• 제목/요약/키워드: Vapor phase

검색결과 1,125건 처리시간 0.037초

ZnO 기판 위에 Hydride Vapor-Phase Epitaxy법에 의한 GaN의 성장 (Growth of GaN on ZnO Substrate by Hydride Vapor-Phase Epitaxy)

  • 조성룡;김선태
    • 한국재료학회지
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    • 제12권4호
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    • pp.304-307
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    • 2002
  • A zinc oxide (ZnO) single crystal was used as a substrate in the hydride vapor-phase epitaxy (HVPE) growth of GaN and the structural and optical properties of GaN layer were characterized by x- ray diffraction, transmission electron microscopy, secondary ion mass spectrometry, and photoluminescence (PL) analysis. Despite a good lattice match and an identical structure, ZnO is not an appropriate substrate for application of HVPE growth of GaN. Thick film could not be grown. The substrate reacted with process gases and Ga, being unstable at high temperatures. The crystallinity of ZnO substrate deteriorated seriously with growth time, and a thin alloy layer formed at the growth interface due to the reaction between ZnO and GaN. The PL from a GaN layer demonstrated the impurity contamination during growth possibly due to the out-diffusion from the substrate.

Organic Vapor Phase Deposition 방식을 이용한 펜타센 유기박막트랜지스터의 제작 (Fabrication of Pentacene Thin Film Transistors by using Organic Vapor Phase Deposition System)

  • 정보철;송정근
    • 한국전기전자재료학회논문지
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    • 제19권6호
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    • pp.512-518
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    • 2006
  • In this paper, we investigated the deposition of pentacene thin film on a large area substrate by Organic Vapor Phase Deposition(OVPD) and applied it to fabrication of Organic Thin Film Transistor(OTFT). We extracted the optimum deposition conditions such as evaporation temperature of $260^{\circ}C$, carrier gas flow rate of 10 sccm and chamber vacuum pressure of 0.1 torr. We fabricated 72 OTFTs on the 4 inch size Si Wafer, Which produced the average mobility of $0.1{\pm}0.021cm^2/V{\cdot}s$, average subthreshold slope of 1.04 dec/V, average threshold voltage of -6.55 V, and off-state current is $0.973pA/{\mu}m$. The overall performance of pentacene TFTs over 4 ' wafer exhibited the uniformity with the variation less than 20 %. This proves that OVPD is a suitable methode for the deposition of organic thin film over a large area substrate.

기상반응에 의한 $\beta$-SiC 초미분말 합성시 수소 가스유량과 TMS 농도의 영향 (The Effect of H2 Flow Rate and TMS Concentration on Synthesizing Ultrafine $\beta$-SiC Powder by Vapor Phase Reaction)

  • 유용호;어경훈;소명기
    • 한국세라믹학회지
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    • 제36권8호
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    • pp.853-858
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    • 1999
  • To investigate the effect of H2 flow rate and TMS[Si(CH3)4] concentration on synthesizing ultrafine ${\beta}$-SiC powder by vapor phase reaction the experiment was performed at 1100$^{\circ}C$ of the reaction temperature under the condition of 200-2000 cc/min of H2 gas flow rate and 1-10% of TMS concentration respectively. The shape of ${\beta}$-SiC particles synthesized was spherical and the size of particles decreased and the distribution of particles was more uniform with increasing H2 gas flow rate. In this case Si powders were coexisted with ${\beta}$-SiC Pure and ultrafine ${\beta}$-SiC powders without Si were obtained under the condition of above 2% of TMS concentration and below 1500 cc/min of H2 gas flow rate.

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기상반응에 의한 $Si_3N_4$ 미세분말의 합성 (Synthesis of Ultrafine Silicon Nitride Powders by the Vapor Phase Reaction)

  • 유용호;어경훈;소명기
    • 한국세라믹학회지
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    • 제37권1호
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    • pp.44-49
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    • 2000
  • Silicon nitride powders, were synthesized by the vapor phase reaction using SiH4-NH3 gaseous mixture. The reaction temperature, ratio of NH3 to SiH4 gas and the overall gas quantity were varied. The synthesized powders were characterized using X-ray, TEM, FT-IR and EA. The synthesized silicon nitride powders were in amorphous state, and the average particle size was about 100nm. TEM analysis revealed that the particle size decreased with increasing reaction temperature and gas flow quantity. As-received amorphous powders were annealed in nitrogen atmosphere at 140$0^{\circ}C$ for 2h, then the powders were completely crystallized at 0.2 ratio of NH3 to SiH4.

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Production of Nanosized WC Powder by Vapor Phase Reaction

  • Cho, Gi-Chul;Lee, Gil-Geun;Ha, Gook-Hyun;Kim, Byung-Kee
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.625-626
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    • 2006
  • In the present study, the focus is on the synthesis of nanosized WC powder by the chemical vapor condensation proces. The synthesized W-C system powder by the CVC process shows W2C, W, WO3 phases and can not shows WC phase. After recarburization heat treatment under mixture gas atmosphere of argon and hydrogen gases, the synthesized W-C system powder fully transformed to the pure WC. The synthesized WC powder after recarburization heat treatment has an average particle size of 20 nm. The nano-sized WC powder can be prepared by the combination of the CVC process and heat treatment methods.

