• Analytical Science and Technology
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• v.18 no.1
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• pp.59-65
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• 2005

When the low level radioactivity sample is measured, it is required to have many samples. For increase of the sample volume, a scattering and absorbing probability of the emitted gamma-ray in the sample are to be increased. In order to correct the self-absorption effect, the counting efficiency must be calibrated according to a geometrical condition and sample density. But, it is impossible to determine efficiency for counting sample using standard source with the same geometrical condition and density. In this study, the measuring efficiencies were determined with various counting containers and densities. In order to compare the self-absorption effect with the sample density in the various sample container, the variation of the counting efficiency with the densities was investigated by adding NaI, which has high solubility and density. Also, they were compared with Monte Carlo simulation. The self-absorption effect was found to be significant in the low energy region below 0.5 MeV.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.363-363
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• 2008

The development of dry etching process for sapphire wafer with plasma has been key issues for the opto-electric devices. The challenges are increasing control and obtaining low plasma induced-damage because an unwanted scattering of radiation is caused by the spatial disorder of pattern and variation of surface roughness. The plasma-induced damages during plasma etching process can be classified as impurity contamination of residual etch products or bonding disruption in lattice due to charged particle bombardment. Therefor, fine pattern technology with low damaged etching process and high etch rate are urgently needed. Until now, there are a lot of reports on the etching of sapphire wafer with using $Cl_2$/Ar, $BCl_3$/Ar, HBr/Ar and so on [1]. However, the etch behavior of sapphire wafer have investigated with variation of only one parameter while other parameters are fixed. In this study, we investigated the effect of pressure and other parameters on the etch rate and the selectivity. We selected $BCl_3$ as an etch ant because $BCl_3$ plasmas are widely used in etching process of oxide materials. In plasma, the $BCl_3$ molecule can be dissociated into B radical, $B^+$ ion, Cl radical and $Cl^+$ ion. However, the $BCl_3$ molecule can be dissociated into B radical or $B^+$ ion easier than Cl radical or $Cl^+$ ion. First, we evaluated the etch behaviors of sapphire wafer in $BCl_3$/additive gases (Ar, $N_2,Cl_2$) gases. The behavior of etch rate of sapphire substrate was monitored as a function of additive gas ratio to $BCl_3$ based plasma, total flow rate, r.f. power, d.c. bias under different pressures of 5 mTorr, 10 mTorr, 20 mTorr and 30 mTorr. The etch rates of sapphire wafer, $SiO_2$ and PR were measured with using alpha step surface profiler. In order to understand the changes of radicals, volume density of Cl, B radical and BCl molecule were investigated with optical emission spectroscopy (OES). The chemical states of $Al_2O_3$ thin films were studied with energy dispersive X-ray (EDX) and depth profile anlysis of auger electron spectroscopy (AES). The enhancement of sapphire substrate can be explained by the reactive ion etching mechanism with the competition of the formation of volatile $AlCl_3$, $Al_2Cl_6$ or $BOCl_3$ and the sputter effect by energetic ions.

• Korean Journal of Optics and Photonics
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• v.29 no.3
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• pp.119-125
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• 2018

Hydrogen gas is an important and promising energy resource that has no emissions of pollutants during power generation. However, hydrogen gas is very dangerous because it is colorless, odorless, highly flammable, and explosive at low concentration. Conventional techniques for hydrogen gas detection are very difficult for measuring the hydrogen gas distribution at long distances, because they sample the gas to measure its concentration. Raman lidar is one of the techniques for remotely detecting hydrogen gas and measuring the range of the hydrogen gas distribution. A Raman lidar system with an on-axis optical receiver was developed to improve the range of hydrogen gas detection at long distance. To verify the accuracy and improvement in the range of detecting the hydrogen gas, experiments measuring the hydrogen gas concentration are carried out using the developed on-axis Raman lidar system and a gas chamber, to prevent explosion of the hydrogen gas. As a result, our developed on-axis Raman lidar system can measure a minimum hydrogen gas concentration of 0.66 volume percent at a distance of 50 m.

• Journal of the Korean earth science society
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• v.26 no.8
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• pp.790-799
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• 2005

We investigate the optical properties of aerosols over Gongju by an indirect method using the pound measurement, Sky-radiometer. The analysis period is from January to December, 2004. Skyrad. pack.3 is used to estimate the optical properties, such as the aerosol optical thickness (AOT), single scattering albedo (SSA), ${\AA}ngstron$ exponent $({\alpha})$ and size distribution, of aerosols from the ground measured radiance data. And qualify control is applied to minimize the cloud-contaminated data and improve the quality of analysis results. The 12-month average of AOT, ${\alpha}$, and SSA are 0.46, 1.14, and 0.91, respectively. The average volume spectra of aerosols shows a bi-modal distribution, the first peak at fine mode and the second peak at coarse mode. AOT and coarse particles clearly increases while SSA decreases during the Asian dust events. The optical properties of aerosols at Gongju vary with?seasons, but those are not influenced by the wind direction.

