• 한국정밀공학회지
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• 제23권10호
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• pp.103-112
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• 2006

This paper describes a theoretical analysis and experimental verification on the performances of a vacuum-compatible air bearing, which is designed with a cascaded exhaust scheme to minimize the air leakage in a vacuum environment. The design of the vacuum-compatible air bearing equipped with the differential exhaust system requires great care because several design parameters, such as the number of exhaust stages, diameter of exhaust tube, pumping speed of a vacuum pump, and bearing clearance greatly influence the air leakage and thus degree of vacuum. In this study, a performance analysis method was proposed to estimate the performances of the air bearing, such as load capacity, stiffness, and air leakage. Results indicate that the load capacity and stiffness of the air bearing was improved as its boundary pressure, which was determined by the $1^{st}$ exhaust method, was lowered, and the dominant factors on the chamber's degree of vacuum were the number of exhaust stages, exhaust tube diameter and bearing clearance. A vacuum chamber and air bearing stage using porous pad were fabricated to verify the theoretical analysis. The results demonstrate that chamber pressure up to an order of $10^{-3}$ Pa was achieved with the air bearing stage operating inside the chamber, and this analysis method was valid by comparing predicted values with experimental data, for the mass flow rates from the porous pad, and pressures at each exhaust port and chamber, respectively.

• 한국유체기계학회 논문집
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• 제14권3호
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• pp.23-27
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• 2011

Due to a roots type medium vacuum pump is operated in condition of $1{\sim}10^{-3}$ torr vacuum, it could be applied for production and process of industrial parts, such as precise processing, vaporization, enrichment, separation, casting, metaling, welding, transportation. Therefore, the demand of this pump is increasing nowadays in our industrial markets of semiconductor, electric, electronic, automobile, material, environmental and transporting industries. However, the pumps are almost imported, because the domestic pumps are inferior in fields of vacuum range as under $10^{-1}$torr, relevant techniques(design, fabrication, casting, test, etc.) to the imported ones. In this study, essential parts of the development pump are designed with using of CFD and 3D decodes, FEM for analysing strength and deformation, generated heat, vibration and noise control, and are casted with using of mechanochemistry techniques for decreasing of weights, increasing of heat resistances and abrasion durability of materials for pump caing and impellers especially. Besides, in order to achieve ultimate vacuum around $10^{-3}$torr, this pump is composed of 6 stages, among which 1st stage is operated separately from remained stages. Additionally, a test rig for prototype pumps(300$m^3/h$ and 2,500$m^3/h$) is designed and procured as to apply for multi-staged rootz type vacuum pump, with modification of the test method recommended by KS B 6314 "Positive-displacement oil-sealed rotary vacuum pumps".

• 한국철도학회논문집
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• 제14권2호
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• pp.143-150
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• 2011

본 논문에서는 초고속 튜브철도 시스템의 개념설계 단계에 있어 진공튜브 구조물의 기밀성능 평가를 위한 기초 연구를 수행하였다. 먼저 Darcy의 흐름법칙에 근거하여 밀폐된 구조물의 내/외부 압력 차에 따른 공기 유입의 흐름식을 유도한 후 콘크리트 재료에 대한 투기성 평가 실험을 수행하여 콘크리트 강도에 따른 투기계수의 경향을 분석하였으며 이 결과를 바탕으로 가정 단면을 가진 튜브 구조물에 대한 내부 압력 변화를 해석적으로 모사하였다. 수립된 해석모델과 실험결과를 종합적으로 분석한 결과, 콘크리트의 투기성은 압축강도에 기하급수적으로 반비례하며 진공튜브 구조물에 콘크리트 재료를 적용하였을 경우 적어도 50MPa 이상의 압축강도를 갖는 콘크리트를 사용하는 것이 진공펌프의 운용 및 유지관리 측면에서 유리할 것으로 나타났다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.187-187
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• 2012

In this report, the plasmonic nanopores of less than 5 nm diameter were fabricated on the apex of the pyramidal cavity array. The metallic pyramidal pit cavity can also utilized as the plasmonic bioreactor, and the fabricated Au or Al metallic nanopore can provide the controllable translocation speed down using the plasmonic optical force. Initially, the SiO2 nanopore on the pyramidal pit cavity were fabricated using conventional microfabrication techniques. Then, the metallic thin film was sputter-deposited, followed by surface modification of the nanometer thick membrane using FESEM, TEM and EPMA. The huge electron intensity of FESEM with ~microsecond scan speed can provide the rapid solid phase surface transformation. However, the moderate electron beam intensity from the normal TEM without high speed scanning can only provide the liquid phase surface modification. After metal deposition, the 100 nm diameter aperture using FIB beam drilling was obtained in order to obtain the uniform nano-aperture. Then, the nanometer size aperture was reduced down to ~50 nm using electron beam surface modification using high speed scanning FESEM. The followed EPMA electron beam exposure without high speed scanning presents the reduction of the nanosize aperture down to 10 nm. During these processes, the widening or the shrinking of the nanometer pore was observed depending upon the electron beam intensity. Finally, using 200 keV TEM, the diameter of the nanopore was successively down from 10 nm down to 1.5 nm.

