• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.153-153
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• 2000

Si 산화는 반도체 공정상 필요한 과정으로 산업적으로나 학문적으로 중요하고 많이 연구되었다. 이중에서 Si(1110-7x7표면에서 초기 흡착된 산소는 준안정적 상태로 존재하며 표면온도, 산소의 노출량 그리고 진공도에 따라 그 수명이 제한된다. 이러한 준안정적 상태의 산소의 화학적 성질은 여러 표면분석장비가 동원되어 연구되었으나 아직까지 논쟁이 되고 있다. 이 경우 산소가 어떤 상태로 존재하는가는 표면화학종을 검출함으로서 해결될 수 있다. 저에너지 Cs+ 이온 반응성 산란은 이러한 요구를 충족시킬수 있는 가장 적합한 실험 방법중의 하나이다. 저에너지 Cs+ 이온 산란의 특징 중의 하나는 입사된 Cs+ 이온이 표면에 흡착된 화학종과 충돌후 탈착되면서 반응을 하여 송이 이온을 형성한다는 것이다. 이 송이 이온을 관측함으로서 표면에 존재하는 화학종을 알아 낼 수 있다. 이에 산소가 흡착된 Si(111)-7x7 표면에서의 산소의 준안정적 상태가 저에너지 Cs+ 이온 산란 실험을 통하여 연구되었다. 실험은 0.2-2L(1Langmuir = 10-6 Torr x 1 sec) 산소 노출량과 -15$0^{\circ}C$ - $25^{\circ}C$의 표면온도 그리고 5eV - 20eV의 Cs+ 이온 충돌에너지에서 CsSiO+ 이온이 유일한 생산물로서 검출되었다. CsSiO+ 이온은 입사된 Cs+ 이온과 표면에 존재하는 SiO 분자가 충돌 후 반응하여 탈착된 것으로 생각된다. 이것은 낮은 산소 노출량 즉, 초기 산화 단계에서 SiO가 표면에 존재한다는 것을 의미한다. 즉, 산소 분자는 산화단계의 초기에 해리되어 표면에 흡착되고 선구물질인 SiO를 형성함을 제시한다. 최근의 이론적 계산인 density functional calculation에서도 산소분자가 Si(111)-7$\times$7 표면의 준안정적 산화상태의 선구물질일 가능성을 배제한다. 이는 본 저에너지 Cs+ 이온 반응성 산란실험을 뒷받침하는 계산 결과이다. 높은 Cs+ 이온 충돌에너지에서 CsSi+, Si+, SiO+, Si2+, Si2O+ 등이 추가로 검출되었다. 이는 CsSi 이온을 제외하고 수 keV의 충돌에너지를 사용하는 이차 이온 질량 분석법과 비슷한 결과이다.

• Journal of the Korean Vacuum Society
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• v.19 no.6
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• pp.467-474
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• 2010

Packet propagation and absorption for the 28 GHz superconducting ECRIS under developing by KBSI Pusan center is analyzed with limited parameter range. The microwave power generated by 28 GHz gyrotron is axially injected to the plasma cavity through waveguide system. According to the analytical ray tracing calculation, the wave packet launched quasi-longitudinally at a high magnetic field side changes its direction from outward to inward as it is approaching resonance layer. Therefore, initially diverging wave does not likely hit a conducting surface before absorbing by electron cyclotron resonance. Also, absorption by plasma with moderate electron density is so strong that reflection by an extraction plate may not be expected.

