• Journal of Sensor Science and Technology
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• v.26 no.4
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• pp.235-238
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• 2017

In this study, the design of a tri-axis micromachined gyroscope is proposed and the vibration characteristic of the structure is analyzed. Tri-axis vibratory gyroscopes that utilize Coriolis effect are the most commonly used micromachined inertial sensors because of their advantages, such as low cost, small packaging size, and low power consumption. The proposed design is a single structure with four proof masses, which are coupled to their adjacent ones. The coupling springs of the proof masses orthogonally transfer the driving vibrational motion. The resonant frequencies of the gyroscope are analyzed by finite element method (FEM) simulation. The suspension beam spring design of proof masses limits the resonance frequencies of four modes, viz., drive mode, pitch, roll and yaw sensing mode in the range of 110 Hz near 21 kHz, 21173 Hz, 21239 Hz, 21244 Hz, and 21280 Hz, respectively. The unwanted modes are separated from the drive and sense modes by more than 700 Hz. Thereafter the drive and the sense mode vibrations are calculated and simulated to confirm the driving feasibility and estimate the sensitivity of the gyroscope. The cross-axis sensitivities caused by driving motion are 1.5 deg/s for both x- and y-axis, and 0.2 deg/s for z-axis.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.93-96
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• 2004

An ultrasonic linear motor was composed of a slider and a stator vibrator including piezoelectric material and elastic material. The ultrasonic linear motors mainly consist of an ultrasonic vibrator which generates elliptical oscillations. L1-B4 ultrasonic linear motor use longitudinal and bending multi-vibration. In order to design stators which has high efficiency and driving characteristics, The finite element method was used to optimize dimension of ultrasonic vibrator and direction of vibratory displacement. stator vibrator of respectively width 3, 5, 7[mm] was fabricated and experimented. as results When width was 5[mm], the driving characteristics was good.

• 제어로봇시스템학회:학술대회논문집
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• 1991.10a
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• pp.528-532
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• 1991

Having very small linear displacement, piezoelectric actuators have been restricted in robotic application as positioning devices. In this paper, a mechanical amplifier was developed to enhance the displacement of piezoelectric actuator and the corresponding driving circuit was designed. This equipment was integrated as a robotic wrist having 2 D.O.F micropositioning capability. Each joint was analysed in mechanical and dynamic view points. Experimental result showed that this device has Some hysteresis but could be used as vibratory robotic wrist with relatively high frequency. For more fine positioning control, a closed loop approach must be taken into account.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1425-1427
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• 1995

The effect of the magnetic flux interference between the driving and detecting unit of the gyroscope by the electromagnetic force has been investigated quantitatively. The key parameter dictating the output characteristics of the gyroscope which is driven and detected using electromagnetic force is the mutual interference between the driving and detecting unit. Using the specially designed apparatus for positioning of the detecting unit, it is found that the vertical positioning of the detecting unit plays a significant role in minimizing the interference effect as evidenced by our experimental results.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.916-921
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• 2014

In this paper, an improved small-scaled blade prototype was designed with the flap-driving mechanism classified as an active vibration reduction method, in order to reduce vibratory load in the helicopter. In detail, the previous Active Trailing-Edge Flap based on piezoelectric actuator, called SNUF(Seoul National University Flap), failed to achieve the target value (${\pm}4^{\circ}$) of the flap deflection angle. Therefore, the flap-driving mechanism design was improved, and a new piezoactuator was selected to accomplish the target value of the flap deflection angle in both static and rotating situations.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.204-207
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• 2000

An ultrasonic linear motor was composed of a slider and a stator vibrator including piezoelectric material and elastic material. The ultrasonic linear motors mainly consist of an ultrasonic vibrator which generates elliptical oscillations. L$_1$-B$_4$ ultrasonic linear motor use longitudinal and bending multi-vibration. In order to low driving voltage and improve the life time of the ultrasonic oscillator, we used stacked piezoceramics. Stacked piezoceramics are adhered to aluminum elastic material. The finite element method was used to optimize dimension of ultrasonic vibrator and direction of vibratory displacement. As a result of estimating the characteristics of the ultrasonic linear motor, no-load velocity was 2.04[m/s] when applied voltage was 70[V$\sub$rms/] in resonance frequency.

• Proceedings of the KIEE Conference
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• 2005.11a
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• pp.33-35
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• 2005

In this paper, a two-mass system for SiOG (Silicon on Glass) vibratory gyroscope with the need of frequency tuning was proposed to increase the stability of the device with wide bandwidth. Air damping and bandwidth were analyzed using MATLAB. The measured resonance frequency is 5.2 kHz, which is 7 kHz in the design. But the measured bandwidth is 450 Hz, similar to the designed bandwidth with 500 Hz. Also the frequency difference (210 Hz) between the driving and sensing part is smaller than the wide bandwidth of two mass system.

• Explosives and Blasting
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• v.31 no.1
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• pp.23-32
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• 2013

Construction vibration such as explosive blast, hydraulic breaker, vibratory roller, pile driving noise and so on, injuries in areas around the construction sites. In particular, underwater sound caused by ground vibration is propagation such as structure borne noise. Vibration and underwater sound due to construction activities may cause injury to river, sea or land fish farms near construction sites. The purpose of present study is to measure the sound pressure level and frequency analysis of the underwater noise generated by ground vibration(Blasting, hydraulic crawler drill, hydraulic breaker, vibratory roller). Underwater noise were monitoring by a hydrophone (TC 4013) and recorded, analysis were made using a by software (Prosig).

• Smart Structures and Systems
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• v.6 no.7
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• pp.793-810
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• 2010

This paper addresses the control issue of vibratory MEMS-based gyroscopes. This study considers a gyroscope that can be modeled by an inner mass attached to an outer mass by four springs and four dampers. The outer mass itself is attached to the rotating frame by an equal number of springs and dampers. In order to measure the angular rate of the rotating frame, a driving force is applied to the inner mass and the Coriolis force is sensed along the y-direction associated with the outer mass. Due to micro-fabrication imperfections, including anisoelasticity and damping effects, both gyroscopes do not allow accurate measurements, and therefore, it becomes necessary to devise feedback controllers to reduce the effects of such imperfections. Given an ideal gyroscope that meets certain performance specifications, a feedback control strategy is synthesized to reduce the error dynamics between the actual and ideal gyroscopes. For a dual-mass gyroscope, it is demonstrated that the error dynamics are remarkably decreased with the application of four actuators applied to both masses in the x and y directions. It is also shown that it is possible to reduce the error dynamics with only two actuators applied to the outer mass only. Simulation results are presented to prove the efficiency of the proposed control design.

• Journal of the Microelectronics and Packaging Society
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• v.12 no.3 s.36
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• pp.187-196
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• 2005

MEMS devices such as a vibratory gyroscope often suffer from a lower yield rate due to fabrication errors and the external stress. In the decoupled vibratory gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, fabricated with SOI (Silicon-On-Insulator) wafer and packaged using the anodic bonding, has a large wafer bowing caused by thermal expansion mismatch as well as non-uniform surfaces of the structures caused by the notching effect. These effects result in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) technology. It uses a silicon wafer and two glass wafers to minimize the wafer bowing and a metallic membrane to avoid the notching. In the packaged SiOG gyroscope, the notching effect is eliminated and the warpage of the wafer is greatly reduced. Consequently the frequency difference is more uniformly distributed and its variation is greatly improved. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.