• 한국진공학회지
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• 제11권1호
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• pp.1-7
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• 2002

RF Magnetron Sputtering 방법으로 $Ba_{0.5}Sr_{0.5}TiO_3$ 박막을 Pt/Ti/$SiO_2$/Si 기판위에 증착하였다. $Ba_{0.5}Sr_{0.5}TiO_3$ 박막 증착시 기판온도는 실온으로 고정시켜주었고, 작업 가스 유량(Ar:$O_2$)과 RF Power는 각각 90:10에서 60:40까지 그리고 50 W와 75 W로 하였다. 또한 박막 증착 후 RTA(Rapid Thermal Annealing)를 이용하여 산소분위기에서 $600^{\circ}C$로 고온 순간 열처리를 하였다. 커패시터 제작을 위해 UHV System의 E-beam evaporator를 이용하여 Pt를 증착하였다. XRD 측정을 통한 구조적 특성에서는 작업 가스 유량과 RF Power에 비해 고온 순간 열처리가 결정화에 기여도가 큼을 확인할 수 있었다. 전기적 특성에서는 RF Power가 50 W이고 열처리를 한 샘플에서 비교적 우수한 특성을 보여주었다.

• 한국시뮬레이션학회논문지
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• 제6권2호
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• pp.1-14
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• 1997

The characteristics of the flow and energy conversion in OMACON liquid-metal MHD system are investigated. Numerical simulation of two-phase flow in the OMACON system without magnetic field was carried out by the Phoenics code and the energy conversion characteristics are studied in association with the fact that the mechanical energy loss at the nozzle of the OMACON system are to be converted into electrical energy. In this system, working fluid (gas) is injected through the mixer located at the bottom of the riser, and is mixed with hot liquid metal. Therefore in the riser two-phase flow is developed under the influence of the gravity. In this study, the interaction between the gas and liquid is considered by the use of IPSA(InterPhase Slip Algorithm) where standard drag coefficient has been used. It has been assumed that in the flow regime the liquid is continuous and the gas is dispersed. For the liquid and gas, the continuity equations, momentum equations and energy equations are solved respectively in association with void fraction in the flow field. In order to calculate the energy conversion efficiency, firstly the ratio of the mechanical energy loss of liquid metal flow at the nozzle to the input thermal energy is considered. Secondly flow pattern of liquid metal in the generator has been analyzed, and the characteristics of the conversion of the mechanical energy into the electrical energy has been investigated. For an representative case where Hartmann number is 540 and magnetic field is 0.35 T, the present analysis shows that the energy conversion efficiency is 0.653. This result is considered to be reasonable in comparison with published experimental results.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2003년도 학술대회지
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• pp.241-247
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• 2003

The sealing performance of O-ring is effected in environments of the O-ring seal, like that applied pressure, working temperature, pre-compressed ratio and materials. In this paper, design of composite O-ring under pressurized, compressed was optimized based on Taguchi experimental design method. and it analysed numerically using non-linear finite element method. Ogden model in which is developed based on the experimental data is used for simulating the contact stress and strain in NBR and PTFE materials. Sensitivity analysis was performed with FEM results, which are contact stress, strain and temperature as variable.

• 한국초전도ㆍ저온공학회논문지
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• 제1권1호
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• pp.48-55
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• 1999

thermodynamic cycle analysis has been performed for the power generation systems to utilize the cold energy of liquefied natural gas (LNG). The power cycle used the air or water at room temperature as a heat source and the LNG at cryogenic temperature as a heat sink. Among manypossible configurations of the cycle. the open Rankine cycle. and the closed Brayton cycle, and the closed Rankine cycle are selected for the basic analysis because of their practical importance. The power output per unit mass of LNG has been analytically calculated for various design parameters such as the pressure ratio. the mass flow rate. the adiabatic efficiency. the heat exchanger effectiveness. or the working fluid. The optimal conditions for the parameters are presented to maximize the power output and the design considerations are discussed. It is concluded that the open Rankine cycle is the most recormmendable both in thermodynamic efficency and in practice.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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• pp.10-14
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• 2005

Zinc Oxide(ZnO) thin films on Si (100) substrates were deposited by RF magnetron reactive sputtering. The characteristics of zinc oxide thin films with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance were investigated. To analyze a crystallographic properties of the films, $\theta/2{\theta}$ mode X -ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity, and surface roughness highly depended on Ar/$O_2$ gas ratios. The resistivity of ZnO thin films rapidly increased with increasing oxygen ratio and the resistivity value of $9{\times}10^7\;{\Omega}cm$ was obtained at a working pressure of 10 mTorr with Ar/$O_2$=50/50. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with Ar/$O_2$=50/50 showed the excellent roughness value of $28.7{\AA}$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.124-130
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• 2003