• Progress in Medical Physics
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• v.13 no.1
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• pp.1-8
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• 2002

Accurate knowledge of the distribution of contamination electrons ( which comes from mainly gantry head by Compton scattering, pair production, and tray: henceforth called leptons ) at the surface and in the first centimeters of tissue is essential for the clinical practice of radiation oncology. Such lepton tends to reduce or eliminate the ‘skin-sparing’ advantage of megavoltage photon beam radiotherapy, This information is needed to prescribe a absorbed dose to a skin volume at a few millimeter depth in high energy therapeutic radiation photon beam All experiments were done with 15 MV photon beam from a dual energy linear accelerator (Clinac 1800, Varian). Field size is defined by ranged from 10.0$\times$10.0 to 30.0$\times$30.0 $\textrm{cm}^2$. The absorbed dose and distribution of leptons in therapeutic radiation beam (15 MV) are investigated by means of variable blocked beams of 30.0$\times$30.0 $\textrm{cm}^2$ and dose beam profiles partly removed leptons with a copper plate. A numerous leptons mainly are distributed as shape of broad cone in the central photon beam and leptons path length in the water are shorter than 2.5 cm because of the leptons energy having around 3.0 MeV. These results clearly appears that the subtraction of leptons from the total depth dose curve not only lower the absolute dose in the buildup region and surface dose, it also causes a shift of d$_{max}$ to a deeper depth.

• Journal of the Korean Society of Radiology
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• v.13 no.5
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• pp.791-799
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• 2019

We evaluated the physical properties that occur to dose enhancement and changes from secondary particle production resulting from the interaction between enhancement material. Geant4 was used to perform a Monte Carlo simulation, and the medical internal radiation dose (MIRD) head phantom were employed. X-rays of 4, 6, 10, 15, 18, and 25 MV were used. Aurum (Au) and gadolinium (Gd) were applied within the tumor volume at 10, 20, and 30 mg/g, and an experiment using soft tissue exclusively was concomitantly performed for comparison. Also, particle fluence and initial kinetic energy of secondary particle of interaction were measured to calculate equivalent doses using the radiation weight factor. The properties of physical interaction by the radiation enhancement material showed the great increased in photoelectric effect as compared to the compton scattering and pair production, occurred with the highest, in aurum and gadolinium it is shown in common. The photonuclear effect frequency increased as the energy increased, thereby increasing secondary particle production, including alpha particles, protons, and neutrons. During dose enhancement using aurum, a maximum 424.25-fold increase in the equivalent dose due to neutrons was observed. This study was Monte Carlo simulation corresponds to the physical process of energy transmission in dose enhancement. Its results may be used as a basis for future in vivo and in vitro experiments aiming to improve effects of dose enhancement.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.239-240
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• 2008

As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

• The Korean Journal of Nuclear Medicine Technology
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• v.19 no.2
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• pp.93-101
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• 2015

Purpose In SPECT image, scatter count is the cause of quantitative count error and image quality degradation. Thus, a wide range of scatter correction(SC) methods have been studied and this study is to evaluate the accuracy of CT based SC(CTSC) used in SPECT/CT as the comparison with existing energy window based SC(EWSC). Materials and Methods SPECT/CT images were obtained after filling air in order to acquire a reference image without the influence of scatter count inside the Triple line insert phantom setting hot rod(74.0 MBq) in the middle and each SPECT/CT image was obtained each separately after filling water instead of air in order to derive the influence of scatter count under the same conditions. In both conditions, Astonish(iterative : 4 subset : 16) reconstruction method and CT attenuation correction were commonly applied and three types of SC methods such as non-scatter correction(NSC), EWSC, CTSC were used in images filled with image. For EWSC, 9 sub-energy windows were set additionally in addition to main(=peak) energy window(140 keV, 20%) and then, images were acquired at the same time and five types of EWSC including DPW(dual photo-peak window)10%, DEW(dual energy window)20%, TEW(triple energy window)10%, TEW5.0%, TEW2.5% were used. Under the condition without fluctuations in primary count, total count was measured by drawing volume of interest (VOI) in the images of the two conditions and then, the ratio of scatter count of total counts was calculated as percent scatter fraction(%SF) and the count error with image filled with water was evaluated with percent normalized mean-square error(%NMSE) based on the image filled with air. Results Based on the image filled with air, %SF of images filled with water to which each SC method was applied is NSC 37.44, DPW 27.41, DEW 21.84, TEW10% 19.60, TEW5% 17.02, TEW2.5% 14.68, CTSC 5.57 and the most scattering counts were removed in CTSC and %NMSE is NSC 35.80, DPW 14.28, DEW 7.81, TEW10% 5.94, TEW5% 4.21, TEW2.5% 2.96, CTSC 0.35 and the error in CTSC was found to be the lowest. Conclusion In SPECT/CT images, the application of each scatter correction method used in the experiment could improve the quantitative count error caused by the influence of scatter count. In particular, CTSC showed the lowest %NMSE(=0.35) compared to existing EWSC methods, enabling relatively accurate scatter correction.

• Journal of the Korean Society of Marine Environment & Safety
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• v.24 no.2
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• pp.275-281
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• 2018

It is known that he pollutant emitted from the combustion process of marine fuel oil causes air pollution and harmful effects to the human body. Accordingly, IMO regulates pollutants emitted from ships. However, the regulation of Particulate Matter (PM) is still in the process of debate, so preemptive action is needed. Fundamental research on PM is essential. In this study, the Dimensionless Light Extinction Constant ($K_e$) of fuel oil used in marine diesel engines was measured and analyzed to construct the basic data of the PM generated from marine-based fuel oil. The fuel oil used in the land diesel engine was measured in the same way for character comparison. Both fuel oils differ in sulfur content and density. The $K_e$ was measured via the optical method using a 633 nm laser and was determined by using the volume fraction of PM collected by the gravimetric filter method. The $K_e$ of the PM discharged from marine fuel oil is 8.28, and the land fuel oil is 8.44. The $K_e$ of two fuel oils was similar within the measurement uncertainty range. However, it was found by comparison with the value obtained by the Rayleigh-Limit solution that the light scattering portion could be large. Also, it was found that light extinction characteristics could be different due to the relationship between light transmittance and collected mass.