• 로봇학회논문지
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• 제16권1호
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• pp.1-11
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• 2021

Soft robotics has attracted a huge amount of interest in the recent decade or so, be it either actuators or sensors. Recently, a soft optical waveguide sensor has proven its effectiveness for various sensing applications such as strain, force, and bending measurements. The operation principle of the waveguide is simple, but the present technology is far too much complex to manufacture the waveguide. The waveguide fails to attract various practical applications in comparison to other types of sensors despite its superior safety and ease working principle. This study pursues to develop the soft sensors based on the optical phenomena so that the waveguide can be easily manufactured and its design can be conducted. Several physical properties of the waveguide are confirmed through the repetitive experiments in the aspects of strain, force, and bending of the waveguide. Finally, the waveguide sensor is embedded inside the actuator to verify the effectiveness of the proposed waveguide as well as to extend the application fields of the waveguide sensor.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.223-223
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• 2009

In this paper, designed and simulated Power Splitter (PS) integrated Mach-Zehnder interferometer (MZI) based planar type optical waveguide devices (which is called here a PS-MZI). The PS-MZI optical waveguide sensor was preceded by a Y-junction, which splits the input power between the sensor, and a reference branch, to minimize the effect of optical power variations. The PS-MZI optical waveguide sensor induced changing phases of the incident beam, which had fallen upon the waveguide through computer simulation, according to the small changes in the index of refraction, thus beam intensity was changed. The waveguide were optimized at a wavelength of 1550 nm and fabricated according to the design rule of 0.45 delta%, which is the difference of refractive index between the core and clad. The fabrication of PS-MZI optical waveguide sensor was performed by a conventional planar lightwave circuit (PLC) fabrication process. The PS-MZI optical waveguide that was fabricated to be applied as a biosensor revealed a low insertion loss and a low polarization-dependent loss. After having etched the over-clad at the sensor part in the MZI optical waveguide that was fabricated, Ti deposition was made on the adhesion layer, and then Au thin-film deposition was carried out thereon. In addition, its optical properties were measured by having changed the index of refraction oil at the sensing part of the MZI. To apply the planar type PS-MZI optical waveguide as a biosensor, a detection test for Staphylococcus aureus was conducted according to changes in concentration, having adopted Ti-alkoxide as ligand. The detection result of the S. aureus by the PS-MZI optical waveguide sensor was possible to the level of $10^1$ CFU/ml.

• 센서학회지
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• 제30권6호
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• pp.395-407
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• 2021

The effect of the specifications of a silicon-on-insulator vertical slot optical waveguide on the sensitivity of homogeneous and surface sensing configurations for TE and TM polarization, respectively, was systematically analyzed using numerical software. The specifications were optimized based on the confinement factor and transmission power of the TE-guided mode distributed in the slot. The waveguide sensitivities of homogeneous and surface sensing were calculated according to the specifications of the optimized slot optical waveguide.

• 센서학회지
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• 제6권3호
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• pp.214-220
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• 1997

본 연구에서는 생화학 물질을 정량적으로 분석하기 위하여 소산장(Evanescent field) 흡수를 이용한 박막 광도파로형 칼륨이온센서를 제작하였다. 도파로는 Pyrex glass($26{\times}19{\times}1mm$, $n_{1}=1.485$ at 514nm, Ar laer ; Coherent 사 M532) 기판위에 RF sputtering법으로 Coming-7059 glass($n_{2}=1.588$, at 514nm, Ar laer ; Coherent사 M532) 2 종류의 박막 광도파로를 형성하였으며, 그 두께는 프리즘 결합법으로 측정한 결과 각각 $T_{1}=1.04{\mu}m$ 와 $T_{2}=1.41{\mu}m$ 였다. 칼륨이온 선택성의 이온감지막은 변색성 이온감응물질인 ETH 5294와 중성이온감응물질인 valinomycin을 poly(vinyl chloride-co-vinyl acetate-co-vinyl alcohol) ( 91 : 3 : 6 ) 공중합체 막내에 포괄법으로 고정화한 후 도파로 위에 스핀코팅법으로 제조하였다. 그리고, 센서의 특성을 평가하기 위해 감지막의 작용길이, 도파로의 두께 및 변색성 이온감응물질의 조성비 변화에 따른 감도 의존성을 조사하였다. 본 센서는 약 $1{\times}10^{-6}M\;{\sim}1.0\;M$의 넓은 측정범위를 가지며, 90%의 응답시간은 약 1분 이내의 빠른 응답특성을 나타내었다. 또한 분광분석법에 의한 투과광도법 및 광섬유를 이용한 optode형 센서를 제작하여 본 센서와 그 특성을 비교한 결과, 본 센서의 우수성을 알 수 있었다. 따라서 본 센서는 생화학 및 의용, 환경감시 분야 등에 응용 가능할 것으로 사료된다.

• Journal of Mechanical Science and Technology
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• 제15권3호
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• pp.309-319
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• 2001

This paper demonstrates the development of optical temperature sensor based on the etched silica-based planar waveguide Bragg grating. Topics include design and fabrication of the etched planar waveguide Bragg grating optical temperature sensor. The typical bandwidth and reflectivity of the surface etched grating has been ∼0.2nm and ∼9%, respectively, at a wavelength of ∼1552nm. The temperature-induced wavelength change is found to be slightly non-linear over ∼200$^{\circ}C$ temperature range. Typically, the temperature-induced fractional Bragg wavelength shift measured in this experiment is 0.0132nm/$^{\circ}C$ with linear curve fit. Theoretical models with nonlinear temperature effect for the grating response based on waveguide and plate deformation theories agree with experiments to within acceptable tolerance.