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Fabrication of Poly(3,4-ethylenedioxythiopene) Patterns using Vapor Phase Polymerization

  • 조보람;성명모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.265.2-265.2
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    • 2013
  • We fabricate poly(3,4-ethylenedioxythiopene patterns using liquid-bridge-mediated nanotransfer (LB-nTM) printing via vapor phase polymerization (VPP). LB-nTM printing method can simultaneously enable the synthesis, alignment and patterning of the nanowires from molecular ink solutions. Two- or three-dimensional complex structures of VPP-PEDOT were directly fabricated over a large area using many types of molecular inks. VPP method is a versatile technique that can be used to obtain highly conducting coatings of conjugated polymer on both conducting and non-conducting substrates. The PEDOT patterns has analyzed crystallinity from X-ray diffraction pattern and select-area diffraction patterns. In addition, the PEDOT pattern has high conductivity compared other conducting polymers.

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PR 및 PC-SAFT 상태방정식을 이용한 메탄과 에탄의 기상과 액상의 밀도 추산 및 이성분계의 기-액 상평형 계산 (Estimation of Density of Methane and Ethane and Vapor-Liquid Equilibrium Predictions for Methane-Ethane Binary System Using PR and PC-SAFT Equations of State)

  • 박종기;최건형;이상규;양영명;조정호
    • 한국가스학회지
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    • 제14권2호
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    • pp.22-26
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    • 2010
  • 본 연구에서는 PC-SAFT 모델식을 활용하여 메탄과 에탄의 온도에 따른 증기압과 기상 및 액상에서의 밀도를 추산하였으며, 그 결과를 PR 상태방정식과 비교하였다. 기상의 밀도에 대해서는 두 모델이 모두 실험 데이터를 잘 추산하였으며, 액상의 밀도에 대해서는 PR 상태방정식보다 PC-SAFT 모델식이 좀 더 정확함을 알 수 있었다. 한편 메탄과 에탄 이성분계에 대한 기-액 상평형 실험 데이터에 대해서 두 모델식을 이용하여 추산하였는데 PC-SAFT 모델식이 PR 상태방정식보다 좀 더 우수함을 알 수 있었다.

물-수증기 계면을 통한 전기방전에 의한 수소 제조 (Hydrogen Generation by Electrical Discharge across Water-Vapor Interface)

  • 강구진;이수창;최용만;이웅무
    • 한국수소및신에너지학회논문집
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    • 제8권4호
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    • pp.155-160
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    • 1997
  • Generation of hydrogen and oxygen gas from water is mostly accomplished by electrolysis. In this report, a scheme is presented regarding the gas generation based on plasmolysis. Unlike electrolysis water dissociation by electrical discharge (plasmolysis) requires a high voltage to cause either electron emission or electron capture, and subsequent ionization of involved molecular species. When electrical discharge is initiated between electrodes separated by water-vapor interface, a very large electric field(~100kV/cm) is developed at the tip of the electrode placed in the vapor phase. It is found that the efficiency of plasmolysis depends on the polarity of the electrode placed in the vapor phase. Also presented is the scheme of hydrogen and oxygen generation by such electrical discharge.

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직접 분사식 연료 분무에서의 기.액상 분리 계측에 관한 연구 (An Experimental Study on the Analysis of Liquid/Vapor Phase in GDI Spray)

  • 장석형;김정호;박경석;진성호;김경수
    • 한국분무공학회지
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    • 제5권4호
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    • pp.57-65
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    • 2000
  • For this research an extension of the LIF technique that the LIEF(Laser Induced Exciplex Fluorescence) technique has been used LIEF technique is the unique method to allows the visualization of fuel vapor phase and liquid phase individually by capturing each signals of them. In this work performed that the basic procedure for advanced LIEF technique using TEA and benzene as dopants md high power KrF excimer laser to excite the dopants. Iso-octane is used as the fuel because it does not absorb light at the laser wavelength. The boiling point of benzene and TEA are $81^{\circ}C\;and89^{\circ}C$, respectively, in comparison to $99^{\circ}C$ for iso-octane. It is observed that the behavior and distribution of high pressed fuel injection from various test condition. The injection pressure is set as 3MPa. and 5MPa. And the ambient pressure of test chamber is atmospheric pressure and 1MPa, the ambient temperature of chamber is room temperature, $300^{\circ}C\;and\;500^{\circ}C$ to imitate the condition of GDI engine cylinder.

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Development of the vapor film thickness correlation in porous corrosion deposits on the cladding in PWR

  • Yuan Shen;Zhengang Duan;Chuan Lu ;Li Ji ;Caishan Jiao ;Hongguo Hou ;Nan Chao;Meng Zhang;Yu Zhou;Yang Gao
    • Nuclear Engineering and Technology
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    • 제54권12호
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    • pp.4798-4808
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    • 2022
  • The porous corrosion deposits (known as CRUD) adhered to the cladding have an important effect on the heat transfer from fuel rods to coolant in PWRs. The vapor film is the main constituent in the two-phase film boiling model. This paper presents a vapor film thickness correlation, associated with CRUD porosity, CRUD chimney density, CRUD particle size, CRUD thickness and heat flux. The dependences of the vapor film thickness on the various influential factors can be intuitively reflected from this vapor film thickness correlation. The temperature, pressure, and boric acid concentration distributions in CRUD can be well predicted using the two-phase film boiling model coupled with the vapor film thickness correlation. It suggests that the vapor thickness correlation can estimate the vapor film thickness more conveniently than the previously reported vapor thickness calculation methods.