• Title/Summary/Keyword: Ultra high pressure

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A Study on the Etching Mechanism of $(Ba, Sr)TiO_3$ thin Film by High Density $BCl_3/Cl_2/Ar$ Plasma ($BCl_3/Cl_2/Ar$ 고밀도 플라즈마에 의한 $(Ba, Sr)TiO_3$ 박막의 식각 메커니즘 연구)

  • Kim, Seung-Bum;Kim, Chang-Il
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.11
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    • pp.18-24
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    • 2000
  • (Ba,Sr)$TiO_3$ thin films have attracted great interest as new dielectric materials of capacitors for ultra-large-scale integrated dynamic random access memories (ULSI-DRAMs) such as 1 Gbit or 4 Gbit. In this study, inductively coupled $BCl_3/Cl_2/Ar$ plasmas was used to etch (Ba,Sr)$TiO_3$ thin films. RF power/dc bias voltage=600 W/-250 V and chamber pressure was 10 mTorr. The $Cl_2/(Cl_2+Ar)$ was fixed at 0.2 the (Ba,Sr)$TiO_3$ thin films were etched adding $BCl_3$. The highest (Ba,Sr)$TiO_3$ etch rate is $480{\AA}/min$ at 10 % $BCl_3$ to $Cl_2/Ar$. The change of Cl, B radical density measured by optical emission spectroscopy(OES) as a function of $BCl_3$ percentage in $Cl_2/Ar$. The highest Cl radical density was shown at the addition of 10% $BCl_3$ to $Cl_2/Ar$. To study on the surface reaction of (Ba, Sr)$TiO_3$ thin films was investigated by XPS analysis. Ion bombardment etching is necessary to break Ba-O bond and to remove $BaCl_2$. There is a little chemical reaction between Sr and Cl, but Sr is removed by physical sputtering. There is a chemical reaction between Ti and Cl, and $TiCl_4$ is removed with ease. The cross-sectional of (Ba,Sr)$TiO_3$ thin film was investigated by scanning electron microscopy (SEM), the etch slope is about 65~70$^{\circ}$.

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Development of Rustling Sound Generator Using Reciprocating Motion and Evaluation of Its Fabric Sound (왕복운동에 의한 직물마찰음발생장치의 개발 및 이를 이용한 직물소리 평가)

  • Kim Chun-Jeong;Cho Gil-Soo
    • Science of Emotion and Sensibility
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    • v.9 no.2
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    • pp.133-140
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    • 2006
  • In order to investigate the sensation of the fabric sound simulating the real wear-condition, the fabric sound simulator using reciprocating friction was developed. Fabric sounds from 5 specimen were generated by the fabric sound simulator and recorded using high performance microphone. Physical sound parameters of fabrics including level pressure of total sound (LPT), level range (${\Delta}L$), and frequency differences (${\Delta}f$) were calculated. For psychological evaluation, seven adjectives for sound (softness, loudness, sharpness, clearness, roughness, highness, and pleasantness) were used as the semantic differential scale. Fabric sounds by reciprocating friction of nylon taffeta and polyester leno had the highest value of LPT and evaluated as loud, sharp, rough, and unpleasant while polyester ultra suede and silk crepe de chine haying the lower LPT and ${\Delta}f$ were perceived as soft and quite. Comparing with fabric sound by one-way friction, fabric sound by reciprocation friction was perceived as more sharp, loud, and rough. LPT was also the most important factor affecting the sensation of the fabric sound by reciprocating friction.

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A Study of the Salt Rejection from the Surface of Marine Waste using Ultra Fine Bubble (초미세기포를 이용한 해양쓰레기 표면 내 염분제거에 관한 연구)

  • Kim, Bo-Min;Kim, Kwang-Koo;Park, Chan-Gyu
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.6
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    • pp.11-18
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    • 2021
  • Nano bubble water is used in various washing processes, including cleaning of solar panels, salt rejection of roads, and cleaning precision parts of machines. High cleaning efficiency and water conservation are obtained by applying nano bubbles during pretreatment of the marine waste cleaning system. This study compared the salt rejection of nano bubble water, and it was revealed that marine waste was produced by wood immersed in 200,000 mg/L NaCl solution. Using tap water and nano bubble water for washing, comparisons of the surface salt concentrations of wood were determined according to the nozzle, orifice diameter, pump speed and washing time. Decreased surface salt concentration was observed on the wood surface with increasing washing time. Water consumption was optimal between 5- and 10-seconds washing time. Increasing orifice diameter of the nozzle reduced the spraying pressure, with consequent increase in the wood surface salt concentration, thereby establishing the importance of orifice diameter of the nozzle. Compared to levels obtained with tap water, salt concentration of the wood surface after washing with nano bubble water was 2.2% lower with sector nozzle, and 30.9% lower with circular nozzle. In the washing experiment using nano bubble water, the salt concentration on the wood surface was about 9.5 mg/L lower when washed with sector nozzle than the circular nozzle.

