• Journal of the Korean Society for Precision Engineering
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• v.18 no.11
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• pp.138-147
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• 2001

Alignment systems are frequently used under various semiconductor manufacturing environment. Particularly in PDP(Plasma Display Panel) manufacturing process, the alignment system is applied to the combining and sealing processes of the upper and lower glass panels of PDP, where these processes are performed in the vacuum chamber of high vacuum and high temperature. In this paper, the XYΘ-alignment stage is developed to align PDP panels. Because of high vacuum and high temperature environment, the alignment chamber has been designed to isolate the inner part of the alignment chamber from the outer environment of high vacuum and high temperature, in which every part of the alignment stage is inserted. As it is difficult to attach feedback sensors to the alignment stage in the alignment chamber, the alignment stage is implemented with the open loop algorithm, where the parallel link structure has been designed using step-motors and ball-screws for structural simplicity. The kinematic analysis is performed to drive the parallel link structure, based on the experiments of actuation-compensation of the alignment stage. For the error compensation, the hyperpatch model has been used to model the errors. From the experiments, the positional accuracy of the alignment stage can be improved significantly.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.211-211
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• 2000

Carbon nanotubes (CNTs) have been spotlighted as one of promising field emission displays(FEDs). For the first time, to authors knowledge, we have developed the 9" color CNT-FEDs with the resolution of 240x576 lines. The 9" CNT-FEDs with diode-type and triode-type structures are presented. The well-dispersed CNT paste was squeezed onto the metal-patterned cathode glass. For the anode plate, the Y2O2S:Eu, ZnS:Ag,Cl low-voltage phosphors were printed for red, green, and blue colors, respectively. The vacuum-packaged panel maintained the vacuum level of 1x10-7 Torr. The uniform moving images vacuum-packaged panel maintained the vacuum level of 1x10-7 Torr. The uniform moving images were demonstrated at 2 V/um. High brightness of 800, 200, and 150cd/m2 was observed on the green, red, and blue phosphors at V/um, respectively. Field emission characteristics of a triode-type CNT-FED were simulated using a finite element method. the resultant field strength on the cathode was modulated by gate bias and emitted electrons were focused on the anode. A relatively uniform emission image was experimentally achieved at the 800V anode. A relatively uniform emission image was experimentally achieved at the 800V anode and the 50-180 V gate biases. Energy distribution of electrons emitted from CNTs was measured using an energy analyzer. The maximum peak of energy curve corresponded to the Fermi energy level of CNTs. The whole fabrication processed of CNT-FEDs were fully scalable and reproducible. Our CNT-FEDs has demonstrated the high potential of large-area and full-color applications with very low cost fabrication and low power consumption.

• Advanced Composite Materials
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• v.18 no.4
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• pp.365-379
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• 2009

Epoxy/S2-glass reinforced composites (SGRPs) infused with Cloisite 30B nanoclays were manufactured using the vacuum assisted resin infusion molding (VARIM) process. Prior to infusion, the matrix and clays were thoroughly mixed using a direct mixing technique (DMT) and a high shear mixing technique (HSMT) to ensure uniform dispersion of the nanoclays. Structures with varying clay contents (1-3 wt%) were manufactured. Both pristine and SGRP nanocomposites were then subjected to mechanical testing. For the specimens manufactured by DMT, the tensile, flexural, and compressive modulus increased with increasing the clay content. Similarly, the tensile, flexural, compressive, interlaminate shear and impact strength increased with the addition of 1 wt% clay: however the trend reversed with further increase in the clay content. Specimens manufactured by HSMT showed superior properties compared to those of nanocomposites containing 1 wt% clay produced by DMT. In order to understand these phenomena a morphological study was conducted. Transmission electron microscopy (TEM) micrographs revealed that HSMT led to better dispersion and changed the nanoclay structure from orderly intercalation to disorderly intercalation giving multi-directional strength.

