 또한 발열성능을 평가 하기 위해 시편 양 끝단에 3 V전압을 인가한 결과, 금속 삽입층의 두께가 10 nm에서 5 nm씩 증가한 하이브리드 구조를 가진 투명면상 발열체의 최고 온도는 각각 98, 150, $167^{\circ}C$ 였으며, 단일 ITO의 최고 온도는 $32^{\circ}C$였다. 이 것은 동일한 두께 (95 nm)의 단일 ITO 박막과 비교하여 면저항이 낮은 하이브리드 박막의 발열량은 약 $120^{\circ}C$로 발열효율이 매우 우수한 것을 확인 할 수 있었다.

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A Study on the strengthening of Watching the Children's Musicals in the early childhood Education Institutions (유아교육기관에서의 뮤지컬 관람 실태와 활성화 개선 방안 연구)

  • Oh, Sun-Keun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.7
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    • pp.4441-4449
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    • 2015
  • The purpose of this study is to find out how children's musical is done in the early childhood education field. To find out the realities of children's musical watching, seek problems and way to improve, educationally new alternative, we selected subjects of study as follows. First, how children's musical of the early childhood education center is done? Second, how the education related children's musical of the early childhood education center is done? Third, what is the problem and way to improve of watching children's musical? To find out these, the result of the teachers(159 people) who are working the kidergarten and the early childhood education center is as follows. First, Children were very interested in watching musical and could get new, various experience and culture. Second, when watching musical, kindergarten and the early education center did pre-exploration everytime except same place. second, Of post-education activity, drawing activity related with musical content, story-making activity, developing to child's act are educationally effective. Third, whey watching musical, there is much pressure about danger and safety. So it is hard to control when children is moving. This significant result shows the importance of educational effects of the musical watching and the proposed expansion of the opportunity to experience a musical watching of the various educational approaches.

Yttrium 도핑 IGZO 채널층을 적용한 TFT 소자의 전기적, 안정성 특성 개선

  • Kim, Do-Yeong;Song, Pung-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.214.1-214.1
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    • 2015
  • Thin-film transistors (TFTs)의 채널층으로 널리 쓰이는 indium-gallium-zinc oxide (IGZO)는 높은 전자 이동도(약 10 cm2/Vs)를 나타내며 유기 발광 다이오드디스플레이(OLED)와 대면적 액정 디스플레이(LCD)에 필수적으로 사용되고 있다. 하지만, 이러한 재료는 우수한 TFT의 채널층의 특성을 가지는 반면, ZnO 기반 재료이기 때문에 소자 구동에서의 안정성은 가장 큰 문제로 남아있다. 따라서 최근, IGZO layer의 특성을 향상시키기 위한 연구가 다양한 방법으로 시도되고 있다. IGZO의 조성비를 조절하여 전기적 특성을 최적화거나 IGZO layer의 조성 중 Ga을 다른 금속 메탈로 대체하는 연구도 이루어지고 있다. 그러나 IGZO에 미량의 도펀트를 첨가하여 박막 특성 변화를 관찰한 연구는 거의 진행되지 않고 있다. 산화물 TFTs의 전기적 특성과 안정성은 산소 함량에 영향을 많이 받는 것으로 알려져 있으며, 더욱이 TFT 채널층으로 쓰이는 IGZO 박막의 고유한 산소 공공은 디바이스 작동 중 열적으로 활성화 되어 이온화 상태가 될 때 소자의 안정성을 저하시키는 것이 문제점으로 지적되고 있다. 그러므로 본 연구에서는 낮은 전기 음성도(1.22)와 표준전극전위(-2.372 V)를 가지며 산소와의 높은 본드 엔탈피 값(719.6 kJ/mol)을 가짐으로써 산소 공공생성을 억제할 것으로 기대되는 yttrium을 IGZO의 도펀트로 도입하였다. 따라서 본 연구에서는 Y-IGZO의 박막 특성 변화를 관찰하고자 한다. 본 연구에서는 magnetron co-sputtering법으로 IGZO 타깃(DC)과 Y2O3 타깃(RF)를 이용하여 기판 가열 없이 동시 방전을 이용해 non-alkali glass 기판 위에 증착 하였다. IGZO 타깃은 DC power 110 W으로 고정하였으며 Y2O3 타깃에는 RF Power를 50 W에서 110 W까지 증가시키면서 Y 도핑량을 조절하였다. Working pressure는 고 순도 Ar을 20 sccm 주입하여 0.7 Pa로 고정하였다. 모든 실험은 $50{\times}50mm$ 기판 위에 총 두께 $50nm{\pm}2$ 박막을 증착 하였으며, 그 함량에 따른 전기적 특성 및 광학적 특성을 살펴보았다. 또한, IGZO 박막 제조 시 박막의 안정화를 위해 열처리과정은 필수적이다. 하지만 본 연구에서는 열처리를 진행하지 않고 Y-IGZO의 안정성 개선 여부를 보기 위하여 20일 동안 상온에서 방치하여 그 전기적 특성변화를 관찰하였다. 나아가 Y-IGZO 채널 층을 갖는 TFT 소자를 제조하여 소자 구동 특성을 관찰 하였다. Y2O3 타깃에 가해지는 RF Power가 70 W 일 때 Y-IGZO박막은 IGZO박막과 비교하여 상대적으로 캐리어 밀도는 낮은 반면 이동도는 높은 최적 특성을 얻을 수 있었다. 상온방치 결과 Y-IGZO박막은 IGZO박막에 비해 전기적 특성 변화 폭이 적었으며 이것은 Y 도펀트에 의한 안정성 개선의 결과로 예상된다. 투과도는 Y 도핑에 의하여 약 1.6 % 정도 상승하였으며 밴드 갭 내에서 결함 준위로 작용하는 산소공공의 억제로 인한 결과로 판단된다.

