• Journal of KSNVE
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• v.9 no.6
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• pp.1227-1233
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• 1999

Modern technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a nanometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. This paper deals with the structural dynamic design in high class semiconductor factory in order to be satisfied more strict vibration criteria for high sensitive equipment.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.660-664
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• 2014

A diesel forklift truck under 3-ton class has disadvantages in the vibration transmission path. Because the weight ratio of body structure to powertrain which is source of excitation force is lower th an a mid-class forklift. In addition, the torsional and bending vibration mode frequencies of body structure are within the engine excitation frequency range, then high idle vibration generated by resonance. In this paper vehicle body structure design and optimization technique considering idle vibration reduction are presented. Design sensitivity analysis is applied to search the sensitive of design parameters in body structure. The design parameters such as thickness and pillar cross section were optimized to increase the torsional and bending vibration mode frequencies.

• Journal of Dental Rehabilitation and Applied Science
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• v.38 no.2
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• pp.81-89
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• 2022

Purpose: Wireless endodontic handpieces (WEH) are widely used in dental clinics due to their convenience and portability. This study aimed to compare the vibration magnitudes and patterns generated by five WEH. Materials and Methods: Vibration acceleration of five WEH (X-Smart IQ, E connect S, Endo A Class, ENDOIT, and TRAUS ENDO) in the rotary and reciprocating motion was measured with accelerometer The average vibration acceleration was analyzed using the t-test, Welch's ANOVA test, and Dunnett T3 test at P < 0.05. Results: In all WEH, the average vibration acceleration in reciprocating motion was significantly higher than that in rotary motion (P < 0.001). In rotary motion, repeated vibration graphs of constant amplitude were obtained without sudden changes in the magnitude of vibration, and the average vibration acceleration value was high in the order of X Smart IQ, Endo A Class, ENDOIT, E Connect S, and TRAUS ENDO (P < 0.001), there was no statistically significant difference between X Smart IQ and Endo A Class. In reciprocating motion, a vibration graph was obtained in which large amplitude peaks appear at specific points within one cycle are repeated. The average vibration acceleration value was highest in the order of X Smart IQ, E Connect S, Endo A class, ENDOIT, and TRAUS ENDO (P < 0.001). Conclusion: Regardless of the type of WEH, greater vibration occurred in the reciprocating motion than in the rotary motion (P < 0.001). In the reciprocating motion, there was a difference in vibration for all handpieces (P < 0.001).

• Journal of Korean Society for Quality Management
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• v.36 no.2
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• pp.36-44
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• 2008

In this paper a novel feature extraction and selection is carried out in order to improve the discriminating capability between healthy and damaged structure using vibration signals. Although many feature extraction and selection algorithms have been proposed for vibration signals, most proposed approaches don't consider the discriminating ability of features since they are usually in unsupervised manner. We proposed a novel feature extraction and selection algorithm selecting few wavelet coefficients with higher class discriminating capability for damage detection and class visualization. We applied three class separability measures to evaluate the features, i.e. T test statistics, divergence, and Bhattacharyya distance. Experiments with vibration signals from truss structure demonstrate that class separabilities are significantly enhanced using our proposed algorithm compared to other two algorithms with original time-based features and Fourier-based ones.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1998.04a
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• pp.302-307
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• 1998

In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of exactness and accuracy, because this is used as basic data for the design of building structure and structural dynamics of equipment. The study on the evaluation of the factors affecting the permissible vibration criteria is required to design the efficient isolation system of the semiconductor manufacturing of equipment. This paper deals with the properties of the effected factor for vibration criteria of high sensitive equipment.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1996.10a
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• pp.377-385
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• 1996

In the case of a precision equipment, it requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga class semiconductor wafers. This high technology equipments require very strict environmental vibration standard in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria are usually obtained either by the real vibration exciting test on the equipment or by the analytical calculation. the former is accurate but requires a great deal of time and efforts while the latter lacks reliability. this paper proposes a new method to solve this problem at a time. the permissible vibration level to a precision equipment can be easily obtained by analyzing a process of Frequency Response Function. This paper also demonstrates its effectiveness by applying the proposed method to finding the vibration criteria of a Computer Hard Disk Drive by impact Test.

• Journal of Ocean Engineering and Technology
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• v.33 no.2
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• pp.196-202
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• 2019

In this study, the excessive noise and vibration phenomena of a high-speed Ro/Ro passenger ship were analyzed, and a countermeasure was taken based on them. This ship was granted a comfort class notation by the classification society, which was COMFORT-VIBRATION-II and COMFORT-NOISE-CREW-II. However, unfortunately, excessive noise and vibration in the aft part of the ship were delivered from the twin shaft propellers, and therefore the Class Requirement was not satisfied before delivery. In order to obtain the class notation, all of the concerned parties came to an agreement to reduce the noise and vibration level during operation after delivery because a seasonal ferry service was already scheduled and the cabin was fully booked. The root cause of the massive amount of noise and vibration was mainly the propeller-induced excitation pulse and beating that occurred from the mismatch of the rotating speeds of the two shaft lines. A 1st order vibrating force and beating phenomena existed in the propeller. Thus, a reduction of the excitation force, elimination of the beating phenomena, and decrease of the noise level at the aft area cabins and public spaces were required. In addition, structural reinforcements were conducted using pillars and additional girders at the aft part of the decks.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.1376-1383
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• 2001

Modem technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of 'exactness' and 'accuracy', because this is used as basic data for the design of building structure and structural dynamics of equipment. This paper deals with the properties of time and frequency domain in order to obtain more improved vibration criteria for high sensitive equipment.

• Journal of the Korea Society of Computer and Information
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• v.28 no.2
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• pp.9-17
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• 2023

In this paper, we propose a one-class vibration anomaly detection system for bearing defect diagnosis. In order to reduce the economic and time loss caused by bearing failure, an accurate defect diagnosis system is essential, and deep learning-based defect diagnosis systems are widely studied to solve the problem. However, it is difficult to obtain abnormal data in the actual data collection environment for deep learning learning, which causes data bias. Therefore, a one-class classification method using only normal data is used. As a general method, the characteristics of vibration data are extracted by learning the compression and restoration process through AutoEncoder. Anomaly detection is performed by learning a one-class classifier with the extracted features. However, this method cannot efficiently extract the characteristics of the vibration data because it does not consider the frequency characteristics of the vibration data. To solve this problem, we propose an AutoEncoder model that considers the frequency characteristics of vibration data. As for classification performance, accuracy 0.910, precision 1.0, recall 0.820, and f1-score 0.901 were obtained. The network design considering the vibration characteristics confirmed better performance than existing methods.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.442-447
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• 2007

A very abnormal vibration was occurred at the LP(low pressure) turbine continuously during the pre-operation for a 550MW class USC(ultra super critical) steam turbine. This vibration was initiated at the rotating speed of about 3,450rpm and then the vibration amplitude was highly increased the number by $2{\sim}3$ times with the increase of the rotating speed to the rated speed(3,600rpm). In this paper, this abnormal vibration named spike vibration. This spike vibration was caused by the rubbing between the rotating bucket tip seal and the Lower Half of spill strip. Also, this paper presents the mechanism of the spike vibration and the proper method to eliminate this abnormal vibration problem. This result would be good practice to find the solution of similar high vibration in the USC steam turbines for power plant as well as industrial rotating machineries.