• Title/Summary/Keyword: Vacuum degree

검색결과 241건 처리시간 0.026초

WC/C 박막 코팅의 환경변화에 따른 트라이볼로지적 특성 (Tribological characteristics of WC/C multilayer films with various environments)

  • 이은성;김석삼;김종국
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2001년도 제34회 추계학술대회 개최
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    • pp.78-87
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    • 2001
  • The friction and wear behaviors of WC/C multilayer coating were investigated by using a pin on disk type tester. The experiment was conducted by using silicon nitride (S $i_{3}$ $N_{4}$) as a pin material and WC/C multilayer coating on bearing steel (STB2) as a disk material, under various environments that are atmospheric conditions of high vacuum( 1,3$\times$10$^{-4}$ Pa), medium vacuum( 1.3$\times$10$^{-l}$Pa). ambient air( 10$^{5}$ pa)(3 types) and relative humidity(2~98%) conditions. The results showed that WC/C coating fracture was suddenly increased with increasing degree of vacuum, because of high adhesion. So, WC/C coating could not be displayed their ability as solid lubricant. WC/C coating could be displayed better abilitv as solid lubricant with increasing relative humidity. because of oxide film, size and shape of wear debris. The friction coefficient and specific wear rate became better about RH 50%.%.

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비정질 다이아몬드 코팅을 위한 자장여과 아크소스의 동작 특성에 관한 연구 (Operation Characteristic of Filtered Vacuum Arc Source for Amorphous Diamond Coating)

  • 김종국;이구현
    • 연구논문집
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    • 통권30호
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    • pp.147-157
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    • 2000
  • The filtered vacuum arc source (FVAS), which is adopted by magnetic filtering methode to remove the macro-particle in vacuum arc plasma, was composed of a torus structure with bending angle of 60 degree. The radius of torus was 266 mm, the radius of plasma duct was 80 mm and the total length was 600 mm. The magnet parts were consisted of one permanent magnet, one magnetic yoke and five solenoid magnets. The plasma duct was electrically isolated from the ground so that a bias voltage could be applied. The baffles inside plasma duct were installed in order to prevent the recoil effect of macro-particles. Graphite was used as the cathode material to coat the amorphic diamond film and its diameter was 80 mm. The amorphic diamond film attracts much attention due to its excellent mechanical, optical and tribological properties suitable for wide range of applications. The effects of solenoid magnet in plasma extraction were studied by computer simulation and experiment using Taguchi's method. The source and extraction magnet affected the arc stabilization. The extraction beam current was maximized with low value of the source magnet current and high value of the filtering magnet current. Optimum deposition condition was obtained when the currents of arc discharge, source, extraction, bending, deflection and outlet magnet were 30 A, 1 A, 3 A, 5 A, and 5 A, respectively.

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Nanowire Patterning for Biomedical Applications

  • Yun, Young-Sik;Lee, Jun-Young;Yeo, Jong-Souk
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.382-382
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    • 2012
  • Nanostructures have a larger surface/volume ratio as well as unique mechanical, physical, chemical properties compared to existing bulk materials. Materials for biomedical implants require a good biocompatibility to provide a rapid recovery following surgical procedure and a stabilization of the region where the implants have been inserted. The biocompatibility is evaluated by the degree of the interaction between the implant materials and the cells around the implants. Recent researches on this topic focus on utilizing the characteristics of the nanostructures to improve the biocompatibility. Several studies suggest that the degree of the interaction is varied by the relative size of the nanostructures and cells, and the morphology of the surface of the implant [1, 2]. In this paper, we fabricate the nanowires on the Ti substrate for better biocompatible implants and other biomedical applications such as artificial internal organ, tissue engineered biomaterials, or implantable nano-medical devices. Nanowires are fabricated with two methods: first, nanowire arrays are patterned on the surface using e-beam lithography. Then, the nanowires are further defined with deep reactive ion etching (RIE). The other method is self-assembly based on vapor-liquid-solid (VLS) mechanism using Sn as metal-catalyst. Sn nanoparticle solutions are used in various concentrations to fabricate the nanowires with different pitches. Fabricated nanowries are characterized using scanning electron microscopy (SEM), x-ray diffraction (XRD), and high resolution transmission electron microscopy (TEM). Tthe biocompatibility of the nanowires will further be investigated.

