• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.263-268
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• 2001

The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.3
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• pp.29-35
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• 2006

Various types of elliptical motions are generated by PZT mechanism which is composed of two parallel piezoelectric actuators. Elliptical vibration cutting(EVC) is obtained by attaching single crystal diamond cutting tool to the mechanism, and V-grooving for Brass and Aluminum is carried out by applying the EVC. It is experimentally observed that the cutting force in the process of the EVC reduces compared to the ordinary non-vibration cutting, which is due to the decrease of undeformed chip thickness and frictional force between the tool and chip. Ultrasonic elliptical vibration cutting(UEVC) suppresses burr formation and decreases cutting force still more, so UEVC makes it possible to enhance the shape accuracy of machined surface.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.27-33
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• 2005

This study deals with the truing of diamond wheel fur the manufacture of micro v-shaped grooves with fine sharp edges in the grinding. Fine micro v-shaped grooves are key components to fabricate LGP(light guide plate), optical fiber connector and so on. Conventional v-shaped groove methods such as etching and lithography are difficult to make grooves with accuracy and cutting by lathe is difficult to select target materials. Therefore, as a preliminary stage to developing the grinding technology that will be expected fabrications for micro 3-dimensional structure of high effectivity and accuracy and freed up the restrictions of machinability to the materials for micro v-shaped grooves, truing is carried out with resin bond diamond wheel and electroforming diamond wheel using a cup-type truer. From the experimental results, it is found that the effects according to working direction of the cup-type truer and the restrainable methods of plastic deformation that is generated at wheel edge are examined. As a result, fine micro v-shaped diamond wheel was obtained, which are applicable to micro grinding for optical devices.