• Journal of the Korean Society for Heat Treatment
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• v.37 no.3
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• pp.121-127
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• 2024

We investigate the effect of T6 heat treatment on the microstructure and mechanical properties of AA365 (Al-10.3Si-0.37Mg-0.6Mn-0.11Fe, wt.%) alloy fabricated by vacuum-assisted high pressure die casting by means of thermodynamic calculation, X-ray diffraction, scanning and transmission electron microscopy, and tensile tests. The as-cast alloy consists of primary Al (with dendrite arm spacing of 10~15 ㎛), needle-like eutectic Si, and blocky α-AlFeMnSi phases. The solution treatment at 490 ℃ induces the spheroidization of eutectic Si and increase in the fraction of eutectic Si and α-AlFeMnSi phases. While as-cast alloy does not contain nano-sized precipitates, the T6-treated alloy contains fine β' and β' precipitates less than 20 nm that formed during aging at 190℃. T6 heat treatment improves the yield strength from 165 to 186 MPa due to the strengthening effect of β' and β' precipitates. However, the β' and β' precipitates reduce the strain hardening rate and accelerate the necking phenomenon, degrading the tensile strength (from 290 to 244 MPa) and fracture elongation (from 6.6 to 5.0%). Fractography reveals that the coarse α-AlFeMnSi and eutectic Si phases act as crack sites in both the as-cast and T6 treated alloys.

• Journal of the Korean Vacuum Society
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• v.15 no.1
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• pp.103-109
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• 2006

A target for a high-brightness microfocus x-ray tube, which is based on carbon nanotubes (CNT) as electron source, is designed. The x-ray tube has the following specifications: brightness of $1\times10^{11}phs/s.mm^2. mrad^2$, spot size $\~5{\mu}m$, and average x-ray energy of $20\~40 keV$. In order to meet the specifications, the design parameters of the target, such as configuration, material, thickness of the target as well as the required beam current, were optimized using computer code MCNPX. The design parameters were determined from the calculation of both x-ray spectrum and intensity distribution for a transmission type configuration. For the thin transmission type target to withstand vacuum pressure and localized thermal loading, the structural stability and temperature distribution were also considered. The material of the target was selected as molybdenum(Mo) and the optimized thickness was $7.2{\mu}m$ to be backed by $150{\mu}m$ beryllium (Be). In addition, the calculations revealed that the maximum temperature of the transmission target can be maintained within the limits of stable operation.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.15 no.1
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• pp.1-10
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• 2003

In this paper, the laboratory test results with middle-sired ,soil box test in modeling the in-situ installing of horizontal drains are discussed the estimation of the optimum negative pressure. The test was carried out in the different vacuum pressure conditions together with the measurement for the settlement and volume change of drained water by the installed drains during the consolidation process. After the test, the water content was measured to both directions of lateral distance from the drain and depth of the soil, to find out the distribution of ground improvement and strength enhancement. From the analysis on the distribution of water content, the gradual application of vacuum pressure to higher level by pre-determined stages starting from low vacuum pressure is found to be effective and desirable. In the comparison of the degrees of consolidation with elapsed time, the calculated value by the prediction method based on the Barren's conventional theory showed a good agreement with the measured value. With this, It is positively considered that the applicability of the prediction method based on Barren's theory to the practical design of horizontal drains can be justified such as in the calculation of drain spacing and consolidation period.

• Korean Chemical Engineering Research
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• v.57 no.3
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• pp.378-386
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• 2019

In the present paper we report the calculation results of operation energy consumption for dissolved ions concentration technologies using vacuum evaporation (VE) and hydrate formation. Calculations were conducted assuming the tenfold concentration of saline water (0.35 wt% NaCl solution) of 1 mol/s at room temperature and atmospheric pressure employing vacuum evaporation at $69^{\circ}C$ and 30 kPa and hydrate-based concentration using $CH_4$, $CO_2$ and $SF_6$ as guest molecules. Operation energy consumption of VE-based concentration resulted in 47 kJ/mol, whereas those of hydrate-based concentration were 43, 32, and 28 kJ/mol for $CH_4$, $CO_2$ and $SF_6$ hydrates, respectively. We observe that hydrate-based concentration can a competitive option for dissolved ions recovery from energy consumption standpoint. However, the selection of guest gas is very critical, since it accordingly determines the hydration number, the hydrate formation energy, gas compression energy, etc. The selection of guest gas, separation of concentrated brine and water phases, and the enhancement of hydrate formation rate are the key factors for the commercialization of hydrated-based technology for concentrating dissolved ions.

