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유도 결합 플라즈마를 이용한 ITO박막의 특성 연구

  • 위재형;우종창;엄두승;양설;주영희;박정수;허경무;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.209-209
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    • 2009
  • ITO 박막은 박막 태양전지, 유기 태양전지뿐만 아니라 유연한 디스플레이, 발광다이오드와 같은 광학적 장치에 투명한 전극으로써 널리 사용된다. 글라스나 플라스틱 기판위에 형성된 투명 전극은 식각을 통하여 전기회로를 구성한다. 또한 식각 특성을 개선할 필요가 있다. 이 연구에서 우리는 유리 기판위에 코팅된 ITO 박막을 유도결합 $BCl_3/Ar$ 플라즈마를 이용하여 식각하였다. ITO 박막은 RF 마그네트론 스퍼터링을 사용해 200 $^{\circ}C$에서 비알칼리 글라스 위에 증착하였고 ITO 박막의 총 두께는 약 250 nm 이었다. 또한 전기 전도성은 $4.483{\times}10^{-4}{\Omega}cm$, 캐리어 농도는 $3.923{\times}10^{20}cm^{-3}$이고, 홀 이동도는 $3.545{\times}10cm^{-2}/Vs$이었다. Ar 플라즈마에 $BCl_3$ 가스를 첨가시키면서 가스 비율에 따른 ITO의 식각 속도와 ITO와 PR과의 선택비를 측정하였다. 최대 식각 속도는 $BCl_3$(25%)/Ar(75%), 500 W의 RF power, -200 V의 DC-bias voltage, 그리고 2 pa의 공정압력일 때 588 nm/min이었고 선택비는 0.43으로 다소 낮게 측정되었다. 식각된 표면의 화학적 반응은 엑스선 광전자 분광법 (X-ray Photoelectron Spectroscopy)을 사용해 조사되었다. 그리고 식각된 표면의 거칠기는 원자현미경 (Atomic Force Microscopy)을 사용해 측정하였다.

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$BCl_3/Ar/Cl_2$ 유도결합 플라즈마를 이용한 ZnO 박막의 식각특성 연구 (Etch characteristics of ZnO thin films using an inductively coupled plasma)

  • 우종창;엄두승;양설;허경무;박정수;하태경;위재형;주영희;김동표;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.135-136
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    • 2009
  • The etching characteristics of Zinc Oxide (ZnO) and etch selectivity of ZnO to $SiO_2$ in $BCl_3/Ar/Cl_2$ plasma were investigated. It was found that ZnO etch rate shows a non-monotonic behavior with increasing both Ar fraction in $BCl_3$ plasma, RF power, and gas pressure. The maximum ZnO etch rate of 53 nm/min was obtained for $BCl_3$(16 sccm)/Ar(4 sccm)/$Cl_2$(3 sccm) gas mixture. The chemical state of etched surfaces was investigated with X-ray photoelectron spectroscopy (XPS). From these data, the suggestions on the ZnO etch mechanism were made.

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Expression of HERV-HX2 in Cancer Cells and Human Embryonic Stem Cells

  • Jung, Hyun-Min;Choi, Seoung-Jun;Kim, Se-Hee;Moon, Sung-Hwan;Yoo, Jung-Ki;Chung, Hyung-Min;Kim, Jin-Kyeoung
    • Reproductive and Developmental Biology
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    • 제32권2호
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    • pp.105-110
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    • 2008
  • The endogenous retrovirus-like elements (HERVs) found on several human chromosomes are somehow involved in gene regulation, especially during the transcription level. HERV-H, located on chromosome Xp22, may regulate gastrin-releasing peptide receptor (GRPR) in connection with diverse diseases. By suppression subtractive hybridization screen on SV40-immortalized lung fibroblast (WI-38 VA-13), we discovered that expression of HERV-HX2, a clustered HERV-H sequence on chromosome X, was upregulated in immortalized lung cells, compared to that of normal cells. Expression of HERV-HX2 was then analyzed in various cell lines, including normal somatic cells, cancer cells, SV40-immortalized cells, and undifferentiated and differentiated human embryonic stem cells. Expression of HERV-HX2 was specifically upregulated in continuously-dividing cells, such as cancer cells and SV40-immortalized cells. Especially, HERV-HX2 in HeLa cells was highly upregulated during the S phase of the cell cycle. Similar results were obtained in hES cells, in which undifferentiated cells expressed more HERV-HX2 mRNA than differentiated hES cells, including neural precursor and endothelial progenitor cells. Taken together, our results suggest that HERV-HX2 is upregulated in cancer cells and undifferentiated hES cells, whereas downregulated as differentiation progress. Therefore, we assume that HERV-HX2 may playa role on proliferation of cancer cells as well as differentiation of hES cells in the transcriptional level.

