• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.129-129
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• 2015

Dry etcher, PECVD등의 플라즈마 공정 장비의 구조물에는 유전체로 절연된 금속판들이 사용된다. 플라즈마 이론을 보면 이들 표면의 전위는 양전하 플럭스와 음전하 플럭스가 같아서 순전류가 0이 되는 부유 전위를 갖는다. 금속과 같은 전도체의 표면은 모두 같은 전위를 가져야 한다. 일반적인 플라즈마 시뮬레이션 소프트웨어에는 이런 경계 조건이 선택 가능하지 않다. ESI사의 CFD-ACE+의 사용자 루틴 개발 기능을 이용하여 Fortran90문법으로 경계면 최인접 셀의 중심에서 구한 전자 온도와 경계면의 이온 입사 플럭스로 가중평균을 구한 이온 질량을 맥스웰분포를 가정한 부유 전위식에 대입하여 시뮬레이션을 CCP에서 구현하였다. 원형 챔버의 가장자리에 떠 있는 사각 링 전극을 가정하고 이 전극 표면이 접지 전위일때, 유전체 일때, 본 연구에서 개발한 루틴을 적용한 결과를 Ar CCP에 대해서 비교 분석하였다.

• Journal of the Korean Vacuum Society
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• v.8 no.2
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• pp.148-152
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• 1999

the low temperature magnetoresistance effect, electron mobilities, and 2 Dimensional electron Gases (2DEG) properties were investigated in $Si/Si_{1-x}Ge_x$ quantum well devices. N-type $Si/Si_{1-x}Ge_x$ structures were fabricated by utilizing a gas source Molecular Beam Epitaxy (GSMBE). Thermal oxidation was carried out in a dry O atmosphere at $700^{\circ}C$ for 7 hours. Electron mobilities were measured by using a Hall effect and a magnetoresistant effect at low temperatures down to 0.4K. Pronounced Shubnikov-de Haas (SdH) oscillations were observed at a low temperature showing two dimensional electron gases (2DEG) in s tensile strained Si quantum well. The electron sheet density (ns) of $1.5\times10^{12}[\textrm{cm}^{-2}]$ and corresponding electron mobility of 14200 $[\textrm{cm}^2V^{-1}s^{-1}]$ were obtained at a low temperature of 0.4K from $Si/Si_{1-x}Ge_x$ structures with thermally grown oxides.

• Journal of the Korean Vacuum Society
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• v.10 no.4
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• pp.411-415
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• 2001

Using the plasma that we developed to generate a low-temperature plasma at atmospheric pressure, we have investigated the etching possibility of tin oxide $(SnO_2)$ thin films. Hydrogen and methane radicals generated from the plasma were observed and their intensity was found to be dependent on the cathode material by an analysis with optical emission spectroscopy as well as by the plasma impedance. The etching ability of this plasma was evaluated by an emission intensity as well as by the evaluation of impedance using a plasma I-V curve.

• Tribology and Lubricants
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• v.14 no.3
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• pp.1-6
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• 1998

An experimental study was performed to discover the effect of environmental conditions on the rolling resistance behavior of pure silver and lead coated 52100 bearing steel. Pure silver and lead coatings were produced by a thermal evaporation coating method. Experiments using a thrust ball bearing-typed rolling test-rig were performed under vacuum, dry air and controlled humidity conditions. Results showed that agglomeration of particles were suppressed in vacuum environment and resulted in low and stable rolling resistance by shakedown phenomena. Also, humidity related closely to the agglomeration of particles and the rolling resistance after the failure of coated layer.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.600-600
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• 2013

