• Title/Summary/Keyword: Vapor phase

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A Chemically-driven Top-down Approach for the Formation of High Quality GaN Nanostructure with a Sharp Tip

  • Kim, Je-Hyeong;O, Chung-Seok;Go, Yeong-Ho;Go, Seok-Min;Jo, Yong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.48-48
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    • 2011
  • We have developed a chemically-driven top-down approach using vapor phase HCl to form various GaN nanostructures and successfully demonstrated dislocation-free and strain-relaxed GaN nanostructures without etching damage formed by a selective dissociation method. Our approach overcomes many limitations encountered in previous approaches. There is no need to make a pattern, complicated process, and expensive equipment, but it produces a high-quality nanostructure over a large area at low cost. As far as we know, this is the first time that various types of high-quality GaN nanostructures, such as dot, cone, and rod, could be formed by a chemical method without the use of a mask or pattern, especially on the Ga-polar GaN. It is well known that the Ga-polar GaN is difficult to etch by the common chemical wet etching method because of the chemical stability of GaN. Our chemically driven GaN nanostructures show excellent structure and optical properties. The formed nanostructure had various facets depending on the etching conditions and showed a high crystal quality due to the removal of defects, such as dislocations. These structure properties derived excellent optical performance of the GaN nanostructure. The GaN nanostructure had increased internal and external quantum efficiency due to increased light extraction, reduced strain, and improved crystal quality. The chemically driven GaN nanostructure shows promise in applications such as efficient light-emitting diodes, field emitters, and sensors.

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A Study on the Fabrication of Perovskite (Pb, La)$\textrm{TiO}_3$ Thin Films by ECR PECVD (ECR PECVD법에 의한 페로브스카이트상(Pb, La)$\textrm{TiO}_3$ 박막 증착 연구)

  • Jeong, Seong-Ung;Park, Hye-Ryeon;Lee, Won-Jong
    • Korean Journal of Materials Research
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    • v.7 no.1
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    • pp.33-39
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    • 1997
  • Single phase pero~~skite lead lanthanum titanate thin films were fabricated on $Pt/Ti/SiO_2/Si$ substrates at the temperature of $480^{\circ}C$ by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECR PECVD) using metal organic sources $Pb(DPM)_2$ pre-flowing treatment in ECIi oxygen plasma before fabricating PLT films 11romote the perovskite nucleation due to stable supplying of the $Pb(DPM)_2$ and providing the F'h-rich atmosphere in the early stage of deposition. $Pb(DPM)_2$ pie-flonring treatment enhanced the properties of PLT films. The charactcristics of the PLT filrris were investigated as a tunction of the flow rate of Ti-source. The PL'i' films were grown in a perovskite structure tvith (100) preferred orientation. The high X-ray diffraction intensity and dielectric constant were obtained from the stoichiometric perovskite $(Pb,La)TiO_3$.

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Molybdenum Oxides as Diffusion Barrier Layers against MoSe2 Formation in A Nonvacuum Process for CuInSe2 Solar Cells (비진공법 CuInSe2 태양전지에서 MoSe2의 생성을 억제하기 위한 산화 몰리브데늄 확산장벽 층)

  • Lee, Byung-Seok;Lee, Doh-Kwon
    • Current Photovoltaic Research
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    • v.3 no.3
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    • pp.85-90
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    • 2015
  • Two-step processes for preparing $Cu(In,Ga)Se_2$ absorber layers consist of precursor layer formation and subsequent annealing in a Se-containing atmosphere. Among the various deposition methods for precursor layer, the nonvacuum (wet) processes have been spotlighted as alternatives to vacuum-based methods due to their potential to realize low-cost, scalable PV devices. However, due to its porous nature, the precursor layer deposited on Mo substrate by nonvacuum methods often suffers from thick $MoSe_2$ formation during selenization under a high Se vapor pressure. On the contrary, selenization under a low Se pressure to avoid $MoSe_2$ formation typically leads to low crystal quality of absorber films. Although TiN has been reported as a diffusion barrier against Se, the additional sputtering to deposit TiN layer may induce the complexity of fabrication process and nullify the advantages of nonvacuum deposition of absorber film. In this work, Mo oxide layers via thermal oxidation of Mo substrate have been explored as an alternative diffusion barrier. The morphology and phase evolution was examined as a function of oxidation temperature. The resulting Mo/Mo oxides double layers were employed as a back contact electrode for $CuInSe_2$ solar cells and were found to effectively suppress the formation of $MoSe_2$ layer.