협척혈(夾脊穴)에 전침(電鍼)을 이용한 척추전방전위증 환자에 대한 임상적 고찰 (The Clinical Study of Electroacupuncture Treatment at Hua-Tuo-Jia-Ji-Xue on Spondylolisthesis)

  • 정영표;정효근;강수우;위준;윤여충;채우석;위통순
    • Journal of Acupuncture Research
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    • 제25권1호
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    • pp.221-232
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    • 2008
  • Objectives : The study was performed to evaluate the effect of treatment for spondylolisthesis by using electroacupuncture at Hua-Tuo-Jia-Ji-Xue is located about 0.5Cun(寸) at both sides of spinous process of each vertebra. Methods : This clinical study was carried out 5 case with spondylolisthesis, who had bean treated from December, 2006 to November, 2007, in the department of acupuncture and moxibustion, Dongshin University Oriental Medical Hospital. We treated the patient who was diagnosed as spondylolisthesis by simple X-ray or MRI. Results : 1. Degenerative type is 3 cases, and isthmic type is 2 cases. 2. In the distribution of injured level was between 4-5th lumbar vertebra the most(3 cases). 3. The improvement index showed 0.29, 0.56, 0.43 points in degerative type, and 0.39, 0.36 points in isthmic type. 4. Therapeutic efforts above "good" by Kim's criteria was 4 cases. 5. Good improvement was showed in VAS about average 3.4. Conclusions : There was reports about Hua-Tuo-Jia-Ji-Xue electronic acupuncture treatment of patients with spondylolisthesis. It is very effective to improve condition of patients with spondylolisthesis.

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한국 사춘기 소녀들의 골밀도와 환경요인들과의 관계(I) (The Relationship Between Bone Mineral Density and The Environmental Factors in Korean Pubescent Girls)

  • 최미자
    • 동아시아식생활학회지
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    • 제4권3호
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    • pp.21-30
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    • 1994
  • The relationship between bone mineral density and the environmental factors were investigated from the view point of preventing osteoporosis in Korean pubescent girls. The effects of calcium, nutrient intake, physical activity on total bone mineral density, lumbar spine and femoral bone mineral density and total bone mineral content were evaluated 33 healthy pubescent girls aged 14∼16y. A convenient method was used to assess nutritional and energy intake and calcium index was used together. Calcium intake in childhood was estimated by asking whether subjects usually drank milk as children. Eating habits data and history of menstruation were obtained by questionnaire and interview. Average energy expenditure was calculated. Bone mineral density and content were measured by dual energy x-ray absorptiometry using a Lunar DPX+Scanner (Lunar, Madison, WI). The lumbar spine(L2∼L4) and three sites in the proximal femur (femoral neck, trochanteric region, and Ward's triangle)were measured. Height and weight were measured, and the body mass index(BMI) was derived from the formula : BMI=kg/㎡ Statistical analysis was performed by simple correlation using the SAS package. The mean calcium intake (736mg) was below the RDA of 800mg/d. Twelve percent of the total subjects did not drink milk at all because they did not like the taste. Skipping meals, low calcium intake and low energy intake were significantly correlated with the low BMD. Also the data indicate that girls who reported drinking milk with every meal during childhood had significantly higher bone densities than girls who reported drinking milk less frequently. The results suggest that milk consumption in childhood appears to be needed not only for growth and development, but possibly also to assure an optimal peak of bone mass and thus greater latitude for the maintenance or skeletal integrity in the face of bone losses. There was a highly significant correlation between the total BMD and overall level of physical activity. Body weight was a better predictor of total BMD than was and other factor. Simple mechanical loading may explain why body weight, but total BMC was positively relatd to height. Conclusively, increasing calcium intake and physical activity in the pubescent girls could influence BMD.

