• Title/Summary/Keyword: VCR fitting

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A Study on Measures to Prevent Leakage of Process Fluid from the VCR Fitting used in the Semiconductor Manufacturing Process (반도체 제조 공정에서 사용되는 이송배관 연결부위(VCR Fitting)로부터 공정유체 누출사고 예방 대책에 관한 연구)

  • Dae Joon Lee;Sang Ryung Kim;Sang Gil Kim;Chung Sang Kang;Joon Won Lee
    • Journal of the Korean Institute of Gas
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    • v.27 no.2
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    • pp.79-85
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    • 2023
  • Recently, in the semiconductor process, large companies are seeking process changes from memory semiconductors to the foundry due to the increase in demand due to the 4th industry. industry is expanding. The characteristics of special gases and precursors, which are raw materials used to produce these semiconductor chips, are toxic, pyrophoric, inflammable, and corrosive. These semiconductor raw materials are operated in a closed system and do not leak to the outside during normal times, but when leaked, they spread to the inside of the gas box, and when proper ventilation is not provided inside the gas box, they spread to the outside, causing fires, explosions, or toxic substances. It can lead to major accidents such as leakage. Recently, there have been cases of accidents in which hazardous materials leaked from the closed system of the semi conductor process and spread to the inside and outside of the gas box. . In this study, we propose preventive measures based on the case of an accident in which raw material leaked from the VCR fitting, which is the connection part of the semiconductor raw material transfer pipe, and spread to the outside of the gas box.