• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.361-365
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• 2022

Advanced packaging demands are driven by the need for dense integration systems. Consequently, stacked packaging technology has been proposed instead of reducing the ultra-fine patterns to secure economic feasibility. This study proposed an effective packaging process technology for semiconductor devices using a 9-inch dicing die attach film (DDAF), wherein the die attach and dicing films were combined. The process involved three steps: tape lamination, dicing, and bonding. Following the grinding of a silicon wafer, the tape lamination process was conducted, and the DDAF was arranged. Subsequently, a silicon wafer attached to the DDAF was separated into dies employing a blade dicing process with a two-step cut. Thereafter, one separated die was bonded with the other die as a substrate at 130 ℃ for 2 s under a pressure of 2 kgf and the chip was hardened at 120 ℃ for 30 min under a pressure of 10 kPa to remove air bubbles within the DAF. Finally, a curing process was conducted at 175 ℃ for 2 h at atmospheric pressure. Upon completing the manufacturing processes, external inspections, cross-sectional analyses, and thermal stability evaluations were conducted to confirm the optimality of the proposed technology for application of the DDAF. In particular, the shear strength test was evaluated to obtain an average of 9,905 Pa from 17 samples. Consequently, a 3D integration packaging process using DDAF is expected to be utilized as an advanced packaging technology with high reliability.

• Korean Chemical Engineering Research
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• v.60 no.3
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• pp.452-458
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• 2022

Three types of gas-liquid hybrid horizontal, vertical and needle-to-cylinder plasma reactors were fabricated. Through these reactors, a high-efficiency, eco-friendly cleaning concept that generates reactive active species generated in atmospheric plasma discharge and gas-liquid activation reaction of cleaning components through the potential difference within the electrode was presented. As a result of comparing the efficiency for cleaning performance, the needle-to-cylinder type reactor had the best characteristics. Through this study, it was confirmed that the gas-liquid hybrid atmospheric pressure plasma reactor has the potential to be applied to ultra-precision cleaning processes such as semiconductor processes.

• Journal of the Korea Concrete Institute
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• v.24 no.2
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• pp.173-183
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• 2012

Recently, experimental studies to prevent explosive spalling based on spalling mechanism and addition of Polypropylene fiber in high strength concrete (HSC) are performed actively. However, with respect to ultra high strength concrete (UHSC), its compact internal structure is more difficult release vapor pressure at rapid rising temperature compared to HSC. Therefore, in this study, an experiment was conducted to evaluate spalling properties of UHSC using ${\Box}$ $100mm{\times}100{\times}H200mm$ rectangular specimen according to ISO-834 standard fire curve. With respect melting point of fiber, three fiber types of Polyethylene, Polypropylene, and Nylon fibers with melting temperature of $110^{\circ}C$, $165^{\circ}C$, and $225^{\circ}C$, respectively, were considered. Mixed fiber of 0.15% and 0.25% of concrete volume was used to consider spalling properties based on water vapor pressure release. Then, TGDTA test on fiber and FEM analysis were performed. The results showed that it is difficult to prevent initial spalling without loss of fiber mass even if fiber melting temperature is low. Also, in preventing thermal spalling, fiber that melts to rapidly create porosity within 10 minutes of fire is more effective than that of low melting temperature property of fiber.

• Journal of Korean Society for Atmospheric Environment
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• v.22 no.6
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• pp.922-928
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• 2006

An absolute absorption cross section of benzene was measured with a spectrometer system including a mono-chrometer and a grating in the wavelength region of $240{\sim}280nm$ under the atmospheric pressure and room temperature in the laboratory. A certificated reference benzene gas ($98{\mu}mol/mol$ in $N_2$) was used to measure its absorption cross section. A 710 mm cell with a quartz window and a 150 W Xe arc lamp were employed. The magnitude of absorption cross section of $1.41{\times}10^{-18}cm^2$ was lower than that of the reference spectra ($2.5{\times}10^{-18}cm^2$) of high resolution spectrometer, Total measurement uncertainty was estimated to be 4.0%.

• Journal of the Korean Magnetics Society
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• v.5 no.5
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• pp.623-626
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• 1995

High coercivity thin $Fe_{3}O_{4}$ and ${\gamma}-Fe_{2}O_{3}$ films were deposited on Si substrate under well controlled $O_{2}$ partial pressure by dcreactive magnetron sputtering. The coercivity of as-deposited maggnetite films is below 640 Oe. After cxidizing at $360^{\circ}C$ for 10 minutes, the films transform to maghemite ${\gamma}-Fe_{2}O_{3}$ completely, and the coercivity increases greatly to 2100~4120 Oe, depending on modification of not with minor addition of Co or/and Mn. The orign of coercivity enhancement is attributed mainly to magnetic anisotropy arisen from interfacial stress. The addition of 5 at% Co and 5 at% Mn greatly enhances coercivity and squareness ratio. These films are potential for ultra-high density recording applications.

• Proceedings of the KSR Conference
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• 2011.10a
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• pp.1157-1161
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• 2011

Parametric study has been conducted to calculate the capacity of vacuum pump system that will be used to maintain the pressure of the tube system under atmosphere level. Recently many railroad researchers pay attention to the tube train system as one of the super high speed transportation system. To achieve the ultra super high speed, the inside of tube system should be maintained the low pressure level. In the low pressure environment, it is well known that air resistance of train is drastically decreased. Vacuum pump system will be used to make the low pressure level of tube system, exhaust the leakage air and supplement additional vacuum pumping. Qualitative and quantitative study has been conducted to review the effects of major parameters concerned with the capacity of vacuum pump system. As a results of these studies, we get the lump capacity of vacuum pump for various parameters. These results can be used to analyse the effects of the reduction of air resistance.