• Composites Research
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• v.35 no.1
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• pp.42-46
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• 2022

In this study, when the carbon fiber composite was manufactured, the correlation between the porosity and mechanical properties according to the number of glass fiber felts laminated together and the stacking sequence was confirmed. The carbon fiber composite was manufactured by stacking glass fiber felts, which are highly permeable materials, and using vacuum assisted resin transfer molding (VARTM). Porosity was measured by photographing the cross-section of the specimen with an optical microscope and then using porosity calculation code of MATLAB, and mechanical properties were measured for tensile strength, modulus by tensile test. Furthermore, Pearson correlation coefficient between porosity and mechanical properties was calculated to confirm the correlation between two variables. As a result, the number of glass fiber felt increased and the distance from the center of laminated composites increased, the porosity increasing were confirmed. In addition, tensile strength/modulus showed a weak positive correlation with porosity. Also, in order to confirm the effect of only porosity on tensile strength and modulus, mechanical properties calculated by CLPT (Classical Laminate Plate Theory) and experimental values were compared, and the difference in tensile strength showed a strong positive correlation with porosity and the difference in modulus showed a weak positive correlation with porosity.

• KEPCO Journal on Electric Power and Energy
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• v.2 no.3
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• pp.425-431
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• 2016

Supply Capability of the generator, if the maximum demand occurs, refers to the maximum power that can be stably supplied and it is possible to maintain stable power supply to be greater than actual load. However, unexpected power demand and reduction in supply Capability due to stop of unexpected generator in operation can temporarily make a big chaos in power system. In fact, due to a lack of power supply Capability in the country, enforced emergency load adjustment to the September 15, 2011, the circulation power outage has occurred in several cities. As the result, interrupted operation of the elevator and stopped hospital medical equipment led to a great deal of trouble to people's lives, causing a social problem. At that time, it was found that a failed frequency control because of smaller actual supply Capability than that of predicted. The difference was about 1,170 MW with Gas turbine power plant. By accurately calculating the generator supply capability, we can not only grasp the power reserve rate, but also correspond to the time of power supply instability.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.4
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• pp.715-722
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• 1998

A large electric system of a vacuum circuit breaker(VCB) has been studied for the electro-thermal analysis by finite element methods. Since the heat generation in VCB causes not only energy loss but deterioration of the VCB system with oxidization of parts, the overheating of the system must be prevented. For the analysis, a finite element formulation is derived for both electric analysis and thermal analysis that are coupled together. Two sets of formulations are uncoupled after finite dimensional approximation. First, the electric potential is obtained for the entire field and scaled to the given electric current. The electric field obtained is then used to calculate the heat generation in the VCB system including contacts and connections for the calculation of the temperature distribution in the entire domain. The finite element analysis is carried out to study the effect of shapes and locations of contacts and connections. From the results, the existing VCB has been modified to enhance its capacity with reduction of heat generation and temperature elevation.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.8 no.2
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• pp.219-229
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• 1996

In the free molecular flow range, the pumping performance of a turbomolecular pump has been predicted by calculation of the transmission probability employing the integral method and the test particle Monte-Carlo method. The velocities of molecules incident upon a moving blade are given by the random numbers, which are sampled from the Maxwell molecular velocity distribution function. The present results agree quantitatively with the previous known numerical results. For a multi-stage pump, the velocity profile of molecules between two blade rows is not Maxwell distribution. In this case, the Monte-Carlo method is employed to calculate the overall transmission probability for the entire set of blade rows. When the results of the approximate method combining the single stage solutions are compared with those of the Monte-Carlo method for the pump having six rows at C=0.6, the approximate method overestimates as much as 36% in the maximum compression ratio and 19% in the maximum pumping speed than does the Mote-Carlo method.