Zinc Oxide(ZnO) thin films on Si (100) substrate were deposited by RF magnetron sputter with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance. To analyze a crystallographic properties of the films, $\theta/2\theta$ mode X-ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity. and surface roughness highly depended on $Ar/O_2$ gas ratios. The resistivity of ZnO thin films rapidly increased with increasing oxygen ratio and the resistivity value of $9{\times}10^7{\Omega}cm$ was obtained at a working pressure of 10 mTorr with $Ar/O_2$=50/50. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with $Ar/O_2$=50/50 showed the excellent roughness value of $28.7{\AA}$.

• 설비공학논문집
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• 제17권6호
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• pp.536-543
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• 2005

This study analyzes the design performance of a combined system of a recuperated cycle micro gas turbine (MGT) and a bottoming organic Rankine cycle (ORC) adopting refrigerant (R123) as a working fluid. In contrast to the steam bottoming Rankine cycle, the ORC optimizes the combined system efficiency at a higher evaporating pressure. The ORC recovers much greater MGT exhaust heat than the steam Rankine cycle (much lower stack temperature), resulting in a greater bottoming cycle power and thus a higher combined system efficiency. The optimum MGT pressure ratio of the combined system is very close to the optimum pressure ratio of the MGT itself. The ORC's power amounts to about $25\%$ of MGT power. For the MGT turbine inlet temperature of $950^{\circ}C$ or higher, the combined system efficiency, based on shaft power, can be higher than $45\%$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.220-220
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• 2011

The Ne-Xe plasmas in dense plasma-focus device with coaxial electrodes were generated for extreme ultraviolet (EUV) lithography. The influence of gas mixture ratio, Ne-Xe (1, 10, 15, 20, 25, 30, 50%) mixture gas, on EUV emission measurement, EUV intensity and electron temperature in the coaxially focused plasma were investigated. An input voltage of 4.5 kV was applied to the capacitor bank of 1.53mF and the diode chamber was filled with Ne-Xe mixture gas at a prescribed pressure. The inner surface of the cylindrical cathode was lined by an acetal insulator. The anode was made of tin metal. The EUV emission signal of the wavelength in the range of 6~16 nm has been detected by a photo-detector (AXUV-100 Zr/C, IRD). The visible emission line was also detected by the composite-grating spectrometer of the working wavelength range of 200~1100 nm (HR 4000CG). The electron temperature is obtained by the optical emission spectroscopy (OES) and measured by the Boltzmann plot with the assumption of local thermodynamic equilibrium (LTE).

• 한국추진공학회지
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• 제11권4호
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• pp.59-66
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• 2007

부분분사비에 따른 초음속 충동형 터빈 성능변화에 대하여 실험적 연구를 수행하였다. 실험은 개방형액체로켓 엔진의 터보펌프에 사용되는 터빈을 이용하였으며 부분분사비 조절을 위해 실험용 노즐블럭을 설계/제작하였다. 실험에 사용된 터빈은 축대칭 수축-확산형 노즐을 갖고 있으며 작동노즐의 개수조절을 통해 부분분사비를 변화시켰다. 작동유체는 고압공기를 사용하였다. 실험결과 초음속 충동형 축류터빈은 부분분사비 변화에 따른 성능변화가 크지 않은 것으로 나타났다.

• 한국수소및신에너지학회논문집
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• 제27권1호
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• pp.83-94
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• 2016

Performance of absorbent for post-combustion $CO_2$ capture was measured and discussed. Fully saturated fresh absorbent (P2-15F) and absorbents sampled from absorption and regeneration reactor of continuous $CO_2$ capture process, P2-15A, P2-15R, respectively, were used as representative absorbents. Small scale fluidized bed reactor (0.05 m I.D., 0.8 m high) which can measure exhaust gas concentration and weight change simultaneously was used to analyze regeneration characteristics for those absorbents. Exhausted moles of $CO_2$ and $H_2O$ were measured with increasing temperature. $H_2O/CO$ ratio and working capacity were determined and discussed to confirm reason of reactivity decay after continuous operation. Moreover, possibility of side reaction was checked based on the $H_2O/CO_2$ mole ratio. Finally, suitable regeneration temperature range was confirmed based on the trend of working capacity with temperature.