• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.59-64
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• 2002

One of the exciting research areas of the X-ray microscope is the observation of a living cell. In order to study a living cell with high resolution the order of the several tens nm, we need to improve the efficiency of mirrors which are components of an X-ray microscope system. In this paper we present the mirror design and manufacture to give a high resolution and reflectivity. We designed Wolter type I the condenser and objective mirror with the several tens of nm resolution. According to mirror design. we made the program using the visual basic. Using the new processing method as well as the ultra-precision diamond cutting, we directly processed the inside of an aluminum hulk in order to manufacture mirrors. From the experimental result, we think that the new processing method will improve a high reflectivity through the improved cutting tools and optimum cutting conditions.

• 한국공작기계학회논문집
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• 제15권1호
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• pp.8-16
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• 2006

The communication through optical fiber is taking an important role of the expansion of communication network with excellent transmitting rate and quality. As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement of the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• 한국정밀공학회지
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• 제29권2호
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• pp.161-169
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• 2012

Recently, a study for the functional surface production of super hydrophobic of natural and biomimetic artificial has attracted much attention. To make process methods of super hydrophobic surface has a variety of ways such as lithography, etching, and laser ablation. However, we were used ultra-shot pulse laser ablation process which has the virtue of more environmental friendliness and simple process. In this paper, we were fabricated a multiplicity of super hydrophobic patterns on mold surface(NAK80) using by optimizing the laser processing conditions and it was transferred on PDMS. Also, we measured contact angle super hydrophobic patterns on PDMS. The result showed there is no patterns on PDMS were measured 94 degrees, by contrast, optimized super hydrophobic patterns on PDMS was 157 degrees. Therefore we fabricated super hydrophobic surface on mold. Based on these experimental results, it is possible to mass production using ultra shot pulse laser ablation of super hydrophobic pattern and to be applied for a variety of industries.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.81-86
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• 한국정밀공학회지
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• 제22권6호
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• pp.175-182
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• 2005

Inner structured and bonded panel, or ISB Panel, as a kind of sandwich type panel, has metallic inner structures which have low relative density, because of their dimensional shape of metal between a pare of metal skin sheets or face sheets. In this work, ISB panels and inner structures formed as repeated pyramidal shapes are introduced. Pyramidal structures are formed easily with expanded metal sheet by the crimping process. Three kinds of pyramidal structures are made and used to fabricate test specimen. Through the multi-point electrical resistance welding, inner structures are bonded with skin sheet. 3-point bending tests are carried out to measure the bending stiffness of ISB panel and experimental results are discussed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1043-1047
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• 2003

With the advancement of micro-systems and nanotechnology, the need for ultra-precision fabrication techniques has been steadily increasing. In this paper, a novel nano-structure fabrication process that is based on the fundamental understanding of nano-scale tribological interaction is introduced. The process, which is called Mechano-Chemical Scanning Probe Lithography (MC-SPL), has two steps, namely, mechanical scribing for the removal of a resist layer and selective chemical etching on the scribed regions. Organic monolayers are used as a resist material, since it is essential for the resist to be as thin as possible in order to fabricate more precise patterns and surface structures. The results show that high resolution patterns with sub-micrometer scale width can be fabricated on both silicon and various metal surfaces by using this technique.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• 대한기계학회논문집A
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• 제40권2호
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• pp.199-206
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• 2016

LM 볼가이드는 구름접촉을 갖는 이송시스템의 핵심요소로서 공작기계, 반도체 장비, 로봇 등 정밀기계에 널리 사용된다. 그러나 LM 볼가이드에서 발생하는 마찰력은 마찰열을 유발하여 위치 정도를 저하시키고 강성과 예압 변화를 야기한다. 이런 영향을 정확하게 분석하여 정밀 기계설계에 응용하기 위해서는 마찰력 모델의 정식화가 요구된다. 본 논문에서는 구름마찰, 점성마찰, 슬립마찰을 고려한 LM 볼가이드의 정확한 마찰력 모델을 유도한다. 그리고 다양한 조립, 부하 및 속도 조건에서 실험을 수행하여 마찰력 모델의 신뢰성을 검증하고, 마찰력 모델로부터 마찰 성분의 영향력을 분석한다.

• Current Optics and Photonics
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• 제1권5호
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• pp.538-543
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• 2017

Progressive addition lenses (PAL) have very wide application in the modern glasses market. The unique progressive surface can make a lens have progressive refractive power, which can meet the human eye's different needs for distance-vision and near-vision. According to the national glasses fabrication standard, the difference between actual optical power after fabrication and nominal design value should be less than 0.1D over the lens effective area. The optical power distribution of PAL is determined directly by the surface. Consequently, the surface processing accuracy requirement is proposed. Beginning from the surface expressions of progressive addition lenses, the relationship equations between the surface sag and optical power distribution are derived. They are demonstrated through tolerance analysis and test of an example progressive addition lens with addition of 2.09D (5.46D-7.55D). The example addition surface is fabricated under given accuracy by a single-point diamond ultra-precision machine. The optical power of the PAL example is tested with a focal-meter after fabrication. The optical power addition difference between test result and design nominal value is 0.09D, which is less than 0.1D. The derived relationship between the surface error and optical power is verified from the PAL example simulation and test result. It can provide theoretical tolerance analysis proof for the PAL surface fabricating process.