• 대한토목학회논문집
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• 제28권6D호
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• pp.931-936
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• 2008

지상LiDAR는 토탈스테이션에 비해 신속한 측량이 가능하기 때문에 터널의 내공단면 측량을 적기에 수행하고 중심선 오차와 여 미굴량 발생을 최소화할 수 있는 강점을 가지고 있어 지상LiDAR를 이용한 터널의 내공단면 측량 및 계측이 점점 증대되고 있으며 보다 효율적이고 정확한 지상LiDAR 활용을 위한 연구도 활발하게 진행 중이다. 현재 일반적으로 터널의 여 미굴량을 계산할 때 사용되는 양단면 평균법의 경우 기존 측량 방식인 토탈스테이션 및 사진측량 등과의 비교는 많이 이루어졌으나 터널 전체의 3차원 위치정보를 얻을 수 있는 지상LiDAR를 이용하여 터널의 내공단면을 측량 체적 및 여 미굴량을 구할 때 관측간격에 따른 기준이 없는 실정이다. 이에 본 연구에서는 시험터널에 대한 reverse engineering을 실시하여 터널 내공단면 측량 시 터널단면의 체적을 비교하여 가장 합리적인 간격을 결정하고 이 결과를 토대로 현재 설계 데이터가 존재하지 않는 시험터널에 대한 CAD도면을 제작하였다. 또한 지상LiDAR 기술의 정확도를 검증하기 위하여 토탈스테이션과의 비교를 통하여 타겟좌표 정확도, 입사각에 따른 정확도 분석을 실시하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.291-294
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• 2000

Free-form surfaces arise in shipbuilding, automotive and aerospace industries. Specially compound free-form surfaces so do. Machining complicated products consist of compound surface, it is very important to avold and remove tool interferences. By the way, in compound surfaces the tool interference can occur not only in the tool path direction but also in the other direction. A new tool interference detection and correction using tool interference conditions is suggested to identify and correct the tool interference in compound surfaces.

• Journal of Computational Design and Engineering
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• 제1권1호
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• pp.48-54
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• 2014

In this paper, the authors propose a system for assisting mold designers of plastic parts. With a CAD model of a part, the system automatically determines the optimal ejecting direction of the part with minimum undercuts. Since plastic parts are generally very thin, many rib features are placed on the inner side of the part to give sufficient structural strength. Our system extracts the rib features from the CAD model of the part, and determines the possible ejecting directions based on the geometric properties of the features. The system then selects the optimal direction with minimum undercuts. Possible ejecting directions are represented as discrete points on a Gauss map. Our new point distribution method for the Gauss map is based on the concept of the architectural geodesic dome. A hierarchical structure is also introduced in the point distribution, with a higher level "rough" Gauss map with rather sparse point distribution and another lower level "fine" Gauss map with much denser point distribution. A system is implemented and computational experiments are performed. Our system requires less than 10 seconds to determine the optimal ejecting direction of a CAD model with more than 1 million polygons.

• Applied Microscopy
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• 제52권
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• pp.1.1-1.8
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• 2022

As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level. Reproducible results were derived with a relative standard deviation under 2%. Second, we measured 13 different dies, including the center and edge of the wafer, to analyze SWR distribution in wafer level and reliable results were measured. All analysis was performed using a novel algorithm, including auto fattening, sidewall detection, and SWR calculation. In addition, SWR automatic analysis software was implemented to reduce analysis time and to provide standard analysis. The results suggest that our 3D-AFM, based on the tilted Z scanner, will enable an advanced methodology for automated 3D measurement and analysis.