• Journal of the Korean Vacuum Society
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• v.8 no.3A
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• pp.245-248
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• 1999

Recently low resistance of gate line or data line is required for large screen size TFT-LCD panels. As a result, lower resistance Al-alloy is currently reviewed extensively and the resistivity is required smaller than 10$\mu\Omega$cm. In this paper, Al-Nd and Al-Zr thin film were deposited on glass substrated by D.C. magnetron sputtering system under various condition. Its properties were characterized by SEM, AFM, XRD and 4-point-probe. The optimal condition was $120^{\circ}C$, 125W, 0.4Pa, 30sccm (Ar) and $350^{\circ}C$, 20min. annealing. At that condition the resistivity of Al-Zr(0.9%wt.) is about 4$\mu\Omega$cm.

• Journal of the Korean Magnetics Society
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• v.9 no.6
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• pp.285-290
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• 1999

The magnetic properties of sputtered amorphous $Fe_{86.7}Zr_{3.3}B_4Ag_6$ thin films, which contains an additional insoluble element Ag, have been investigated as a function of uniaxal field annealing temperature. The amorphous $Fe_{86.7}Zr_{3.3}B_4Ag_6$ thin films produced by relatively low temperature annealing at 40$0^{\circ}C$ for 1 hour was found to have very high permeability of 7800 at 50 MHz, 0.2 mOe, high magnetization of 1.7 T, low coercivity of 1.0 Oe and very low core loss of 1.4 W/cc at 1 MHz, 0.1 T, respectively. It is notable that the permeability and core loss values for various kinds of the soft magnetic thin films reported up to now. The reason for the appearance for the good soft magnetic properties is presumably due to the homogeneous formation of very fine bcc $\alpha$-Fe clusters with the size in the amorphous $Fe_{86.7}Zr_{3.3}B_4Ag_6$ thin films matrix, which can be deduced from the XRD results.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.6
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• pp.356-360
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• 2017

We investigated the phase evolution, microstructure, and microwave dielectric properties of Na- and Zr-doped $Ba(Mg_{0.5}W_{0.5})O_3$ [i.e., ($Ba_{1-2x}Na_{2x})(Mg_{0.5-x}Zr_xW_{0.5})O_3$] ceramics. $BaWO_4$ as a secondary phase was observed in all compositions, and it increased as the dopant concentration increased. All specimens revealed a dense microstructure. For the composition of x=0.01, polyhedral grains were observed. As the dopant concentration increased, the densification and the grain growth were promoted by a liquid phase. The quality factor($Q{\times}f_0$) decreased remarkably, whereas the dielectric constant (${\varepsilon}_r$) tended to decrease as the dopant concentration increased. The dielectric constant, quality factor, and temperature coefficient of the resonant frequency of the composition of x=0.01 sintered at $1,700^{\circ}C$ for 1 h were 18.6, 216,275 GHz, and $-22.0ppm/^{\circ}C$, respectively.

• Corrosion Science and Technology
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• v.9 no.6
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• pp.289-293
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• 2010

To investigate the corrosion behavior of tools steel surface in various coating film, the surface of hard coated Ti-Zr-N film on the tool steel by using magnetron-sputtering methods was researched using various experimental methods. STD 61 steels were manufactured by using vacuum furnace and solutionized for 1hr at $1050^{\circ}C$. Steel surface was coated with Ti-Zr-N film at $150^{\circ}C$ and 100W for 1h by using DC-sputtering equipment. Surface characteristics of Ti-Zr-N film coated specimens were investigated by OM, XRD, FE-SEM and nano-scratch tester. And corrosion behaviors of the coated specimen were investigated by polarization test and electrochemical impedance spectroscopy(EG&G Co, PARSTAT 2273. USA). It was found that Ti-Zr-N film coated sample had a thick coated layer and showed a good wear resistance and corrosion resistance of surface compared with ZrN and TiN coated sample. The corrosion resistance and mechanical property of Ti-Zr-N film coated STD 61 alloy increased as sputtering time increased.

• Corrosion Science and Technology
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• v.10 no.6
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• pp.212-217
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• 2011

In this study, corrosion characteristics of TiN and ZrN film on the abutment screw by arc-ion plating were investigated using a potentiodynamic anodic polarization test in deaerated 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. The surface morphologies of the coating layers before and after corrosion test were investigated by a field-emission scanning electron microscope (FE-SEM) and a energy dispersive x-ray spectroscopy (EDS). The surfaces of the TiN and ZrN coated abutment screws showed the smooth surfaces without mechanical defects like scratches which can be formed during the manufacturing process, compared with those of the non-coated abutment screw. The corrosion and passive current densities of TiN and ZrN coated abutment screws were lower than those of the non-coated abutment screw.