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Effects of thickness of GIZO active layer on device performance in oxide thin-film-transistors

  • Woo, C.H.;Jang, G.J.;Kim, Y.H.;Kong, B.H.;Cho, H.K.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.137-137
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    • 2009
  • Thin-film transistors (TFTs) that can be prepared at low temperatures have attracted much attention due to the great potential for flexible electronics. One of the mainstreams in this field is the use of organic semiconductors such as pentacene. But device performance of the organic TFTs is still limited by low field effect mobility or rapidly degraded after exposing to air in many cases. Another approach is amorphous oxide semiconductors. Amorphous oxide semiconductors (AOSs) have exactly attracted considerable attention because AOSs were fabricated at room temperature and used lots of application such as flexible display, electronic paper, large solar cells. Among the various AOSs, a-IGZO was considerable material because it has high mobility and uniform surface and good transparent. The high mobility is attributed to the result of the overlap of spherical s-orbital of the heavy pest-transition metal cations. This study is demonstrated the effect of thickness channel layer from 30nm to 200nm. when the thickness was increased, turn on voltage and subthreshold swing were decreased. a-IGZO TFTs have used a shadow mask to deposit channel and source/drain(S/D). a-IGZO were deposited on SiO2 wafer by rf magnetron sputtering. using power is 150W, working pressure is 3m Torr, and an O2/Ar(2/28 SCCM) atmosphere at room temperature. The electrodes were formed with Electron-beam evaporated Ti(30nm) and Au(70nm) structure. Finally, Al(150nm) as a gate metal was evaporated. TFT devices were heat treated in a furnace at $250^{\circ}C$ in nitrogen atmosphere for an hour. The electrical properties of the TFTs were measured using a probe-station to measure I-V characteristic. TFT whose thickness was 150nm exhibits a good subthreshold swing(S) of 0.72 V/decade and high on-off ratio of 1E+08. Field effect mobility, saturation effect mobility, and threshold voltage were evaluated 7.2, 5.8, 8V respectively.

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