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건조 방법에 따른 계피 Extract의 품질 변화 (Quality Change of Cinnamon Extract Prepared with Various Drying Methods)

  • 김나미;김동희
    • 한국식품영양학회지
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    • 제13권2호
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    • pp.152-157
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    • 2000
  • In order to select the optimum drying method for the production of cinnamon extract, water extract and 70% ethanol extract of cinnamon were prepared. And then several drying method of oven drying, vacuum evaporation, spray drying and freeze drying were performed. Content of cinnamic acid, cinnamic aldehyde, eugenol, tannin and free sugar, and antioxidant activity, degree of browning, pH, color value, turbity and solubility were compared. In water extract, contents of cinnamic acid, cinnamic aldehyde, eugenol were 29.45mg/100g, 94.86mg/100g, 120.75mg/100g and decreased to 4.76%∼44.21%, 5.30%∼48.05%, 3.66%∼21.83% by oven dyring, vaccum drying, spray drying respectively, but freeze drying showed a little decrease of those components. In 70% ethanol extract, effectual components decreased to 76.05%∼88.38% and 26.86%∼78.76% by freeze drying and vacuum evaporation respectively. Antioxidant activity decreased by drying and decreasing rate in 70% ethanol extract was lower than water extract. Degree of browning increased as the drying temperature increased. Tannin and free sugars were little affected by drying temperature. Solubility decreased in oven drying and 70% ethanol extract. Overall data suggested that optimum drying methods of cinnamon extract were freeze drying in case of water extract and freeze drying and vaccum drying in case of 70% ethanol extract.

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Frequency effect of TEOS oxide layer in dual-frequency capacitively coupled CH2F2/C4F8/O2/Ar plasma

  • Lee, J.H.;Kwon, B.S.;Lee, N.E.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.284-284
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    • 2011
  • Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

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AZO 투명전극의 결정성과 광학적 특성 (Crystallization and Optical Properties of Transparent AZO Thin Films)

  • 오데레사
    • 한국진공학회지
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    • 제21권4호
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    • pp.212-218
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    • 2012
  • RF 마그네트론 스퍼터에 의해 만들어진 AZO 박막을 기판의 화학적 특성에 따른 광학적 특성에 대하여 조사하였다. 기판은ICP-CVD방법으로 제작된 SiOC 박막으로 화학적 특성의 변화를 관찰하기 위해서 산소와 아르곤(DMDMOS)가스의 유량비를 다르게 하여 증착하였다. 아르곤의 유량이 증가할수록 Si-O 결합이 증가하였으며, 비정질구조가 증가되었다. 비정질도가 높은 SiOC 박막 위에 성장된 AZO 박막의 거칠기는 감소하였으며, 표면의 평탄도가 개선되었다. 더불어 비정질도가 높은 SiOC박막 위에 성장된 AZO 박막에서 자외선 영역의 방사 강도가 제일 높았다.

수경성 무기재료의 수화도 측정에 대한 건조방법의 영향: 2) 알칼리 활성 슬래그 (Influence of Drying Methods on Measurement of Hydration Degree of Hydraulic Inorganic Materials: 2) Alkali-activated slag)

  • 이효경;송금일;송진규;김형기
    • 자원리싸이클링
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    • 제27권1호
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    • pp.106-117
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    • 2018
  • 본 연구는 수경성 무기재료를 사용한 배합의 고정수량 측정을 위해 적절히 사용할 수 있는 건조방법을 찾기 위해 수행되었으며, 제1보에서는 보통 포틀랜드 시멘트, 그리고 본 제 2보에서는 알칼리 활성 슬래그의 경우에 대해 다루었다. 다양한 w/b, 알칼리 활성화제 종류 및 양을 갖는 알칼리 활성 슬래그에 대해 진공건조 및 오븐건조, 이 둘의 조합 그리고 작열법이 사용되었다. 실험결과, 진공건조 후 오븐건조를 사용한 경우 비록 수화물의 결정수 일부가 분해되지만 자유수분의 완전한 증발이 가능하여 그 결과값의 편차가 작았으며, 따라서 AAS의 수화도를 정량평가하기 위한 단순하고 쉬운 고정수량 측정방법으로 적합하다고 판단하였다.

