• Title/Summary/Keyword: Ultraprecision positioning

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Accurate Positioning of Piezoelectric Actuator for Fast Tool Servo in Ultraprecision Machine (초정밀 가공기용 FTS를 위한 압전 액츄에이터의 위치제어)

  • 김호상;정병철;송승훈;김태형
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.446-449
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    • 1995
  • In this paper, the accurate end position control method of ultraprecision machine tool post using piezoelectric material as an micro positonong devics is presented. This method employs the classical PID feedback and uses an additional notch filter which eliminates the resonance characteristics of controlled plant. And the simple predictor is added to make use of the future value of desired input for better tracking performance. To show the feasibilty of proposed method, the PC-based experimental apparacy can be obtained. Using method, Al specimen of diameter 100mm was cut under practical machining condition to test the practicability of proposed method.

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Nano-Positioning of High-Power Ultrasonic Linear Motor Stage in High-Vacuum Environment (고진공 환경중 고출력 초음파 모터 이송 스테이지의 나노미터 위치 제어)

  • Kim, Wan-Soo;Lee, Dong-Jin;Lee, Sun-Kyu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.11
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    • pp.1613-1622
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    • 2010
  • In this paper, the ultraprecision positioning control of an ultrasonic linear motor in a high-vacuum environment is presented. The bolt-clamped Langivin type transducer (BLT) with the 3rd longitudinal; and 6th lateral vibration modes was developed, which was excited by using the Eigen resonance frequency for two vibration modes in order to generate stable and high power. In practical applications, however, even if a geometrical design has an Eigen frequency, discordance between both mode frequencies can be generated by the contact mechanism and because of manufacturing errors as well as environmental factors. Both mode frequencies were precisely matched by adjusting the impedence. By using this method, the BLT can be driven under any environmental conditions. The nominal characteristic trajectory following(NCTF) control method was adopted to control the positioning of the system in vacuum. The developed linear motor stage show high positioning accuracy with 5 nm.

Analysis of Multiple Displacement Magnification Mechanism in Ultraprecision Nano Stage (초정밀 나노 스테이지에서의 다중 변위 확대 기구 해석)

  • Min K.S.;Choi W.C.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1273-1276
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    • 2005
  • A displacement magnification mechanism is usually employed in a nano-positioning stage to achieve a large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. For more large stage motion, double or multiple lever mechanisms can be used. In this case, a more accurate analysis model is needed. This study proposes a more reasonable analysis model for a multiple lever mechanism based on the single lever mechanism model. This paper describes that the high equivalent stiffness of the lever is the most important factor reducing the magnification ratio of the lever mechanism through increasing the deflection of the link and including the axial displacement of the pivot.

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Real-Time Determination of Relative Position Between Satellites Using Laser Ranging

  • Jung, Shinwon;Park, Sang-Young;Park, Han-Earl;Park, Chan-Deok;Kim, Seung-Woo;Jang, Yoon-Soo
    • Journal of Astronomy and Space Sciences
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    • v.29 no.4
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    • pp.351-362
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    • 2012
  • We made a study on real-time determination method for relative position using the laser-measured distance data between satellites. We numerically performed the determination of relative position in accordance with extended Kalman filter algorithm using the vectors obtained through nonlinear equation of relative motion, laser simulator for distance measurement, and attitude determination of chief satellite. Because the spherical parameters of relative distance and direction are used, there occur some changes in precision depending on changes in relative distance when determining the relative position. As a result of simulation, it was possible to determine the relative position with several millimeter-level errors at a distance of 10 km, and sub-millimeter level errors at a distance of 1 km. In addition, we performed the determination of relative position assuming the case that global positioning system data was not received for long hours to see the impact of determination of chief satellite orbit on the determination of relative position. The determination of precise relative position at a long distance carried out in this study can be used for scientific mission using the satellite formation flying.