• Title/Summary/Keyword: Uniformity control

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Temperature Control and Wafer Temperature Distribution Simulation in RTA System (RTA 시스템에서의 온도제어와 웨이퍼상의 온도분포 Simulation)

  • 조병진;김경태;김충기
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.25 no.6
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    • pp.647-653
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    • 1988
  • A rapid thermal annealing system using tungsten halogen lamp has been designed and assembled. A control scheme where the temperature control is executed with calculated wafer temperature by considering the thermocouple delay rather than measured thermocouple temperature,is proposed. This control scheme gives more accurate control of the wafer temperature. In addition, the distribution of transmitted light power to the wafer in the system has been simulated, and lamp interval modification has been able to give more uniform light power distribution. Considering incident light spectrum, absorption, reflection, radiation of silicon, etc., temperature profile has been simulated. When the light power uniformity on the 3" wafer is below 1%, the temperature uniformity is about 2%.

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A Prediction Method of Temperature Distribution on the Wafer in a Rapid Thermal Process System with Multipoint Sensing (고속 열처리 시스템에서 웨이퍼 상의 다중점 계측에 의한 온도 분포 추정 기법 연구)

  • Sim, Yeong-Tae;Lee, Seok-Ju;Min, Byeong-Jo;Jo, Yeong-Jo;Kim, Hak-Bae
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.49 no.2
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    • pp.62-67
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    • 2000
  • The uniformity of temperature on a wafer is one of the most important parameters to control the RTP (Rapid Thermal Process) with proper input signals. Since it is impossible to achieve the uniformity of temperature without exact estimation of temperature at all points on the wafer, the difficulty of understanding internal dynamics and structural complexities of the RTP is a primary obstacle to accurately measure the distributed temperatures on the wafer. Furthermore, it is also hard to accomplish desirable estimation because only few pyrometers have been commonly available in the general equipments. In the paper, a thermal model based on the chamber geometry of the AST SHS200 RTP system is developed to effectively control the thermal uniformity on the wafer. First of all, the estimation method of one-point measurement is developed, which is properly extended to the case of multi-point measurements. This thermal model is validated through certain simulation and experiments. The work can be usefully contributed to building a run-by-run or a real-time controls of the RTP.

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Effect of a Suspended Overhead Sprayer with Sector Formed Injection Nozzles on Spraying Uniformity (두상관수장치의 부채꼴분사노즐 설치위치가 살수균일성에 미치는 영향)

  • 김명규;정태상;민영봉
    • Journal of Bio-Environment Control
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    • v.8 no.4
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    • pp.223-231
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    • 1999
  • The one of basic functional conditions of suspended overhead sprayer, which is openly made use of irrigating on bedding plants in greenhouse, is to be kept the growing uniformity of bedding plants by making uniformly the spraying irrigation depending on the distribution of sprayed water. This study was performed to find out the optimum position of sector formed injection nozzle which is placed from the top of plant 0 the tip of the nozzle to keep spraying uniformity. The test of spraying distribution using a overhead sprayer, which was installed in a row of sector formed injection nozzles, was performed The measuring factor to represent spraying distribution was the water weight filled in each cup when the overhead sprayer was moving across the upside of the cups which were placed directly under the nozzles on keeping the distance from nozzle tip. The test results were as following , The standard mr of weights of each cup filled with spraying water was lower values at Position far from more than 60cm under nozzle tip. The driving speed variation of sprayer was not effected on spraying uniformity but the spraying water weight was inversely proportioned to the speed. To make best spraying uniformity, it was represented that the tip of the nozzle is positioned to keep the distance which the top of plants is placed at the second cross point of each injection sector of nozzles.