Effects of pressure during the synthesis of petroleum pitch precursors in open and closed systems

  • Choi, Jong-Eun;Ko, Seunghyun;Kim, Jong Gu;Jeon, Young-Pyo
    • Carbon letters
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    • 제25권
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    • pp.95-102
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    • 2018
  • We examined the pressure effects on petroleum pitch synthesis by using open and closed reaction systems. The pressure effects that occur during the pitch synthesis were investigated in three pressure systems: a closed system of high pressure and two open systems under either an atmosphere or vacuum. A thermal reaction in the closed system led to the high product yield of a pitch by suppressing the release of light components in pyrolysis fuel oil. Atmospheric treatment mainly enhanced the polymerization degree of the pitch via condensation and a polymerization reaction. Vacuum treatment results in a softening point increase due to the removal of components with low molecular weights. To utilize such characteristic effects of system pressure during pitch preparations, we proposed a method for synthesizing cost-competitive pitch precursors for carbon materials. The first step is to increase product yield by using a closed system; the second step is to increase the degree of polymerization toward the desired molecular distribution, followed by the use of vacuum treatment to adjust softening points. Thus, we obtained an experimental quinoline insolubles-free pitch of product yield over 45% with softening points of approximately $130^{\circ}C$. The proposed method shows the possibility to prepare cost-competitive pitch precursors for carbon materials by enhancing product yield and other properties.

시차주사열량계를 이용한 진공백 성형 프리프레그의 경화 거동 연구 (Study of Cure Kinetics of Vacuum Bag Only Prepreg Using Differential Scanning Calorimetry)

  • 현동근;이병언;신도훈;김지훈
    • Composites Research
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    • 제33권2호
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    • pp.44-49
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    • 2020
  • 본 연구에서는 시차주사 열량계(differential scanning calorimetry, DSC)를 이용하여 진공백 성형 공정에 사용되는 탄소 섬유 프리프레그의 경화 거동을 연구하였다. 프리프레그를 이용한 동적주사 시험을 통해 전체 발열량(ΔHtotal = 537.1 J/g)을 측정하였고, 130℃~180℃에서 등온주사 시험을 실시하였다. 등온주사 시험의 결과는 온도가 올라감에 따라 발열 반응이 증가되는 것을 확인하였다. 시험 결과를 토대로 수지의 경화 거동을 분석하기 위하여 Kratz 모델을 적용하였다. 서로 다른 경화 사이클로 제작된 평판의 경화도를 경화 예측 모델과 실험값을 비교하였다. 경화 예측 모델은 실험값 대비 3.4% 이하의 오차율을 보여 결과가 잘 부합하는 것을 확인하였다.

A Method to Monitor Vacuum Degree Using Capacitive Partial Discharge Coupler

  • Sun, Jong-Ho;Youn, Young-Woo;Hwang, Don-Ha;Yi, Sang-Hwa;Kang, Dong-Sik
    • Journal of Electrical Engineering and Technology
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    • 제7권6호
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    • pp.959-964
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    • 2012
  • Internal pressure of vacuum interrupter (VI) is one of the most important parameters in VI operation and may increase due to the outgassing from the materials inside VI or gas permeation through metal flange or ceramic vessel. The increase of the pressure above a certain level leads to the failures of switching or insulation. Therefore, an effective pressure check of VI is essential and an analysis of partial discharge (PD) characteristics is an effective monitoring method to identify the degree of the internal pressure of VI. This paper introduces a research work on monitoring the internal pressure of VI by analyzing PDs which were measured using a capacitive PD coupler. The authors have developed cost effective capacitive coupler based on the ceramic material that has an excellent insulation properties and the main component of the capacitive coupler is made by SrTiO3. Detectable internal pressure range and distinguishability of the internal pressure of VI were investigated. From the PD tests results, the internal pressure range, from $10^{-2}$ torr to 500 torr, can be monitored by PD measurements using the capacitive coupler and PD inception voltage (PDIV) follows the Paschen's law. In addition, rise time of PD pulse at 13.2kV decreases with the increase of the internal pressure of VI.