• ETRI Journal
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• 제36권5호
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• pp.841-846
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• 2014

This study proposes a novel optical sensor structure based on a refractometer combining a bend waveguide with an air trench. The optical sensor is a $1{\times}2$ splitter structure with a reference channel and a sensing channel. The reference channel has a straight waveguide. The sensing channel consists of a U-bend waveguide connecting four C-bends, and a trench structure to partially expose the core layer. The U-bend waveguide consists of one C-bend with the maximum optical loss and three C-bends with minimum losses. A trench provides a quantitative measurement environment and is aligned with the sidewall of the C-bend having the maximum loss. The intensity of the output power depends on the change in the refractive index of the measured material. The insertion loss of the proposed optical sensor changes from 3.7 dB to 59.1 dB when the refractive index changes from 1.3852 to 1.4452.

• 센서학회지
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• 제30권5호
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• pp.331-336
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• 2021

The Non-dispersive Infrared (NDIR) gas sensor has high selectivity, measurement reliability, and long lifespan. Thus, even though the NDIR gas sensor is expensive, it is still widely used for carbon dioxide (CO₂) detection. In this study, to reduce the cost of the NDIR CO₂ gas sensor, we proposed the new optical waveguide structure design based on ready-made gas pipes that can improve the sensitivity by increasing the initial light intensity. The new optical waveguide design is a structure in which a part of the optical waveguide filter is inclined to increase the transmittance of the filter, and a parabolic mirror is installed at the rear end of the filter to focus the infrared rays passing through the filter to the detector. In order to examine the output characteristics of the new optical waveguide structure design, optical simulation was performed for two types of IR-source. As a result, the new optical waveguide structure can improve the sensitivity of the NDIR CO₂ gas sensor by making the infrared rays perpendicular to the filter, increasing the filter transmittance.

• 한국안전학회지
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• 제16권2호
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• pp.121-129
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• 2001

본 논문은 식각된 평면 광도파 브래그 격자를 이용한 광온도 센서의 개발에 대한 연구로써 식각된 평면 도파로 브래그 격자의 설계, 제작, 격자 특성 연구 및 온도 측정 가능성을 주 연구 목적으로 하고 있다. 평면 식각 브래그 격자 센서의 전형적 대역폭과 그 반사도는 각각 ~l,522nm의 파장에서 ~0.2nm와 ~7%이며, 20$0^{\circ}C$까지 온도가 변화하는 동안 온도 변화에 따른 브래그 파장의 변화는 약간의 비선형성을 보였다. 광도파로와 판변형이론에 기초한 브래그 격자의 온도 변화에 따른 광파장 응답을 예측하기 위한 이론적 모델은 실험과 비교할 때 허용 오차내에서 잘 일치하고 있다.

• Journal of the Optical Society of Korea
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• 제14권4호
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• pp.337-341
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• 2010

A high sensitivity fiber optic temperature sensor based on a side-polished fiber (SPF) coupled to a tapered multimode overlay waveguide (MMOW) is proposed and studied. Both tapered and non-tapered MMOW were considered to study the effect of tapering of MMOW on the characteristics of the device and to investigate the criticality of the uniformity of the multimode overlay waveguide over the SPF. Present study shows that tapering of the MMOW can be used to tune the desired wavelength range without any loss in the sensitivity. Sensitivity up to 9 nm/$^{\circ}C$ within the temperature range of 25 to $100^{\circ}C$ can be achieved with the proposed sensor, almost 6 times higher compared even to state-of-the-art high-sensitivity grating-based fiber optic temperature sensors.

• 비파괴검사학회지
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• 제26권1호
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• pp.18-24
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• 2006

액체금속로 원자로 노심과 내부구조물 들은 불투명한 소듐 내에 잠겨 있어 육안검사를 수행할 수 없다. 액체금속로 내부구조물의 육안검사를 수행하기 위해서는 초음파를 이용한 소듐내부 가시화가 적용되어야 한다. 본 연구에서는 소듐내부 가시화에 적용하기 위한 판형 초음파 웨이브가이드 센서를 개발하였다. 웨이브가이드 센서에서의 판파 전파특성을 분석하고 판파 적용모드로 제0차 반대칭 $A_0$ 모드를 선정하였다 웨이브가이드 센서에 액체 웨지를 적용하여 $A_0$ 모드의 저주파수 분산 영역에서 판파가 발진되도록 하였으며 입사펄스의 주파수 변조에 의하여 초음파 빔 방사각을 변환시킬 수 있는 새로운 방법을 제안하였다 본 방법은 웨이브가이드 센서를 기계적으로 구동하지 않고 빔 방사각을 조정할 수 있어 기존 웨이브가이드 센서의 구동 제한성을 극복할 수 있게 해 준다. 웨이브가이드 센서의 빔 방사각 변환 특성을 실험적으로 검증하였으며, 수중 C-스캔 시험을 수행하여 웨이브가이드 센서의 소듐내부 가시화 적용 가능성을 확인하였다.