The tectonic evolution of South Korea and Northeast Asia from Paleoproterozoic to Triassic (원생대 이후 트라이아스기까지의 남한과 동북아시아의 지구조 진화)

  • Oh, Chang-Whan
    • The Journal of the Petrological Society of Korea
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    • v.21 no.2
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    • pp.59-87
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    • 2012
  • Recent studies reveal that eclogite formed in the Hongseong area and post collision igneous rocks occurred throughout the Gyeonggi Massif during the Triassic Songrim Orogeny. These new findings derive the tectonic model in which the Triassic Qinling-Dabie-Sulu collision belt between the North and South China blocks extends into the Hongseong-Yangpyeong-Odesan collision belt in Korea. The belt may be further extended into the late Paleozoic subduction complex in the Yanji belt in North Korea through the Paleozoic subduction complex in the inner part of SW Japan. The collision belt divides the Gyeonggi Massif into two parts; the northern and southern parts can be correlated to the North and South China blocks, respectively. The collision had started from Korea at ca. 250 Ma and propagated to China. The collision completed during late Triassic. The metamorphic conditions systematically change along the collision belt:. ultrahigh temperature metamorphism occurred in the Odesan area at 245-230Ma, high-pressure metamorphism in the Hongseong area at 230 Ma and ultra high-pressure metamorphism in the Dabie and Sulu belts. This systematic change may be due to the increase in the depth of slab break-off towards west, which might be related to the increase of the amounts of subducted ocecnic slab towards west. The wide distribution of Permo-Triassic arc-related granitoids in the Yeongnam Massif and in the southern part of the South China block indicate the Permo-Triassic subduction along the southern boundary of the South China block which may be caused by the Permo-Triassic collision between the North and South China blocks. These studies suggest that the Songrim orogeny constructed the Korean Peninsula by continent collision and caused the subduction along the southern margin of the Yeongnam Massif. Both the northern and southern Gyeonggi Massifs had undergone 1870-1840 Ma igneous and metamorphic activities due to continent collision and subduction related to the amalgamation of Colombia Supercontinent. The Okcheon metamorphic belt can be correlated to the Nanhua rift formed at 760 Ma within the South China blocks. In that case, the southern Gyeonggi Massif and Yeongnam Massif can be correlated to the Yangtz and Cathaysia blocks in the South China block, respectively. Recently possible Devonian or late Paleozoic sediments are recognized within the Gyeonggi Massif by finding of Silurian and Devonian detrital zircons. Together with the Devonian metamorphism in the Hongseong and Kwangcheon areas, the possible middle Paleozoic sediments indicate an active tectonic activity within the Gyeonggi Massif during middle Paleozoic before the Permo-Triassic collision.

A LONGITUDINAL STUDY OF THE ACHIEVEMENT AND EFFECTS OF THE SCIENTIFICALLY GIFTED STUDENTS WHO HAVE TAKEN A ULTRA HIGH SPEED ACCELERATED EDUCATION FOR THE EARLY ENTRANCE OF KAIST (KAIST 조기진학을 위해 초고속 속진학습을 받은 과학영재들의 성취정도와 효과에 대한 종단연구)

  • Yuk, Keun-Cheol;Moon, Jeong-Hwa
    • Journal of Gifted/Talented Education
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    • v.14 no.2
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    • pp.1-18
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    • 2004
  • This study attempted to survey the present status of the eight students who, 17 years from now, had participated in a special program for 170 days preparing for early entrance to the KAIST. With six students who responded to the questionnaire previously sent, the study focused on each participant's achievement at present, his evaluation on Accelerated Education, his personal opinions on early entrance to university and Gifted Science Education. From the survey, we could find out that three participants had received a doctorate and they are currently working as researchers at research center or professors at university. The other three participants are working as researchers at research center after receiving the M. S. Academic achievements vary according to each participant, but three of them, who ranked high in research achievement, had their articles published in international journals of the SCI level even when they were between 25 and 28 of age. Two of them in particular showed outstanding engineering and developing the commercial modem for IMT 2000 for the first time in Korea. One participant entered Harvard University to major in physics and afterwards studied the law in UCLA. He is now a professor in the law department. Concerning the evaluations on Accelerated Education and early entrance system, four participants answered positively while two participants expressed negative attitudes. When asked their opinions on the Gifted Education in Korea, such problems were pointed out as too much pressure of entering the first-class universities, the tendency to avoid choosing science-related major at universities, the lack of education system that encourages creative thinking, etc. It is necessary that the accelerated education play an important role to maximize their hidden potentials. It remains to be seen in what places these six participants will find themselves and of what ideas they will come up within the next 17 years. It will be worthwhile to wait until then for another survey.