• Journal of information and communication convergence engineering
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• 제15권4호
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• pp.232-236
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• 2017

A digital vacuum pressure sensor is designed, fabricated, and characterized using a packaged MEMS analog Pirani gauge. The packaged MEMS analog Pirani gauge requires a current source to heat up a heater in the Pirani gauge. To investigate the feasibility of digitization for the analog Pirani gauge, its implementation is performed with a zero-temperature coefficient current source and microcontroller that are commercially available. The measurement results using the digital vacuum pressure sensor showed that its operating range is 0.05-760 Torr, which is the same as the measurement results of the packaged MEMS analog pressure sensor. The results confirm that it is feasible to integrate the analog Pirani gauge with a commercially available current source and microcontroller. The successful hybrid integration of the analog Pirani gauge and digital circuits is an encouraging result for monolithic integration with a precision current source and ADCs in the state of CMOS dies.

• 토지주택연구
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• 제2권2호
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• pp.163-170
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• 2011

개별진공압공법은 지반에 타설된 연직배수재에 진공압을 직접 가하여 간극수를 배출하여 일정한 전응력 상태에서 유효응력이 증가함에 따라 압밀을 촉진 시키는 공법이다. 연약지반 개량에 일반적으로 사용되는 공법인 성토재하공법(preloading)과는 다르게 성토하중이 필요로 하지 않기 때문에 성토재료의 확보 문제와 지반의 국부적인 전단파괴에 대해 이점을 가지고 있다. 또한 기존의 진공압밀 공법에서의 문제점인 펌프효율의 감소, 고가의 기밀시트에 소요되는 비용, 그리고 기밀시트의 잦은 파손의 문제 등을 직접적으로 배수재에 진공압을 가함으로서 개선시킨 공법이다. 그러나 개별진 공압공법은 직접 고압의 진공압을 직접 배수재에 가함으로써 배수재 주변의 투수계수가 감소하며 경화되는 영역(hardening zone)과 필터재료의 막힘현상(clogging)에 의해서 간극수의 배출이 줄어들게 되어 지반개량의 효율이 크게 감소하게 된다. 따라서 본 연구에서는 높은 지반개량 효과를 얻을 수 있는 진공압의 적용기간을 찾기 위해서 단계진공압(-20, -40, -60, -80KPa) 적용기간을 각각 다르게 적용하였다. 실험을 진행하는 동안 각 조건에 따라 개량 시간에 따른 침하량을 측정하였으며, 실험 종료 후 최종침하량, 함수비, 콘저항치를 측정하였다. 파악된 데이터를 비교/분석하여 개별진공압공법에 적합한 단계진공압 적용기간을 도출한 후 수치해석을 실시하여 제안된 단계진공압 적용에 따른 침하량을 예측하였다.

• 진공이야기
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• 제1권1호
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• pp.11-16
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• 2014

A variety of metal vacuum systems displays the celebrated 1/t pressure, namely, power-law dependence on time t, with the exponent close to unity, as to the origin of which there has been long-standing controversy. Here we propose a chemisorption model for water adsorbates, based on the argument for 2D fermion behavior of water adsorbed on a metal surface, and obtain analytically the power-law behavior of pressure with an exponent unity. Further, the model predicts that the pressure should depend on the temperature T according to $T^{1.5}$, which is indeed confirmed by our experiment.

• 한국마린엔지니어링학회:학술대회논문집
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• 한국마린엔지니어링학회 2001년도 추계학술대회 논문집(Proceeding of the KOSME 2001 Autumn Annual Meeting)
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• pp.45-49
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• 2001

To maintain the freshness of produce, because of stand away between produced and consumer, we need refrigeration system that can supply to consumer at cold chain as soon as gathering. General refrigeration system consist of refrigeration chamber or low temperature store. But the vacuum technology can rapidly refrigeration without refrigerator. This precool system possible to get low precooled temperature, suitable for the fishes, the meat, the vegetables, the fruit etc. Especially get advantage that quality maintain through rapid refrigeration of ferment directly generate heat. Vacuum precool system's principle is that water saturated temperature reduce according to pressure is get to vacuum area, so product temperature reduce as water evaporation at product. In vacuum suction, unit, on early experiment period run the rotary type vacuum pump at purpose pressure, then maintain pressure by water-diven ejector. As the results, cabbage took about 60 minutes to reach from $23.2^{\circ}C$ to $4.5^{\circ}C$at 5mgHg abs.