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유리섬유 제조업체 근로자의 건강장해 (Medical Surveillance of Glass Fiber Workers in Korea)

  • 이세휘;김규상;최정근;김양호;강성규;최경숙;문영한
    • Journal of Preventive Medicine and Public Health
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    • 제29권2호
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    • pp.187-198
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    • 1996
  • The industrial use of MMMF(man-made mineral fibers), has been increasing, particularly since the banning of most asbestos products. Fibrous minerals can cause health abnormalities currently associated with occupational exposure to glass fiber. This study was conducted to evaluate health risks of glass fiber manufactory workers within the country. We examined questionaries, physical examination including auscultation, chest x-ray, pulmonary function test for 488 male workers, to go through their dermal itching symptoms and respiratory evaluation. we had the results as follows. 1. In 45% of the workers itching had been expressed at their entrance. At that time we was investigating, 18.5% had itching, and most of them complained it when they fall asleep and night. The Sequent itching site is waist and groin, upper and lower extremity in order, and it had been expressed mainly during summer and winter. 2. As the results of ventilatory functions test, 6.0% were obstructive type, 1.0% were restrictive type. So, glass fiber exposures should be controlled or elimination by protective devices in the workplace. 3. The means of FVC, $FEV_1,\;FEV_1%$ were in normal range. As the comparison of ventilatory functions by age groups, MMF was decreased significantly for the group, 50 years old and more than other groups. And the comparison by the serving periods at glass fiber producing factory, MMF was decreased for the workers had worked for $11\sim15$ years. Therefore, MMF be more sensitive index in the evaluation of ventilatory impairments caused by glass fiber workers.

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Effect of Soy Protein and Exercise on Bone Mineral Density and Bone Mineral Content in Growing Male Rats

  • Park, Mi-Ja
    • Journal of Community Nutrition
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    • 제6권1호
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    • pp.48-54
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    • 2004
  • The purpose of this study was to examine the effects of dietary protein and exercise on bone mineral density and bone mineral content of growing male rats. Forty male, Sprague-Dawley rats(age 21 days) were assigned to four groups that underwent 9 weeks of experimental treatment. Animals were assigned to one of two exercise treatments (treadmill running or sedentary). The exercise and nonexercise group were fed a diet containing casein or soy with rich isoflavones (3.4mg/g protein). The exercise group ran on a rodent treadmill(speed of 15m/min for 30min) three days per week during the 9-week study period. All rats were fed an experimental diet and deionized water ad libitum for 9 weeks. Total bone mineral density (BMD), total bone mineral content (BMC), total body calcium, spine BMD and BMC, and femur BMD and BMC were determined by using dual energy x-ray absorptiometry (FIXI-mus, GE Lunar Radiation Cooperation, Madison, WI, USA). The soy diet group appears to have a significantly higher total BMD/weight and total BMC/ weight, spine BMD/weight, spine BMC/weight, femur BMD/weight and femur BMC/weight compared to the casein group in nonexercise and exercise. The exercise group had significantly greater total BMD/weight and BMC/ weight, spine BMD/weight and BMC/weight, femur BMD/weight and BMC/weight compared to the nonexercise group when the protein source was casein. The exercise combined soy group had significantly greater total BMD/weight and BMC/weight, spine BMD/weight and BMC/weight, femur BMD/weight and BMC/weight, compared to the exercise combined casein group. The results indicate that exercise had a positive influence on bone mineral density and bone mineral content and soy significantly affect on bone mineral density and bone mineral content for the 9 weeks experimental period. It can be concluded that exercise combined with a soy diet is most beneficial for acquisition of spine bone mineral density in young growing male rats. This convincing evidence suggests that a change in life style such as increasing exercise and consumption of soy protein is a practical strategy for significantly reducing the incidence of osteoporosis.

