• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.136.1-136.1
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• 2015

In the present study, UHF (320 MHz) in combination with RF (13.56 MHz) plasmas was used for the synthesis of hydrogenated silicon nitride (SiNx:H) films by PECVD process at low temperature. RF/UHF hybrid plasmas were maintained at a fixed pressure of 410 mTorr in the N2/SiH4 and N2/SiH4/NH3 atmospheres. To investigate the radical generation and plasma formation and their control for the growth of the film, plasma diagnostic tools like vacuum ultraviolet absorption spectroscopy (VUVAS), optical emission spectroscopy (OES), and RF compensated Langmuir probe (LP) were utilized. Utilization of RF/UHF hybrid plasmas enables very high plasma densities ~ 1011 cm-3 with low electron temperature. Measurements using VUVAS reveal the UHF source is quite effective in the dissociation of the N2 gas to generate more active atomic N. It results in the enhancement of the Si-N bond concentration in the film. Consequently, the deposition rate has been significantly improved up to 2nm/s for the high rate synthesis of highly transparent (up to 90 %) SiNx:H film. The films properties such as optical transmittance and chemical composition are investigated using different analysis tools.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.1083-1086
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• 2004

We applied the spray pyrolysis technique to prepare Mn-doped $BaMgAl_{10}O_{17}$ (BAM) particles with high photoluminescence, which could be used in the plasma display device as a green phosphor. Several preparation conditions were investigated in order to tail the vacuum ultraviolet (VUV) characteristics. Some portions of barium were replaced with strontium to improve the luminescent intensity of BAM:Mn particles under VUV excitation. The content of Mn and Sr was optimized to obtain high luminescent efficiency under VUV excitation. Finally, the optimized BAM:Mn green particles showed higher photoluminescence intensity than that of commercial $Zn_2SiO_4$ and comparable with commercial barium-aluminate phosphor.

• Textile Coloration and Finishing
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• v.19 no.1 s.92
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• pp.45-52
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• 2007

Polyacrylonitrile(PAN) fiber was treated with low-temperature plasmas of argon and oxygen for surface modification, and its surface chemical structure and morphology were examined by a field emission scanning electron microscope(FESEM) and a Fourier-transform infrared microspectroscopy(IMS). The argon-plasma treatment caused the only mechanical effect by sputtering of ion bombardment, whereas the oxygen plasma brought about a chemical effect on the PAN fiber surface. The experimental evidences strongly suggested that cyclization of nitrile group and crosslinking were likely to occur in the oxygen-plasma treatment. On the other hand, with the argon-plasma treatment, numerous my pits resulted in ranging from several tens to hundreds nanometers in radius. The plasma sensitivity of functional groups such as C-H, $C{\equiv}N$, and O-C=O groups in the PAN fiber was dependent on their chemical nature of bonding in the oxygen-plasma, in which the ester group was the most sensitive to the plasma. Vacuum-ultraviolet(VUV) radiation emitted during plasma treatment played no substantial role to alter the surface morphology.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.7
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• pp.1275-1281
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• 2007

The discharge phenomena in a flat fluorescent lamp for the backlight unit of liquid crystal displays are simulated by sung a two-dimensional fluid model. The numerical methods for the calculation of plasma dynamics and the radiation transport are introduced for the discharge simulation and for the transmission of the vacuum ultraviolet lights. The simulation results are presented to compare the luminance and the luminance efficacy with the variation of gas pressure, gas mixture ratio, driving voltage, and frequency.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.130-133
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• 2006

In order to study the relationship between the discharge characteristics of an ac PDP and the surface conductivity of MgO thin film, the surface current across a ring shaped MgO film was measured by exposure to monochromatic vacuum ultraviolet from the synchrotron radiation source whose wavelength ranges from 60nm to 240nm $(5.5eV{\sim}25eV)$. The experimental results show that the surface current begins to increase rapidly at the photon energy of about 9 eV which might correspond to the valence band edge of MgO. The difference in the surface current level correlate well with the differences in the preparation method of MgO films and their respective discharge characteristics such as the firing, minimum sustain voltages, address voltage margin and address discharge delay time.

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.1001-1004
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• 2003

We applied the spray pyrolysis technique to prepare fine $YBO_{3}$:Tb particles with high photoluminescence, which could be used in the plasma display device as a green phosphor. Several preparation conditions were investigated in order to tail the vacuum ultraviolet characteristics of $YBO_{3}$:Tb particles when they were prepared by the spray pyrolysis. As a result, the optimized $YBO_{3}$:Tb particles showed the high photoluminescence intensity as well as fine size in comparison with the commercial one.

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.1042-1044
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• 2003

The photoluminescence (PL) properties are studied for a new phosphor $BaZr(BO_{3})_{2}$ doped with $Eu^{3+}$ activator ion. The excitation spectrum shows strong absorption in the vacuum ultraviolet (VUV) region with an absorption band edge at 200 nm. The PL spectrum shows the strongest emission at 615 nm corresponding to the electric dipole $^{5}D_{0}\;{\rightarrow}\;^{7}F_{2}$ transition of $Eu^{3+}$, which results in a good color purity.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.281-281
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• 2010

In this study, ZnO nanorod arrays are grown on organic substrates by hydrothermal method which requires a low temperature, simple process, and no vacuum. The structure properties of ZnO nanorods were examined by field emission scanning electron microscopy and X-ray diffraction. To detect the optical transmission, ultraviolet visible spectrophotometer was also used. From results, the ZnO nanorods were grown the horizontal growth on the organic substrates had the length of over $10\;{\mu}m$. After deposition of ZnO seed layer, the ZnO nanorod arrays had uniformity orientation and length.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.792-794
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• 2002

Uniform cylinder-shaped precursors for (Y,Gd)$BO_3$:Eu phosphors were prepared by urea hydrolysis reaction. After heating the precursors at lower temperature than general synthetic methods, the phosphor powders were well dispersed and held their original shapes. Their emissions under vacuum-ultraviolet (VUV) excitation appeared with the peaks at 593nm due to magnetic dipole transition from $^5D_0$ to $^7F_1$, 612nm and 627nm due to electric dipole transition from $^5D_0$ to $^7F_2$

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.257-259
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• 2002

As a new host material for a red phosphor for PDP applications, has studied (Y,Gd)$Al_3(BO_3)_4$ which gives non-centrosymmetric sites for $Eu^{3+}$ activators. Vacuum ultraviolet (VUV) excitation spectrum of new red phosphor (Y,Gd)$Al_3(BO_3)_4$:$Eu^{3+}$ has two broad bands. One band with the absorption edge at ca. 168 nm is the band-gap absorption of aluminoborate and the other broad band centered 240 nm is the charge transfer transition between $Eu^{3+}$ and the neighboring oxygen anions. The PL spectrum shows the strongest emission at 617 nm due to the electric dipole $^5D_0{\rightarrow}^7F_2$ transition of $Eu^{3+}$, whose luminescent chromaticity is (0.67, 0.33).