• Korean Journal of Materials Research
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• v.4 no.1
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• pp.113-116
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• 1994

InSb thin film magnetic sensor, which have been prepared on glass substrate by vacuum evaporation, is investigated in this paper. The dependance of Hall voltage on magnetic field and temperature is examined by Hall effect. The variation of Hall voltage with magnetic field is almost linear at constant current drive but it is deviated from the linearity at constant voltage drive. Hall voltage decreases as the ambient temperature increases, so it is necessary to take into account the temperature effect when the InSb thin film is used as magnetic sensor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.874-877
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• 2001

SOI(Silicon-On-Insulator) technology is proposed as an alternative to bulk silicon for MEMS(Micro Electro Mechanical System) manufacturing. In this paper, we fabricated the SOI wafer with uniform active layer thickness by silicon direct bonding and mechanical polishing processes. Specially-designed electrostatic bonding system is introduced which is available for vacuum packaging and silicon-glass wafer bonding for SOG(Silicon On Glass) wafer. We demonstrated thermopile sensor and RF resonator using the SOI wafer, which has the merits of simple process and uniform membrane fabrication.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2006.04a
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• pp.15-20
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• 2006

Real time health monitoring system was studied to detect the . generation of defects in the composite structures during service life. The PZT sensors were embedded into the woven-glass/phenol composite plate during the fabrication. VARTM (Vacuum Assisted Resin Transfer Molding) process were used to fabricate the composite plate. A Teflon tape was embedded between glass fiber layers to mimic delamination induced during service. Normalized maximum amplitude and energy analyses were used for the acquired signals. Both amplitude and energy of acquired signals were extremely sensitive to the delamination. Therefore, it was successful to detect and to locate the defects in composite plate by monitoring signals from sensors and using the proposed method.

• 한국신재생에너지학회:학술대회논문집
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• 2007.11a
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• pp.378-381
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• 2007

탄소섬유가 중앙에 적층된 풍력발전용 블레이드 소재인 탄소 유리섬유 하이브리드 복합재료가 VARTM(Vacuum Assisted Resin Transfer Molding)공법을 이용하여 제작되었다. 아이조드 충격시험법을 이용하여 온도, 하이브리드화 비율 그리고 노치에 대한 충격강도의 영향을 연구하였다. 온도 감소 및 탄소섬유의 증가에 의해 충격강도는 감소하는 경향을 보였으며, 노치에 의해 하이브리드 복합재료는 약 $25{\sim}30$%가량의 충격강도 감소를 보였다. 그러나 단일 탄소섬유 복합재료의 경우 노치민감도는 없었으며, 이에 소량의 유리섬유 첨가로 인해 하이브리드화 하였을 경우 충격강도 향상 및 저온 충격강도 안정성을 확보 할 수 있었다.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.91-96
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• 2000

Glass fiber reinforced thermoplastic composites were manufactured by Rapid Press Consolidation Technique(RPCT) as functions of temperature, pressure and time in pre-heating, consolidation and solidification sections during the manufacturing processing. It was found that the material property is greatly affected by pre-heating temperature under vacuum, mold temperature and molding pressure. Among them, the temperature In the mold was the most critical factor in determining the mechanical properties and the molded conditions of specimen. The crystallinity of PET matrix was also investigated by differential scanning calorimetry(DSC) measurements for various processing conditions. The level of crystallinity($X_c$) depended strongly on the mold temperature, cooling rate and the type of composite. The difference in $X_c$ is believed to be one of important factors in characterizing the mechanical properties.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.688-691
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• 1999

Light was of electric lamp was reflected by bulb reflector. In order to improve the efficiency of the electric lamp. it is inevitable that lamp, it is inevitable that improve the reflectance of bulb reflector. Important factors that affect the reflectance of bulb reflector is working pressure, distance between evaporation source to substrate, the situation of surface of glass. etch rate of glass, etc. In this paper. confirmed the effect of etching, working pressure etc. , and its effect for the reflectance of bulb reflector. Especially, concentration of HF in the etching solution and etching time is to be importnace for characteristic of bulb reflector.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.5
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• pp.405-410
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• 2006

We fabricated gas sensors using carbon nanotubes (CNTs) as electron emitters for the purpose of detecting inert gases. By using the silicon-glass anodic bonding and glass patterning technologies with the typical Si process, we improved the compactness of the sensors and the reliability in process. The proposed sensor, based on, an electrical discharge theory known as Paschen's law in principle, works by figuring the variation of the discharge current depending on gas concentration. In the experiment, the initial breakdown characteristics were measured for air and Ar as a function of gas pressure. As the result, even though it should be realized that there are many other factors which have an effect on the breakdown of a gap, the sensors led to similar result as predicted by Paschen's law, and they showed a possibility as gas sensors which enable to detect the gas density ranged to the vacuum pressure from 1 to $10^{-3}$ Torr.