• Journal of the Korean Ceramic Society
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• v.39 no.7
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• pp.635-641
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• 2002

Electrical conduction of $SrZrO_3$ doped with $Y_2O_3$ was measured as a function of gas atmosphere and temperature by impedance spectroscopy. Hydrogen dissolution, due to an enhanced driving force in the presence of oxygen, results in protonation by water incorporation. Proton conductivity increased with water vapor pressure, ${P_w}^{1/2}$. In the pure hydrogen atmosphere, the dissolution of hydrogen,$H_2(g)=2H_{i}$ +2e', is supposed to be driven by a reduced activity of electrons, ascribable to their trapping in oxygen vacancies. The activation energy of electrical conductivity was 50 kJ/mol, in wet argon atmosphere in the temperature range of $600~900^{\circ}C$, similar to those reported for proton conduction in the literature. Grain boundary effect in proton conduction was substantial in the 10% doped case at temperatures lower than $700^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.27 no.6
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• pp.824-828
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• 1990

Zirconia gel fibers were fabricated by sol-gel processing using zirconium alkoxides and 2, 4-pentanedione. Their phase transformation and microstructural evolution were studied after heat treatments up to 150$0^{\circ}C$. Tetragonal ZrO2 began to form at 50$0^{\circ}C$ and followed by monoclinic, tetragonal phase during subsequent heat treatments at 1000, 150$0^{\circ}C$ for 1hour respectively. During cooling from 150$0^{\circ}C$, cracks were created, propagated along grain boundaries due to the volume change from tetragonal to monoclinic transformation.

• Korean Journal of Materials Research
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• v.13 no.10
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• pp.640-644
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• 2003

NiCr thin films were fabricated by rf magnetron sputtering for applying to both the top electrode and absorption layer on Pb(Zr, Ti)O$_3$(PZT) thin films for infrared sensors. The rms roughness and resistivity of NiCr films prepared with Ni power of 80 W and Cr power of 50 W showed the most stable oxidation resistance after annealing at $600^{\circ}C$ for 5 min in oxygen ambient. The rms roughness and resistivity of NiCr films annealed at $V^{\circ}C$ in oxygen ambient were about 2$0\AA$ and $70 \mu$Ω-cm, respectively. As-deposited Ni/PZT/Pt and NiCr (Ni 80 W, Cr 50 W)/PZT/Pt structures showed well saturated hysteresis loops. However, in case of the samples annealed at $500^{\circ}C$ in oxygen ambient, only NiCr/PZT/Pt showed saturated loops having a remanent polarization of 20$\mu$C/$\textrm{cm}^2$. Ultra-thin NiCr films showed a possibility as a top electrode for infrared sensors.

• Journal of the Korean Ceramic Society
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• v.19 no.4
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• pp.293-299
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• 1982

The effects of $MnO_2$ and $Cr_2O_3$ on the Piezoelectrictric properties of Pb(Mg1/2W1/2)0.3 Ti0.4 Zr0.3O3 Ceramics. Electromechanical properties in the system in connection with the sintering temperature and the effects of $MnO_2$ and $Cr_2O_3$ addition. The dielectric constant of the ceramics decreased with the additions of $MnO_2$ while the additions of $Cr_2O_3$ increased the value. The Planar coupling factor (Kp) of the ceramics with 0.2wt% $MnO_2$ and with 0.2wt% $Cr_2O_3$ gave the highest value of 0.52 and 0.513 as sintered at 106$0^{\circ}C$, 108$0^{\circ}C$, respectively. The value of mechanical Q-factor were in parallel with the fired density of the ceramics. The optical micrography of the sintered bodies showed that the additions of $MnO_2$ promoted the grain growth, while the additions of $Cr_2O_3$ retarded the grain growth.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.117-120
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• 2004

The dielectric and piezoelectric properties of silver doped $Pb(Zr,Ti)O_3-Pb(Mn,W,Sb,Nb)O_3$ ceramics was examined. By varying the contents of silver(0.0, 0.4, 1.0 mol%), the effect of doped silver on PZT-PMWSN thin film was investigated at various sintering temperature(900, 1000, $1100^{\circ}C$). As increasing silver contents, the relative dielectric constant is increased and sinterbility is enhanced. At the specimen with 0.4 mol% Ag and sintered at $1100^{\circ}C$, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant(${\varepsilon}r$) and dielectric loss were 0.502, 811, 991, 0.006, respectively. The results show that the PZT-PMWSN/Ag composites have enhanced piezoelectic and dielectric properties and processing condition is improved.