Li2O and Li2CO3 Thin Film Growth by LPMOCVD (LPMOCVD에 의한 Li2O 및 Li2CO3 박막의 증착)

  • Jung, Sang-Chul;Ahn, Ho-Geun;Imaishi, Nobuyuki
    • Applied Chemistry for Engineering
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    • v.10 no.2
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    • pp.225-230
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    • 1999
  • Low pressure metal organic chemical vapor deposition (LPMOCVD) of $Li_2O$ solid thin films from Li(DPM) in nitrogen-oxygen or argon-oxygen atmosphere was experimentally investigated by using a small hot wall tubular type reactor. XRD and ESCA analysis revealed that $Li_2CO_3$ film grew in nitrogen-oxygen atmosphere and $Li_2O$ grew in argon-oxygen atmosphere. The grown lithium oxide or carbonate reacted with silicon or silica base materials to produce silicates. The CVD model analysis by means of the well-known micro trench method and Monte Carlo simulation was not fully successful, but a set of data on gas phase reaction rate constant and surface reaction constant was obtained.

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Selection of an Optimal Entrainer for Extractive Distillation of Azeotropic Acetone/Methanol System (Acetone/Methanol계 공비물의 추출증류를 위한 최적 Entrainer 선정)

  • Lee, JoonMan;Ahn, WonSool
    • Applied Chemistry for Engineering
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    • v.19 no.5
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    • pp.539-546
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    • 2008
  • A study on the selection of an optimal entrainer as the third component among water, aniline, 1,3-diethylbenzene, furfural, and MEK, for the extractive distillation of an azeotropic acetone/methanol system was performed using both the entrainer effect vapor-liquid equilibrium (VLE) and the relative volatility. In the case of water as the entrainer, a VLE curve without azeotropic point in the range of water composition from 0.3 up to 0.7 mole fraction could be obtained by both the experiment and the calculation using modified-UNIFAC model. For aniline and 1,3-diethylbenzene, however, VLE curve without azeotropic point could be obtained only at compositions above 0.7 mole fraction, which exhibited that they could be hardly utilized as the entrainer. Moreover, both furfural and MEK were verified to be improper entrainer since they formed an azeotropic phase. Relative volatility of water showed greater than 1.0 and increased with compositions, while those of the others decreased non-linearly, exhibiting that only water could be utilized as the proper entrainer for the extractive distillation of azeotropic acetone/methanol system.

Solid Acid Catalyzed Formation of ETBE(Ethyl tert-Butyl Ether) as an Octane Enhancer for Gasoline (고체산 촉매에 의한 가솔린 옥탄가 향상제인 ETBE (Ethyl tert-Butyl Ether) 합성)

  • Park, Nam-Cook;Kim, Jae-Seung;Seo, Seong-Gyu;Oh, Young-Yenl
    • Applied Chemistry for Engineering
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    • v.4 no.1
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    • pp.162-170
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    • 1993
  • Vapor-phase ETBE(ethyl tert-butyl ether) synthesis from TBA(tert-butyl alcohol) and ethanol was carried over solid acid catalysts such as heteropoly acids and proton type zeolites. Heteropoly acids were more active than proton type zeolites and $H_4SiW_{12}O_{40}$ catalyst showed about the same activity as Amberlyst-15 ion exchange resin catalyst used as an industrial catalyst in ETBE synthesis. The catalytic activity of transition metal exchanged heteropoly acids was greatly enhanced, because new acid site was generated with hydrogen reduction. This effect of hydrogen reduction was related to the reduction characteristics of catalysts and the order of reducibility was $Ag^+$>$Cu^{2+}$>$Fe^{2+}$.

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The Effect of Compliance Structures Near the Mechanical Heart Valve on Valve Surface Erosion (기계식 인공 판막 주위의 유연성 구조가 표면 괴식에 미치는 영향)

  • Lee, Hwan-Sung;Hwang, Sung-Won;Sun, Kyung
    • Journal of Biomedical Engineering Research
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    • v.23 no.4
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    • pp.309-315
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    • 2002
  • Since the discovery, in the 1980s, of erosion-pit-induced fractures in implanted mechanical heart valves. cavitation on the surface of mechanical heart valves has been widely studied as a possible cause of pitting. Several factors, including peak dp/dt of the ventricular pressure. maximum closing velocity of the leaflet, and squeeze flow. have been studied as indices of the cavitation threshold. In the present study. cavitation erosion on the surface of a mechanical valve was examined by focusing on squeeze flow and the water hammer phenomenon during the closing period of the valve. In this study, we measures pressure wave forms near a valve and closing velocities of a disk, which were placed in a holder with and without compliance. In case of all holders, pressure drop of below vapor pressure expect at near the surface disk. It was also found that the closing velocity of the disk increased and that cavitation erosion was enhanced too. These results suggest that disk closing velocity during the closing phase has signifiant effects on pitting erosion.