초기결함을 갖는 철근 콘크리트 축대칭 쉘의 동적 특성 -돔의 결함의 영향을 중심으로- (Dynamic Characteristics of Reinforced Concrete Axisymmetric Shell with Initial Imperfection)

  • 조진구
    • 한국농공학회지
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    • 제41권4호
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    • pp.77-85
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    • 1999
  • In this study, a computer program considering initial imperfection of axisymmetric reinforced concrete shell which plastic deformation by large external loading was developed . Initial imperfection of dome was assumed as 'dimple type' which can be expressed as Wi=(Wo/h)(1-x$^2$)$^3$. The developed model applied to the analysis of dynamic response of axisymmetric reinforced concrete shell when it has initial imperfection. The initial imperfection of 0.0, -5.0, and 5cm and steel and steel layer ratio 0,3, and 5% were tested for numerical examples . The results can be summarized as follows ; 1. Dynmaic response of vertical deflection at dome crown showed slow increased if it has not inital imperfection . But the response showed relatively high amplitude when initial imperfection was inner directed (opposite direction to loading). Similar trends also appeared for different steel layer ratios. 2. Dynamic responses of radial displacement at the junction of dome and wall showed the highest amplitude when initial imperfection was inward directed (opposite direction to loading). The lowest amplitude occurred when initial imperfection was outward directed (same direction to loading). Vibration period also delayed for inward directed initial imperfection . These trends were obvious as steel layer ratio increasing. 3. The effects of imperfection for the dynamic response of radial displacement a the center of wall scarely appeared. The effects of initial imperfection of dome on the dynmaic response of the wall can be neglected. 4. Effect of steel on the dynmic response of axisymmetric shell structure was great when initial imperfection did not exist. And the effect of direction of initial imperfection (inward or outward) did not show big difference.

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Dry Etching of ITO Thin Films by the Addition of Gases in Cl2/BCl3 Inductivity Coupled Plasma

  • Joo, Young-Hee;Woo, Jong-Chang;Choi, Kyung-Rok;Kim, Han-Soo;Wi, Jae-Hyung;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • 제13권3호
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    • pp.157-161
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    • 2012
  • In this study, we investigated the etching characteristics of ITO thin films and the effects of inert gases added to $Cl_2/BCl_3$ inductivity coupled plasma. The maximum etch rate of ITO thin film was 130.0 nm/min upon the addition of Ar (6 sccm) to the $Cl_2/BCl_3$ (4:16 sccm) plasma, which was higher than that with He or $N_2$ added to the plasma. The ion bombardment by $Ar^+$ sputtering was due to the relatively low volatility of the by-products formed in the $Cl_2/BCl_3$ (4:16 sccm) plasma. The surface of the etched ITO thin film was characterized by x-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). From the XPS results, it is concluded that the proper addition of Ar and He to the $Cl_2/BCl_3$ plasma removes carbon and by-products from the surface of the etched ITO thin film.

혐기성 세균 Ruminococcus albus F-40에 의한 목재 cellulose의 분해특성 (Degradation Characteristics of Wood Cellulose by Ruminal Cellulolytic Anaerobic Bacterium Ruminococcus albus F-40)

  • 김윤수;위승곤;명규호
    • Journal of the Korean Wood Science and Technology
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    • 제25권3호
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    • pp.83-95
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    • 1997
  • The degradation mode of lignocellulose by anaerobic ruminal cellulolytic bacterium Ruminococcus albus F-40 was investigated. Birchwood holocellulose and filter paper were incubated as the sole carbohydrate sources with using the Hungate techniques. After 2 or 4 days of incubation, samples were employed for chemical and electron microscopic evaluations. The degradation rate of cellulosic substrates and the adhesion rate of bacteria to the substrates increased proportionally with the decrease of relative crystallinity of cellulose, indicating the preferential breakdown of amorphous cellulose, by this bacterium. X-ray diffraction analyses and polarized light microscopy showed, however, that crystalline cellulose was also degraded by R. albus. FT-IR spectra indicated that not only cellulose but hemicellulose was also degraded by this bacterium. Electron microscopic investigations showed the protuberant structures on the surface of R. albus. These structures were much more significant when bacterial cells were grown in the media containing insoluble substrates, such as cellulose, indicating clearly that bacterial protuberant structures were induced by the substrates. Protuberant structures extended from the bacterial cells adhered tightly to the substrates and numerous vesicles covered the surface of cellulosic substrates affected. Cellulosome-like structures were distributed on the cellulose matrix. Electron microscopic works showed that diverse surface organells of R. albus were involved in the degradation of cellulosic materials. SEM examinations showed the breakdown of cellulose by R. albus was proceeded by severeal routes : short fiber formation, defibrillation and destrafication of cellulose microfibril.

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