• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.551-554
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• 2000

Alignment system is a system to locate an object to it's accurate position in multi-d.o.f space. According to process of application, it is need to align an object in 3 or 6 d.o.f. space. And alignment system is used in various environments. Especially in PDP application, alignment process is carried out in vaccume environment. In this paper, we developed 3 d.o.f. alignment system for vaccume environment, performed kinematic analysis and improved it's positional accuracy.