• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.4
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• pp.650-656
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• 2018

The TFT-LCD industry is a kind of large-scale industrial Giant Microelectronics device industry and has a similar semiconductor process technology. Wet etching forms a relatively large proportion of the entire TFT process, but the number of published research papers on this topic is limited. The main reason for this is that the components of the etchant, in which the reaction takes place, are confidential and rarely publicized. Aluminum (Al) and copper (Cu), which have been used in recent years for the manufacture of large area LCDs, are very difficult materials to process using wet etching. Cu, a low-resistance material, can only be used in the wet etching process, and is used as a substitute for Al due to its high speed etching, low failure rate, and low power consumption. Further, the abnormal reaction of hydrogen peroxide ($H_2O_2$), which is used as an etching solution, requires additional piping and electrical safety devices. This paper proposes a method of minimizing the damage to the plant in the case of adverse reactions, though it cannot limit the adverse reaction of hydrogen peroxide. In recent years, there have been many cases in which aluminum etching equipment has been changed to copper. This paper presents a countermeasure against abnormal reactions by implementing safety PLC with a high safety grade.

• Food Engineering Progress
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• v.13 no.4
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• pp.269-274
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• 2009

The main objective of this study was to establish optimum condition of wet grinding process for manufacturing microparticulated seaweed calcium. Process parameters such as concentration of forming agent, rotor speed, bead size, feed rate, and grinding time were adapted during wet-grinding of seaweed calcium. The particle size range of the raw seaweed calcium was 10-20 $\mu$m. The calcium particles were reduced to under 1 $\mu$m as nano scale after grinding. Gum arabic was suitable for forming agent and 5%(w/v) concentration was the most effective in grinding efficiency. A wet-grinding process operated at 4,000 rpm rotor speed, 0,4 mm bead size, and 0.4 L/hr feeding rate, respectively, produced less than 600 mm(>>90%)-sized particles. In batch systems, 8 cycles of grinding showed higher efficiency, but 20 min of grinding time in continuous processing was more efficient to reduce particle size than the batch processing. Based on the result, the optimum conditions of the wet grinding process were established: operation time of 20 minutes, rotor speed of 4,000 rpm, bead size of 0.4 mm, feed rate of 40 mL/min and 30% mixing ration with water. The size of the resulting ultra fine calcium particles ranged between 40 and 660 mm.

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.665-670
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• 2001

The purpose of this study is to develop a new type dryer, which is to proceed mixing and drying of wet-materials at the same time and drying process is carried out in a closed system. In this drying system, thermal contact occurs, when a fluidized zone is created by paddle mechanism. Accordingly, wet-materials is dried in a short time without any damage. Also wet-materials could be dried uniformly to low moisture contents. It is suitable to dry a small quantity of multi-kind materials. And drying process is carried out in a closed system, so as for environmental pollution dust not to be emitted into the atmosphere. Accordingly, it could be used to dry not only food and chemical materials, but also environmental pollution materials.

• Journal of the Korean Ceramic Society
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• v.22 no.2
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• pp.39-43
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• 1985

This study presents the results of an overall effort to detemine the applicability of the chemical wet process informing lead titanate electronic ceramics. Although pure lead titanate has not proven to be an important technological materials when prepared via conventional processing procedures this work is interesting as a study of chemical wet processing and a way of preparing pbTiO3 for study. The result obtained from this experiment were as follows ; Optimum synthesis condition which synthesize PbTiO3 by chemical wet process was obtained by firing at 50$0^{\circ}C$ after mixing $Pb(OH)_2$- gel and $Ti(OH)_4$ -gel at 7$0^{\circ}C$ for 4 hours.

• Textile Coloration and Finishing
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• v.14 no.3
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• pp.53-58
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• 2002

Cotton fabric was treated with TiO$_2$-PEG600 mixed solution by pad-dry-cure and wet-fixation process to improve the performance properties as well as antibiosis effect and its laundering durability. In this paper, the effects of concentration of $TiO_2/PEG$ and fixation process were investigated on laundering durability and properties of cotton fabric treated with glyoxal. As the concentration of $TiO_2/PEG$ increased fixation, W.I., K/S of treated cotton fabric increased. Application of wet-fixation method provided a further improvement in fixation, laundering durability of treated cotton fabric.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.34 no.4
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• pp.1-6
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• 2002

In order to simulate the actual wet-end process in papermachine, RDA, a novel handsheet former, was used and following results were obtained. While the addition of polyelectrolytes gives significant effect on fiber flocculation, increase of stock consistency influenced on the formation of RDA sheets greatly. In particular, the consistency increase from 0.3 % to 0.4% abruptly increased floe size of RDA sheet and it results in severe deterioration of paper strength. Stock consistency, therefore, should be regarded as the most important factor in the formation simulation with RDA and should be controlled as the first sequence of tuning the operating conditions of RDA to simulate correctly the target machine paper's formation.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.32-38
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• 2004

Laser-induced thermochemical wet etching of titanium in phosphoric acid has been investigated to examine the feasibility of this method fur fabrication of microstructures. Cutting, drilling, and milling of titanium foil were carried out while examining the influence of process parameters on etch width, etch depth, and edge straightness. Laser power, scanning speed of workpiece, and etchant concentration were chosen as major process parameters influencing on temperature distribution and reaction rate. Etch width increased almost linearly with laser power showing little dependence on scanning speed while etch depth showed wide variation with both laser power and scanning speed. A well-defined etch profile with good surface quality was obtained at high concentration condition. Fabrication of a hole, micro cantilever beam, and rectangular slot with dimension of tess than 100${\mu}{\textrm}{m}$ has been demonstrated.

• Journal of Mechanical Science and Technology
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• v.18 no.12
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• pp.2294-2302
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• 2004

The objective of this study is to obtain detailed information for the micro fabrication of lead frames by applying spray technology to wet etching process. Wet etching experiments were performed with different etching parameters such as injection pressure, distance from nozzle tip to etched substrate, nozzle pitch and etchant temperature. The characteristics of single and twin spray were measured to investigate the correlation between the spray characteristics and the etching characteristics. Drop size and velocity were measured by Phase-Doppler Anemometer (PDA). Four liquids of different viscosity were used to reveal the effects of viscosity on the spray characteristics. The results indicated that the shorter the distance from nozzle tip and the nozzle pitch, the larger etching factor became. The average etching factor had good positive correlation with average axial velocity and impact force. It was found that the etching characteristics depended strongly on the spray characteristics.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.3 no.4
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• pp.29-36
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• 2004

An experimental study on drilling of stainless steel is conducted using TiAlN coated drills and HSS twist drills with several cutting conditions; feed rate, spindle rotational speed, and dry/wet cutting. The effects of number of hole on the thrust force are examined by cutting force measurement. The flank wear of the drills and the change of hole diameter are quantitatively observed using a vision system. It is found that the thrust force in drilling with TiAlN coated drills decrease under dry and wet machining, whereas the flank wear resistance is improved.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.7
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• pp.842-849
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• 2004

The objective of this work is to study the improvement of etching characteristics in wet etching process. The etching characteristics such as etching factor were investigated under different etching conditions and compared with the spray characteristics. The spray characteristics of nozzle with different geometries such as swirler angle and swirl chamber aspect ratio were analyzed by using PDA system to predict the effect of the spray characteristics on the etching factor. The swirler angles were 49,5$^{\circ}$, 63$^{\circ}$ and 76.5$^{\circ}$. The swirl chamber aspect ratios were 1.2, 1.6 and 2.0. It was found that the etching factor was correlated with the spray characteristics and also the smaller swiller angle, the larger etching factor became.