• 한국진공학회지
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• 제13권1호
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• pp.14-21
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• 2004

오늘날 전력소자의 작동에 고주파를 사용하기 때문에 에너지 손실을 줄이기 위해 전력소자의 스위칭 속도를 증가시키는 것은 필수적이다. 본 연구에서는 $p^+- n^-$ 접합 다이오드의 스위칭 속도를 증가시킬 목적으로 minority carrier의 수명을 감소시킬 수 있는 전자조사를 실시하였다. 다이오드의 전기적 성질에 대한 전자조사의 효과를 나타냈다. 스위칭 속도는 효과적으로 증가하였다. 또한 증가될 것으로 예상되는 접합 누설 전류와 전자조사 후 정전압강하는 최적 조건의 에너지와 dose량으로 조사된 $p^+- n^-$접합 다이오드에서는 무시할 수 있는 정도로 나타났다. DLTS와 C-V 분석은 실리콘 기판에서 전자조사로 감소된 결함은 0.284eV와 0.483eV의 에너지 준위를 갖는 donor-like 결함인 것을 보여준다. 본 연구에서의 실험 결과를 고려해 보면, 전자조사는 $p^+- n^-$ 접합 다이오드 전력 소자의 스위칭 속도를 증가시켜 에너지 손실을 감소시킬 수 있는 가장 유용한 기술이라고 결론지을 수 있다.

• 한국산학기술학회논문지
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• 제22권1호
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• pp.321-326
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• 2021

본 연구는 웨이퍼를 적재할 때 웨이퍼의 손상을 최소화 시키기 위한 기술이다. 반도체와 솔라셀에 이용되는 두께가 얇은 웨이퍼는 적재된 웨이퍼 사이의 표면 장력에 의해 웨이퍼의 분리를 어렵게 만들어 웨이퍼의 표면에 손상을 줄 수 있다. 이러한 웨이퍼의 손상을 최소화시키는 기술은 압축 공기를 웨이퍼 쪽으로 분사하고, 미소의 수평 이동 기구를 동시에 적용하는 것이다. 연구에 사용된 주요 실험 인자는 웨이퍼의 공급 속도, 압축 공기의 노즐 압력, 그리고 흡착 헤드의 흡착 시간이다. 실험 결과, 동일한 노즐 압력에서 웨이퍼의 공급 속도가 빠를수록 파손율이 증가하고, 동일한 공급 속도에서는 노즐 압력이 낮을수록 파손율이 증가한다. 그리고, 웨이퍼를 흡착시키데 필요한 시간은 어느 수준 이상이면 웨이퍼의 공급 속도에 따른 파손율에는 큰 영향을 미치지 않는다. 본 연구의 실험 범위 안에서 최적의 실험 조건은 웨이퍼의 공급 속도 600 ea/hr, 압축 공기의 노즐 압력 0.55 MPa, 흡착 헤드의 흡착 시간 0.9 sec 이다. 또한, 반복성능 실험을 통해 개선된 기술은 웨이퍼의 파손율을 최소화시킬 수 있음을 보여 주었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 B
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• pp.939-941
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• 2003

High Speed permanent magnet machines are currently being developed for a number of applications including gas turbine power plants, air conditioning systems, machine tools, gas pumps, high performance vacuum pumps, flywheel energy storage systems, aircraft fuel pumps, and so on. Using a high-speed machine eliminates the necessity of the mechanical gearbox and could certainly increase the system efficiency and reduce the total cost. In addition, a high-speed machine has the advantage of small dimension and low weight, i.e. low weight to power and volume to power ratio. This paper presents a review of some important applications (mostly still under development) where high-speed machines arc used, highlighting the advantages of the technology in each case.

• International Journal of Railway
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• 제2권4호
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• pp.170-174
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• 2009

Super speed tube train is introduced to increase the speed of ground transportation. The super speed tube train levitates magnetically and runs in a partial vacuum tube, which can reduce the air resistance significantly. However, the strong magnetic force enough to propel the massive train can affect to the tube infrastructure. In this paper, authors have analyzed the leakage flux patterns and induced eddy current on the tube by using 3-dimensional Finite Element Method. These effects are investigated, especially by varying the materials and diameters of the tube. From the simulation results, the aluminum tube with the diameter of 3[m] is needed to be concerned because the induced eddy current produces joule heat, raises the inside temperature of the tube, and might be able to lead to electro-chemical corrosion on the tube, consequently reduce the durability.

• Journal of Biosystems Engineering
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• 제28권5호
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• pp.395-402
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• 2003

Standard ginseng seedling, selected after one year's rearing in the seedling bed has been conventionally transplanted in Korea. Recently, the direct seeding areas have been increasing to product high quality ginsengs for red-ginseng processing. Reciprocating push-rod brush, holed-roller and vacuum suction seeders, planting with 30 ${\times}$ 30mm spacings and adjustable to the folds were designed and theirs performances were evaluated. The developed three types of seeders reliably performed at the success rate over 95% with less than 10% in slip rate, and could be used a seeder for the greater spacings by adjusting metering parts. The research concluded that the vacuum suction seeder was the most feasible and practical with the greatest metering success and the least slip among three type seeders of the reciprocating push-rod brush, holed-roller and vacuum suction seeders. The vacuum suction seeder holds a seed with each needle nozzle using the negative pressure created by a vacuum pump. The capacity was 24.5 times greater than a man power at the speed of 5 m/min.

• 한국진공학회지
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• 제6권4호
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• pp.308-313
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• 1997

Capacitance Diaphragm Gauge(CDG)를 전달표준기로 사용하여 한국과 영국의 저진 공표준의 국제비교를 수행한 결과 양국 표준기에서 교정한 CDG의 압력비의 차이는 0.05% 이었다. 또한 두 개의 Spinning Rotor Gauge(SRG)를 이용하여 한국과 일본이 고진공표준의 국제비교를 수행한 결과 양국 표준기에서 교정한 SRG의 accommodation coefficient($sigma$)의 차이가 0.4% 이내이었다. CDG와 SRG를 이용한 한국과 영국의 저진공표준기 및 한국과 일 본의 고진공표준기의 국제비교 결과 CDG 및 SRG 자체의 고유오차범위 이내에서 결과가 일치함을 확인할 수 있었다.