• 한국철도학회논문집
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• 제13권5호
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• pp.516-520
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• 2010

튜브 구조물의 압력을 대기압 이하로 유지하는데에 사용될 진공 펌프의 용량을 설정하기 위한 파라메타 연구를 수행하였다. 최근 철도 기술 연구자들은 초고속 수송 시스템의 하나인 튜브 열차 시스템에 관심을 가지게 되었다. 초고속을 달성하기 위하여 튜브 내부를 저압으로 유지할 필요가 있는데, 저압에서는 공기 저항이 극단적으로 줄어들기 때문이다. 진공 펌프 시스템은 튜브 내부를 저압으로 만들고, 누설을 보충하는 역할을 한다. 일련의 연구결과, 다양한 파라메타에 대한 진공 펌프의 용량을 구하였다. 이 결과들은 공기 저항 저감 효과를 분석하는데에 적용될 것이다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3134-3138
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• 2007

The objective of this paper is to elucidate the characteristic performance of the mini-vacuum pump with various heights of eccentric shaft. The mini-diaphragm pump is composed of DC motor, eccentric shaft and diaphragm and it is operated by PCB panel. The height of eccentric shaft is changed that controls the quantities of air flow to improve the performance of vacuum pressure. This device is manufactured in order to embody the vacuum pressure with 200 mmHg. The heights of eccentric shaft which is used in present experiment are located in the range from 3 mm to 5.5 mm. The vacuum pressure distributions with each height of eccentric shaft was measured and the results were graphically depicted.

• Journal of Korean Vacuum Science & Technology
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• 제6권3호
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• pp.109-115
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• 2002

This paper describes a CCM key comparison of low absolute-pressure standards at seven National Measurement Institutes that was carried out during the period March 1998 to September 1999 in order to determine their degrees of equivalence at pressures in the range 1 Pa to 1000 Pa. The Korea Research Institutes of Standards and Science(KRISS) participated from 10 Pa to 1000 Pa pressure range in 1999. The primary standards, which represent two principal measurement methods, included five liquid-column manometers and four static expansion systems. The transfer standard package consisted of four high-precision pressure transducers, two capacitance diaphragm gauges to provide high resolution at low pressures, and two resonant silicon gauges to provide the required calibration stability.

• 한국정밀공학회지
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• 제26권8호
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• pp.112-118
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• 2009

A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure rise was caused by additional leakage resulting from stage velocity, along with adsorption and outgassing of gas molecules from the guide rail surface. Though tilting of the stage due to acceleration and deceleration reached several micrometers, it had a negligible effect on pressure rise because the tilting time was very short. Therefore, a rotary air bearing stage showed much less pressure rise than a linear stage because the rotary stage theoretically has nothing to do with the above causes. Additional leakage caused by stage velocity was inevitable if the stage had movements, but pressure rise caused by adsorption and outgassing could be suppressed by improving the surface quality to reduce real surface area, and by coating the guide rail surface with titanium nitride (TiN) which has less adhesion probability of gas molecules. The results also indicate that the pressure rise increased when the air bearing stage operated under high vacuum conditions.

• ETRI Journal
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• 제38권4호
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• pp.685-694
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• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.

• 한국연소학회:학술대회논문집
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• 대한연소학회 2003년도 제27회 KOSCO SYMPOSIUM 논문집
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• pp.109-113
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• 2003

Low pressure or vacuum carburizing(LPC) has undergone major further developments since 1980 and now it has achieved industrial maturity. The advantage of low pressure vacuum carburizing over gas carburizing is not only the creation of surface entirely free of oxide and environmentally friendly but also a reduction in batch times, lower gas and energy consumption and the prevention of soot. In this study the experiment was carried out to investigate the effects of vacuum atmosphere in the heating furnace. Heat transfer rate and uniformity of temperatures of test samples in the pressure range of a few 0.1torr was examined on a test charge of 100kg. It is found that the fuel saving rate due to decreasing heating time reach to 20% in the vacuum heating mode as compared with atmospheric heating mode. Also the uniformity of temperatures in the samples was improved significantly in the vacuum heating mode. Also the effects of the RC fan for stirring atmosphere inside furnace was examined. Results shows RC fan appears to provide a reasonable tool for improving uniformity of temperature in the atmospheric heating mode.