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Improvement of Field Uniformity in the Reverberation Chamber Using Diffusers Filled with Dielectric Material (유전체로 충진된 확산기를 이용한 전자파 잔향실 내의 전자기장 균일도 향상 연구)

  • Kim Hye-Kwang;Rhee Joong-Geun;Lim Wook-Chae
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.16 no.12 s.103
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    • pp.1222-1228
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    • 2005
  • Analysis on the field uniformity inside of a reverberation chamber was done at 2.45 GHz which is an operating frequency of MWO(Microwave Oven). The Schroeder's Quadratic Residue Diffuser was designed for the chamber, and 3 different types of diffusers have been investigated using the finite-difference time-domain(FDTD) method for the field characteristics of each type. Type 2 and 3 diffusers were filled with dielectric material, and the size of these could be designed smaller than Type 1, without degradation of field characteristic. Type 3 diffuser shows better results among the three types of diffusers in view of increased test region and better field uniformity.

Improved Field Uniformity Characteristics in a Reverberation Chamber with a CRD (CRD를 이용한 전자파 잔향실 내 전기장 균일도 향상)

  • Son, Yong-Ho;Rhee, Joong-Geun;Kim, Jung-Hoon
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.44 no.12
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    • pp.79-84
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    • 2007
  • This paper presents an improved field uniformity in a reverberation chamber, that can be alternatively used for the analysis and the measurement of electromagnetic interference and immunity, with a designed CRD(Cubical Residue Diffuser) that have various dimensions. The Schroeder type CRD is designed for $1\sim3$ GHz band and the FDTD(Finite Difference Time Domain) method is used to analyze the field characteristics. At 2 GHz, the standard deviation of test volume in the reverberation chamber is the smallest and has a good field distribution with a CRD of $40\sim80%$ dimension of one side of the reverberation chamber. The Electric field uniformity gets worse when the dimension of a CRD is either below 40 % or above 80 % of the side wall. The result shows that the standard deviation of the test volume in the reverberation chamber with a CRD of 44 % dimension is improved by 1 dB compared with that of the reverberation chamber with a CRD of 100 % dimension.

System Design and Performance Analysis of a Variable Frequency LED Light System for Plant Factory

  • Han, Jae Woong;Kang, Tae Hwan;Lee, Seong Ki;Han, Chung Su;Kim, Woong
    • Journal of Biosystems Engineering
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    • v.39 no.2
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    • pp.87-95
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    • 2014
  • Purpose: The purpose of this study was to design a variable frequency LED light system for plant factory which combined red, blue, green, white, and UV lights and controlled the ratio of the light wavelength. In addition, this study evaluated the performance of each combination of LED to verify the applicability. Methods: Four combinations of LED (i.e. Red+Blue, Red+Blue+Green, Red+Blue+White, Red+Blue+UV) were designed using five types of LED. The system was designed to control the duty ratio of each wavelength of LED by 1% interval from 0~100%, the pulse by 1Hz interval from 1~20kHz. Response characteristics of the control system, spectral distribution of each combination, light uniformity and uniformity ratio were measured to test the performance of the system. Results: Clean waveforms were measured from 10Hz to 10kHz regardless of duty ratio. Frequency distortion was observed within 5% of inflection point at frequencies above 10kHz regardless of duty ratio, but it was judged negligible. Spectra showed a normal distribution, and maximum PPF with duty ratio of 100% was $271.4{\mu}mol{\cdot}m^{-2}{\cdot}s^{-1}$ for the Red+Blue combination. PPF of the Red+Blue+Green combination was $258.9{\mu}mol{\cdot}m^{-2}{\cdot}s^{-1}$, and that of the Red+Blue+White combination was $273.9{\mu}mol{\cdot}m^{-2}{\cdot}s^{-1}$. PPF of the Red+Blue+UV combination was $267.7{\mu}mol{\cdot}m^{-2}{\cdot}s^{-1}$. Uniformity ratio for the area excepting border showed 0.90 for the Red+Blue and Red+Blue+White combinations, 0.87 for the Red+Blue+Green combination, and 0.88 for the Red+Blue+UV combination. The light was irradiated evenly at the area excepting border, so it was suitable for plant growing. Conclusions: From the results of this study, response characteristics of the control system, spectral distribution of each combination, light uniformity and uniformity ratio were suitable for applying into the plant factory.