Modelling Phase Equilibria of Binary Mixtures for the Direct Synthesis of Dimethyl Carbonate from CO2 (직접 합성법을 이용한 dimethyl carbonate제조공정을 위한 공정 혼합물의 상평형 모델링)

  • Im, Jihoon;Lee, Gangwon;An, Jichul;Kim, Hwayong
    • Clean Technology
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    • v.11 no.4
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    • pp.165-170
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    • 2005
  • The aim of this study is to provide vapor-liquid equilibrium (VLE) information for the study of process which directly synthesize dimethyl carbonate (DMC) from $CO_2$. For this study we collected some necessary VLE systems data of Methanol-Water, Methanol-DMC, $CO_2$-DMC, $CO_2$-Methanol, $CO_2$-Methanol, and performed VLE calculation with Peng-Robinson equation of state, Wong-Sandler mixing rules that widely used in chemical industry. These calculation results relatively agreed with VLE data well. Optimized Parameters of EoS given through this calculation will be used as some valuable information for fundamental study, process development and process optimization of DMC direct synthesis.

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Work function variation of doped ZnO nanorods by Kelvin probe force microscopy

  • Ben, Chu Van;Hong, Min-Chi;Yang, Woo-Chul
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.446-446
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    • 2011
  • One dimensional (1-D) structures of ZnO nanorods are promising elements for future optoelectronic devices. However there are still many obstacles in fabricating high-quality p-type ZnO up to now. In addition, it is limited to measure the degree of the doping concentration and carrier transport of the doped 1-D ZnO with conventional methods such as Hall measurement. Here we demonstrate the measurement of the electronic properties of p- and n-doped ZnO nanorods by the Kelvin probe force microscopy (KPFM). Vertically aligned ZnO nanorods with intrinsic n-doped, As-doped p-type, and p-n junction were grown by vapor phase epitaxy (VPE). Individual nanowires were then transferred onto Au films deposited on Si substrates. The morphology and surface potentials were measured simultaneously by the KPFM. The work function of the individual nanorods was estimated by comparing with that of gold film as a reference, and the doping concentration of each ZnO nanorods was deduced. Our KPFM results show that the average work function difference between the p-type and n-type regions of p-n junction ZnO nanorod is about ~85meV. This value is in good agreement with the difference in the work function between As-doped p- and n-type ZnO nanorods (96meV) measured with the same conditions. This value is smaller than the expected values estimated from the energy band diagram. However it is explained in terms of surface state and surface band bending.

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The Molecular Simulation Study for the Adsorption of $H_2S,\;NH_3$ and $CH_3SH$ on Graphite Carbon (Graphite Carbon에 $H_2S,\;NH_3$$CH_3SH$의 흡착에 대한 분자모사 연구)

  • 신창호;김종열;이영택;김정열;김승준
    • Journal of the Korean Society of Tobacco Science
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    • v.25 no.1
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    • pp.59-69
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    • 2003
  • The adsorption characteristics of H$_2$S, NH$_3$and $CH_3$SH on the graphite carbon have been investigated using Grand Canonical Monte Carlo(GCMC) method with universal force field (UFF) and dreiding force field. Most of the activated carbons used in vapor phase adsorption have the micropore of 6$\AA$ to 20$\AA$ and the specific surface area of ca. 1000 m$^2$/g, as the result of $N_2$ adsorption by BET method. For the more efficient comparison, the activated carbons have been manipulated with different pore sizes. The adsorption characteristics of H$_2$S, NH$_3$and $CH_3$SH have been considered at various temperatures and pressures. The adsorption amount using Dreiding force field is predicted to be lower than that using UFF. As the temperature is going to high, the adsorption amount of adsorbates is decreased due to their vaporization. Considering the pore size effect, the adsorption characteristic depends on the adsorbate size, polarity and interaction between adsorbates, etc. At all cases employed in this study, NH$_3$ is barely adsorbed and $CH_3$SH is preferentially adsorbed on the graphite carbon. Our theoretical result is qualitatively good agreement with the experimental observation. However, there are some quantitative discrepancies depending on the functional groups and pore size distribution on the real activated carbons used in experiment.