We have fabricated Cr nanodot Schottky diodes utilizing AAO templates formed on n-Si substrates. Three different sizes of Cr nanodots (about 75.0, 57.6, and 35.8 nm) were obtained by controlling the height of the AAO template. Cr nanodot Schottky diodes showed a rectifying behavior with low SBHs of 0.17~0.20 eV and high ideality factors of 5.6~9.2 compared to those for the bulk diode. Also, Cr nanodot Schottky diodes with smaller diameters yield higher current densities than those with larger diameters. These electrical behaviors can be explained by both Schottky barrier height (SBH) lowering effects and enhanced tunneling current due to the nanoscale size of the Schottky contact. Also, we have fabricated Cr-Si nanorod Schottky diodes with three different lengths (130, 220, and 330 nm) by dry etching of n-Si substrate. Cr-Si nanorod Schottky diodes with longer nanorods yield higher reverse current than those with shorter nanorods due to the enhanced electric field, which is attributed to a high aspect ratio of Si nanorod.

• Journal of the Korean Vacuum Society
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• v.5 no.2
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• pp.169-174
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• 1996

The applications of the high density plasma sources to the etching in semiconductor fabrication process are actively studied because of the more strict requirement from the dry etching process due to shrinking down of the critical dimension. But in the oxide etching with the high density plasma sources, abundant fluorine atoms released from the flurocarbon feed gas make it difficult to get the highly selective $SiO_2/Si$ etching. In this study, to improve the $SiO_2/Si$ etch selectivity through the control of the radical loss channels, we propose the wall heating , one of methods of controlling loss mechanisms. With appearance mass spectroscopy(AMS) and actinometric optical emission spectroscopy(OES), the increase of both radicals impinging on the substrate and existing in bulk plasma, and the decrease of the fluorine atom with wall temperature are observed. As a result, a 40% improvement of the selectivity was achieved for the carbon rich feed gas.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.04a
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• pp.47-54
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• 1998

An experimental study was performed to discover the effect of environmental conditions on the rolling resistance behavior of pure silver and lead coated 52100 bearing steel. Pure silver and lead coating were produced by a thermal evaporation coating method. Experiments using a thrust ball bearing-typed rolling test-rig were performed under vacuum, dry air and controlled humidity conditions. Results showed that agglomeration of particles were prevented in vacuum environment and as it showed low and stable rolling resistance by shakedown phenomena. Also, humidity relates closely to the agglomeration of particles and increased the rolling resistance after the failure of coated layer.

• Plant Resources
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• v.6 no.1
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• pp.53-56
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• 2003

To develop optimal storage method of root of Anemarrhena Rhizome, which has been grown as major cultural herbal medicine material, root of Anemarrhena Rhizome was stored for 10 months with different packing materials and sealing methods. The loss in dry weight as influenced by packing materials and sealing methods was the lowest at vacuum packing and followed by complete sealing methods with transparent polyethylene film. The rot ratio of root during the storage period was not significantly different among packing materials but was significantly different among sealing conditions. Conclusively vacuum packing and complete sealing with polyethylene film appears to be optimal for storage of Anemarrhena Rhizome.

• Plant Resources
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• v.5 no.2
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• pp.114-117
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• 2002

To develop optimal storage method of root of Peucedani Radix, which has been grown as major cultural herbal medicine material, root of Peucedani Radix was stored for 10 months with different packing materials and sealing methods. The loss in dry weight as influenced by packing materials and sealing methods was the lowest at vacuum packing and followed by complete sealing methods with transparent polyethylene film. The ratio of root rot during the storage period was not significantly different between packing materials but was significantly different between sealing conditions. Conclusively vacuum packing and complete sealing with polyethylene film appears to be optimal for storage of Peucedani Radix.

• Proceedings of the KIEE Conference
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• 1998.07d
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• pp.1343-1345
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• 1998

This work was carried out to develop a pattern on the nanometer scale using plasma polymerization and plasma etching. This study is also aimed at developing a resist for the nano process and a vacuum lithography process. The thin films of plasma polymerization were fabricated by the plasma polymerization of inter-electrode capacitively coupled gas flow system. After delineating the pattern at accelerating voltage of 30[kV], ranging the dose of $1-500[{\mu}C/cm^2$], the pattern was developed with dry type and formed by plasma etching.