Oligosaccharides Affect Performance and Gut Development of Broiler Chickens

  • Ao, Z.;Choct, M.
    • Asian-Australasian Journal of Animal Sciences
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    • v.26 no.1
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    • pp.116-121
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    • 2013
  • The effects of oligosaccharide supplementation on the growth performance, flock uniformity and GIT development of broiler chickens were investigated. Four diets, one negative control, one positive control supplemented with zinc-bacitracin, and two test diets supplemented with mannoligosaccharide (MOS) and fructooligosaccharide (FOS), were used for the experiment. Birds given MOS or FOS had improved body weight (BW) and feed efficiency (FCR), compared to those fed the negative control diet during the 35-d trial period. The effect on FCR became less apparent when the birds got older. FOS and MOS supplementation reduced the pancreas weight as a percentage of BW, with an effect similar to that of the antibiotic, at 35 d of age. Birds given MOS tended to have a heavier bursa (p = 0.164) and lower spleen/bursa weight ratio (p = 0.102) at 35 d of age. MOS and Zn-bacitracin showed a clear improvement on flock uniformity, compared to FOS. The mortality rate was not affected by FOS or MOS.

A Design of an LED Sensor Luminaire for Visual Function Improvement (시각적 기능개선을 위한 LED 센서 등기구 설계)

  • Seo, Jung-Nam;Yu, Yong-Su;Yeo, In-Seon
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.59 no.1
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    • pp.134-137
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    • 2010
  • An LED sensor luminaire for visual function improvement necessitates the control algorithm for light level adjustment and the appropriate lens design. The control algorithm adapts to surround lighting condition, and thus has the advantages of energy saving and glare reduction. The multi-cell lens design improves color temperature uniformity and spatial light distribution of the luminaire. Experimental and simulated results show that this approach contributes noticeably to energy saving and color temperature uniformity of the LED sensor luminaire.

The Influence of Charged Static Electricity on LCD Glass and Neutralization Characteristic by Soft X-ray

  • Choi, Chang-Hoon;Han, Sang-Ho;Park, Sun-Woo;Yun, Hae-Sang
    • Journal of Information Display
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    • v.1 no.1
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    • pp.52-58
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    • 2000
  • We observed that static electricity has an influence on the etching unformity of dry etching process. When the static electricity was applied from-200[V]to-1000[V] on glass substrates, the etching rate uniformity was changed to 1.5%-15%. In this experiment, the soft X-ray to neutralize static electricity was adopted as ore of neutralization methods. As an experimental result, soft X-ray irradiation improved neutralization capability on the surface of LCD glass substrate within the short time, about 15-30sec. The difference of etching rate uniformity was below 0.5%.

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Design of a Reorganization and Non-Uniformity Correction Module for CCD Pixels in MSC(Multispectral Camera)

  • Kong, Jon-Pil;Yong, Sang-Soon;Heo, Haeng-Pal;Kim, Young-Sun;Paik, Hong-Yul
    • 제어로봇시스템학회:학술대회논문집
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    • 2001.10a
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    • pp.177.1-177
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    • 2001
  • This paper describes the design of a NUC(Non-uniformity Correction) module in MSC(Multispectral Camera) which will be a payload on KOMPSAT. This module is required inside a system with data compression module like MSC to minimize the loss of imagery due to non-uniform characteristics between CCD pixels when the imagery is received and processed on a ground station. It comprises Hotlink input/output for imagery data, RS-422 interface with main controller in MSC, a number of SRAMS for storing imagery data and parameters, FPGA controllers which control the entire NUC module under the control of main controller, etc. It inputs 8-channel imagery pixel data which consist of 2-channel MS(Multispectral) band and ...

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