• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.632-635
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• 2002

In this paper, a general procedure to determine machine tool errors from the on-machine measurement (OMM) data is described. First, a parameterized error model of a machine tool is illustrated by approximating error components as linear function of axis positions, and a modified error model is proposed which includes backlash effects. To determine the unknown model coefficient vectors of the forward and backward error model, an artifact with 8 cutes is made and calibrated on CMM. Then, lower-left and upper-right cube corners are measured with a touch-trigger probe mounted on the machine tool spindle. Measured error data are used to determine the coefficient vectors. The positioning errors in the XY plane at the fixed z position are simulated for the forward and backward error model.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.453-457
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• 2001

One of the major limitations of productivity and quality in metal cutting is the machining accuracy of machine tools. The machining accuracy is affected by geometric and thermal errors of the machine tools. In this study, the compensation device is manufactured in order to compensate thermal error of machine tools under the real-time. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball artifact, and five gap sensors. In order to compensate thermal characteristics under several operating conditions, experiments performed with five gap sensors and manufactured compensation device on the horizontal machining center.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.4
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• pp.70-75
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• 2001

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindel unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball arti-fact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.

• Progress in Medical Physics
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• v.30 no.4
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• pp.128-138
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• 2019

Purpose: Segmental analysis of volumetric modulated arc therapy (VMAT) is not clinically used for compositional error source evaluation. Instead, dose verification is routinely used for plan-specific quality assurance (QA). While this approach identifies the resultant error, it does not specify which machine parameter was responsible for the error. In this research study, we adopted an approach for the segmental analysis of VMAT as a part of machine QA of linear accelerator (LINAC). Methods: Two portal dose QA plans were generated for VMAT QA: a) for full arc and b) for the arc, which was segmented in 12 subsegments. We investigated the multileaf collimator (MLC) position and dosimetric accuracy in the full and segmented arc delivery schemes. A MATLAB program was used to calculate the MLC position error from the data in the dynalog file. The Gamma passing rate (GPR) and the measured to planned dose difference (DD) in each pixel of the electronic portal imaging device was the measurement for dosimetric accuracy. The eclipse treatment planning system and a MATLAB program were used to calculate the dosimetric accuracy. Results: The maximum root-mean-square error of the MLC positions were <1 mm. The GPR was within the range of 98%-99.7% and was similar in both types of VMAT delivery. In general, the DD was <5 calibration units in both full arcs. A similar DD distribution was found for continuous arc and segmented arcs sums. Exceedingly high DD were not observed in any of the arc segment delivery schemes. The LINAC performance was acceptable regarding the execution of the VMAT QA plan. Conclusions: The segmental analysis proposed in this study is expected to be useful for the prediction of the delivery of the VMAT in relation to the gantry angle. We thus recommend the use of segmental analysis of VMAT as part of the regular QA.

• Journal of Radiation Protection and Research
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• v.44 no.1
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• pp.43-52
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• 2019

Background: The mid-term performance of clinical linear accelerator (LINAC) during volumetric modulated arc therapy (VMAT) treatment period is not performed in clinical practice and usually replaced with one-time plan quality assurance (QA). In this research we aim to monitor daily reproducibility of VMAT delivery from tracking individual leaf movement error and dosimetric error to evaluate the mid-term quality of the machine used. Materials and Methods: First, multileaf collimator (MLC) information was imported into MATLAB program to determine which of the MLC leaves in the leaf bank had the maximum RMS position error (maxRMS). We estimated where the maximum positional errors (maxPE) of the chosen leaf occur along its path length and tracked its daily variations over the entire treatment period. Secondly, picture information of dosimetric error from portal dosimetry was imported into MATLAB where representative high gamma index region (HGR) was determined as HGR with length of > 1 cm and their centers were daily tracked. Results and Discussion: The maxPEs in the brain and tongue cases were distributed broader than in other cases, but all data were found located within ${\pm}0.5mm$. From first day to last day all of five cases show the similar visual pattern of HGRs and Centers of the longest HGRs remained within ${\pm}1mm$ of that in first day. These findings prove excellent mid-term performance of the LINAC used in VMAT treatments over a full course of treatment. Conclusion: Tracking the daily location changes of leaf movement and dosimetric error can be a good indicator of predicting the daily quality like stability and reproducibility of beam delivering in VMAT treatment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.1023-1027
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• 2000

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball artifact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.11
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• pp.84-92
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• 1997

The purpose of this study is to develop a geometric error model and path compensation algorithm for rotating axes of the 5-axis machine tools, by a method to calibrate a rotary table using one master ball and three LVDTs. It was developed a new methodology to measure 3 translation errors of the rotary table and with a compensation procedure for setup errors of the master ball. The method is experimentally verified using a ball-table and on-machine inspection method. The results showed that the geometric error models with the path compensation strategy can be practically used as a means for improving the accuracy of the machine tools with rotary table.

• Journal of the Korean Institute of Gas
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• v.19 no.2
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• pp.37-44
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• 2015

We proposed the improved Langmuir adsorption relations considering volume change effect of coal matrix during primary production of CBM and Enhanced-CBM with injection of carbon dioxide or CCS in coalseam but also volumetric strain. To verify this model, experimental data of pure gas adsorption such as $CO_2$, $CH_4$, and $N_2$ on coals were used to compare conventional Langmuir model with this model. From the results, we obtained that the larger adsorption capacity of coal and the higher adsorption affinity of gas, the larger error occur with Langmuir model. Using this model, however, we found not only substantially better fit in all condition but also reasonable volumetric strain of the coal matrix. We also applied this volume modified pure gas adsorption model to the IAS model to describe gas adsorption and volumetric strain for mixed gas. This modified-IAS model fitting experimental data by Hall et al(1994) improved accuracy of mixed gas adsorption calculation compared with conventional model.

• Current Optics and Photonics
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• v.1 no.1
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• pp.29-33
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• 2017

A method for analysis of thin film thickness in spectroscopic reflectometry is proposed. In spectroscopic reflectometry, there has been a trade-off between accuracy and computation speed using the conventional analysis algorithms. The trade-off originated from the nonlinearity of spectral reflectance with respect to film thickness. In this paper, the spectral phase is extracted from spectral reflectance, and the thickness of the film can be calculated by linear equations. By using the proposed method, film thickness can be measured very fast with high accuracy. The simulation result shows that the film thickness can be acquired with high accuracy. In the simulation, analysis error is lower than 0.01% in the thickness range from 100 nm to 4 um. The experiments also show good accuracy. Maximum error is under $40{\AA}$ in the thickness range $3,000-20,000{\AA}$. The experiments present that the proposed method is very fast. It takes only 2.6 s for volumetric thickness analysis of 640*480 pixels. The study suggests that the method can be a useful tool for the volumetric thickness measurement in display and semiconductor industries.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.312-318
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• 1993

This paper presents an useful technique for error assessment of CMM with simple gauges such as step gauge. A computer module for measurement path generation is implemented,where the appropriate measurement sequences are generated in terms of DMIS file format for CMMs of CNC mode. After the CNC codes are downloaded into CMMs, the measurement operations are performed, and the error analysis are followed. Positional errors, angular errors are successfully measured with high precision along the 3 axis in relatively short time. The squareness error is also assessed with the step gauge measurement data. The developed system has been practically applied, and showed good performance.