• Clean Technology
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• v.14 no.2
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• pp.123-128
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• 2008

The waste solution, which was discharged from the recovery process of LCD etching solution, consists of 15 wt% nitric acid and 20 wt% acetic acid. In this study, it was conducted to separate acid individually from the mixed acid by vacuum evaporation under -760 mmHg gauge and at $40^{\circ}C$. We have investigated evaporation behavior of acid as a function of temperature. There have been problems that tiny amount of nitric acid were evaporated simultaneously above $33^{\circ}C$. Thus, efforts were conducted to recover acetic acid by vacuum evaporation with adding $H_2O$, waste mixed acid and 20 g/L NaOH for a curb on evaporation of nitric acid. By adding $H_2O$, evaporation of nitric acid was reduced from 7% to 0.78%. However, it was reduced from 7% to 0.25% by adding mixed acid. In view of the results achieved so far, we may expect to separate the etching solution individually by controlling vacuum conditions.

• Journal of Advanced Marine Engineering and Technology
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• v.39 no.9
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• pp.876-880
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• 2015

In 2016, the IMO's new rules for an 80% reduction in NOx emissions in newly built ships will necessitate the use of LNG as a clean fuel. So far, the developed European countries have led the development of LNG bunkering ships and related facilities. An LNG bunkering system stores LNG in a horizontal or vertical IMO "C"-Type tank insulated with perlite powder, and a vacuum in the annular space between the double walls, like the cryogenic liquid nitrogen tank. Current storage tanks have high heat leakage, evaporating over 2.0% daily, and are difficult to build with the required vacuum. A more efficiently insulated storage tank could reduce the evaporation rate. This research carried out thermal analysis on a new effective insulation method that separates high vacuum in the annular space between two tanks with a solid insulation material, such as urethane foam, lining the outer vessel. This highly efficient insulation system obtained an evaporation rate of 0.03% per day under a $10^{-3}torr$ vacuum, and an evaporation rate of 0.11% at $10^{-45}torr$. Even if the space loses its vacuum, the new insulation system showed a lower evaporation rate of 4.12% than the present perlite system of 4.9%. This newly developed tank can increase the efficiency of LNG storage tank and may help keep LNG bunkering systems safe.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.26 no.9
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• pp.441-446
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• 2014

In Jeju province, the Citrus is widely spread crop which is the most popular fruit on the island. When the quality of a Citrus is not in a good condition or when its size exceeds or is lower than the set criteria, it is discarded as a waste. In this study, a drying machine for waste Citrus has been developed with 2.6 GHz microwave energy supply to the Citrus at vacuum environment. The vacuum environment of the drying chamber was maintained to reduce the energy supply to the Citrus by lowering the evaporating temperature of the water. The experiment was conducted with variation of the vacuum pressure, interior temperature of the drying chamber, and operating time of the microwave. As a result, the effect of the temperature was shown to be higher than the other two control methods, and it showed with 0.305 g/W evaporation efficiency.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.312-312
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• 2013

GaN based light emitting diodes (LEDs) are important devices that are being used extensively in our daily life. For example, these devices are used in traffic light lamps, outdoor full-color displays and backlight of liquid crystal display panels. To realize high-brightness GaN based LEDs for solid-state lighting applications, the development of p-type ohmic electrodes that have low contact resistivity, high optical transmittance and high refractive index is essential. To this effect, indiumtin oxide (ITO) have been investigated for LEDs. Among the transparent electrodes for LEDs, ITO has been one of the promising electrodes on p-GaN layers owing to its excellent properties in optical, electrical conductivity, substrate adhesion, hardness, and chemical inertness. Sputtering and e-beam evaporation techniques are the most commonly used deposition methods. Commonly, ITO films on p-GaN by sputtering have better transmittance and resistivity than ITO films on p-GaN by e-bam evaporation. However, ITO films on p-GaN by sputtering have higher specific contact resistance, it has been demonstrated that this is due to possible plasma damage on the p-GaN in the sputtering process. In this paper, we have investigated the advanced sputtering using plasma damage-free p-electrode. Prepared the ITO films on the GaN based LEDs by e-beam evaporation, normal sputtering and advanced sputtering. The ITO films on GaN based LEDs by sputtering showed better transmittance and sheets resistance than ITO films on the GaN based LEDs by e-beam evaporation. Finally, fabricated of GaN based LEDs by using advanced sputtering. And compared the electrical properties (measurement by using C-TLM) and structural properties (HR-TEM and FE-SEM) of ITO films on GaN based LEDs produced by e-beam evaporation, normal sputtering and advanced sputtering. As a result, It is expected to form plasma damage free-electrode, and better light output power and break down voltage than LEDs by e-beam evaporation and normal sputter.

• Proceedings of the Korean Vacuum Society Conference
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• 2005.02a
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• pp.139-139
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• 2005

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.331-331
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• 2009

• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.255.2-255.2
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• 2009

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.397-400
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• 2003

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.749-754
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• 2006

This study performed of a water cooling system by using a steam ejector and jet condenser to drop the temperature of the water in aquafarm by about $5^{\circ}C$ from $25^{\circ}C$ or higher in this research, to replace the present water cooling system, Ive focused on a water cooling system operated by latent heat of evaporation, thus this system needs a vacuum pressure to evaporate the water in enclosed tank. The water cooling effects are dependent on the vacuum pressure in the enclosed tank, and the cooling water is generated by evaporation. As the experimental results, the absolute vacuum pressure obtained was about $5{\sim}8mmHg$ using a steam driven ejector with jet condenser in experiments. The obtained results are respectively ${\Delta}T=7^{\circ}C$, ${\Delta}T=5^{\circ}C$ and ${\Delta}T=5.5^{\circ}C$ at heat exchanger flow rate 4L/M. The obtained results are respectively ${\Delta}T=5.5^{\circ}C$, ${\Delta}T=5.5^{\circ}C$ and ${\Delta}T=5.5^{\circ}C$ at heat exchanger flow rate 4.5L/M.

• Proceedings of the Korean Vacuum Society Conference
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• 1996.06a
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• pp.77-77
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• 1996