• Korean Journal of Food Science and Technology
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• v.32 no.1
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• pp.111-116
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• 2000

Effects of ultra-high pressure treatment on viable cell count and quality characteristics of low salt fermented anchovy under different operating conditions such as pressure$(200{\sim}500\;MPa)$, temperature$(20{\sim}50^{\circ}C)$ and treatment time$(5{\sim}20\;min)$ were investigated. Viable cell count decreased gradually with the increase of pressure and suddenly at 400 MPa. It also decreased by seven folds at $50^{\circ}C$ and logarithmically with the increase of treatment time. Peroxide value increased with the increase of pressure, temperature and treatment time, and temperature played a major role. Thiobarbituric acid value was higher by two folds in samples treated than in the untreated regardless of any conditions investigated. Volatile basic nitrogen was almost the same in all samples except the one at $50^{\circ}C$. The sample treated at greater than $30^{\circ}C$ under high hydrostatic pressure indicated higher value in amino nitrogen. Treatment at $20^{\circ}C/300$ MPa/15 min showed greater reductions in viable cell counts, remaining better quality of low salt fermented anchovy.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.208-208
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• 2010

Zinc oxide (ZnO) is a functional material with interesting optical and electrical properties, a wide band gap (more than 3.3 eV), a high transmittance in the visible light region, piezoelectric properties, and a high n-type conductivity. This material has been investigated for use in many applications, such as transparent electrodes, blue light-emitting diodes, and ultra-violet detector. ZnO films grown under low oxygen pressure by thin film deposition methods show low resistivity and large free electron concentration. Therefore, reducing the background carrier concentration in ZnO films is one of the major challenges ahead of realizing high-performance ZnO-based optoelectronic devices. In this study, we deposited ZnO thin films on sapphire substrates by pulsed laser deposition (PLD) with employing an oxygen plasma source to decrease the background free-electron concentration and enhance the crystalline quality. Then, the substrate temperature was varied between 200 'C to 900 'C The vacuum chamber was initially evacuated to a pressure of $10^{-6}$ Torr, and then a pure $O_2$ gas was introduced into the chamber and the pressure during deposition was maintained at $10^{-2}$ Torr. Crystallinity and orientation of ZnO films were investigated by X-ray diffraction (XRD). The film surface was analyzed with atomic force microscope (AFM). And electrical properties were measured at room temperature by Hall measurement.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.311-311
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• 2013

The resistance switching memory devices have several advantages to take breakthrough for the limitation of operation speed, retention, and device scale. Especially, the metal-oxide materials such as ZnO are able to fabricate on the flexible and visible transparent plastic substrate. Also, the quantum dots (QDs) embedded in dielectric layer could be improve the ratio between the low and the high resistance becauseof their Coulomb blockade, carrier trap and induced filament path formation. In this study, we irradiated 0.2-MeV-electron beam on the ZnO/QDs/ZnO structure to control the defect and oxygen vacancy of ZnO layer. The metal-oxide QDs embedded in ZnO layer on Pt/glass substrate were fabricated for a memory device and evaluated electrical properties after 0.2-MeV-electron beam irradiations. To formation bottom electrode, the Pt layer (200 nm) was deposited on the glass substrate by direct current sputter. The ZnO layer (100 nm) was deposited by ultra-high vacuum radio frequency sputter at base pressure $1{\times}10^{-10}$ Torr. And then, the metal-oxide QDs on the ZnO layer were created by thermal annealing. Finally, the ZnO layer (100 nm) also was deposited by ultra-high vacuum sputter. Before the formation top electrode, 0.2 MeV liner accelerated electron beams with flux of $1{\times}10^{13}$ and $10^{14}$ electrons/$cm^2$ were irradiated. We will discuss the electrical properties and the physical relationships among the irradiation condition, the dislocation density and mechanism of resistive switching in the hybrid memory device.

• Steel and Composite Structures
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• v.37 no.2
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• pp.211-227
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• 2020

To explore the feasibility of eliminating the longitudinal rebars and stirrups by using ultra-high-performance fiber reinforcement concrete (UHPFRC) in concrete encased steel composite stub column, compressive behavior of UHPFRC encased steel stub column has been experimentally investigated. Effect of concrete types (normal strength concrete, high strength concrete and UHPFRC), fiber fractions, and transverse reinforcement ratio on failure mode, ductility behavior and axial compressive resistance of composite columns have been quantified through axial compression tests. The experimental results show that concrete encased composite columns with NSC and HSC exhibit concrete crushing and spalling failure, respectively, while composite columns using UHPFRC exhibit concrete spitting and no concrete spalling is observed after failure. The incorporation of steel fiber as micro reinforcement significantly improves the concrete toughness, restrains the crack propagation and thus avoids the concrete spalling. No evidence of local buckling of rebars or yielding of stirrups has been detected in composite columns using UHPFRC. Steel fibers improve the bond strength between the concrete and, rebars and core shaped steel which contribute to the improvement of confining pressure on concrete. Three prediction models in Eurocode 4, AISC 360 and JGJ 138 and a proposed toughness index (T.I.) are employed to evaluate the compressive resistance and post peak ductility of the composite columns. It is found that all these three models predict close the compressive resistance of UHPFRC encased composite columns with/without the transverse reinforcement. UHPFRC encased composite columns can achieve a comparable level of ductility with the reinforced concrete (RC) columns using normal strength concrete. In terms of compressive resistance behavior, the feasibility of UHPFRC encased steel composite stub columns with lesser longitudinal reinforcement and stirrups has been verified in this study.